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    • 27. 发明申请
    • LASER INTERFEROMETER
    • US20220390755A1
    • 2022-12-08
    • US17804091
    • 2022-05-25
    • SEIKO EPSON CORPORATION
    • Kohei YAMADATakeshi SHIMIZU
    • G02B27/28G01B9/02G02B5/18G02B6/02
    • A laser interferometer that includes a light source configured to emit laser light, an optical divider configured to divide the laser light into a first optical path and a second optical path, an optical modulator being provided on the first optical path or the second optical path, including an oscillator that oscillates when a current is applied, and being configured to modulate the laser light by using the oscillator, a photoreceptor configured to receive the laser light and output a photoreception signal, the laser light being reflected by an object to be measured that is provided on the first optical path or the second optical path, and a demodulation circuit configured to demodulate, from the photoreception signal, a Doppler signal derived from the object to be measured, based on a reference signal and a modulation signal derived from the optical modulator, wherein Iq/f≤1×10−7 is satisfied, where an amplitude value of the current applied to the oscillator that is oscillating is Iq [A] and an oscillation frequency of the oscillator is f [Hz].