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21. 发明授权

US11635682B2 Systems and methods for feedforward process control in the manufacture of semiconductor devices 有权
公开(公告)号：US11635682B2
公开(公告)日：2023-04-25
申请号：US16766807
申请日：2020-04-23
申请人： KLA Corporation
发明人： Roie Volkovich , Liran Yerushalmi , Achiam Bar
IPC分类号： G03F7/20 , G03F1/70 , G01B11/24
摘要： A method for process control in the manufacture of semiconductor devices including performing metrology on at least one Design of Experiment (DOE) semiconductor wafer included in a lot of semiconductor wafers, the lot forming part of a batch of semiconductor wafer lots, generating, based on the metrology, one or more correctables to a process used to manufacture the lot of semiconductor wafers and adjusting, based on the correctables, the process performed on at least one of; other semiconductor wafers included in the lot of semi-conductor wafers, and other lots of semiconductor wafers included in the batch.

22. 发明授权

US11635518B2 Measurement apparatus and measurement method using a laser and beat signals 有权
公开(公告)号：US11635518B2
公开(公告)日：2023-04-25
申请号：US16887941
申请日：2020-05-29
申请人： Mitutoyo Corporation
发明人： Hiroki Ujihara , Yoshimasa Suzuki , Shinichi Hara
IPC分类号： G01S17/34 , G01S7/481 , G01S7/48 , G01B9/02003
摘要： A measurement apparatus, including: a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes; a branching part that branches the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a plurality of beat signals by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a conversion part that converts the plurality of beat signals into digital signals by sampling the beat signals at a frequency greater than or equal to four times a resonator frequency of the laser resonator; and a calculation part that calculates a distance from the measurement apparatus to the object to be measured on the basis of the digital signals is provided.

23. 发明授权

US11635500B2 Lidar phase noise cancellation system 有权
公开(公告)号：US11635500B2
公开(公告)日：2023-04-25
申请号：US17463263
申请日：2021-08-31
申请人： OURS Technology, LLC
发明人： Andrew Steil Michaels , Sen Lin
IPC分类号： G01S17/931 , G01S7/497 , G01S7/493 , H01S3/00 , B60W60/00 , G01S7/481 , G01S7/4915 , G01S17/06 , G01S17/58 , G01S17/32 , G01B9/02003 , G01S7/4911
摘要： A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

24. 发明授权

US11635373B2 Information processing apparatus, information processing method, program, and monitoring system 有权
公开(公告)号：US11635373B2
公开(公告)日：2023-04-25
申请号：US16757900
申请日：2018-08-29
申请人： JAPAN AEROSPACE EXPLORATION AGENCY
发明人： Atsushi Kanda , Kazuki Hashimoto
IPC分类号： G01N21/47 , G01B11/06 , G01N21/84 , G01N21/94 , G01W1/14 , G08B19/02 , B60W40/06 , G01N21/3554 , G01N21/21 , B60T8/171 , B60T8/172
摘要： It is desirable to provide an information processing apparatus, an information processing method, a program, and a monitoring system capable of monitoring a condition of a measured surface highly accurately and using the monitoring result effectively.
To attain the aforementioned object, according to a mode of the present invention, an information processing apparatus includes an obtaining module and a generating module. The obtaining module obtains measuring data about a measured surface. The generating module generates covering material information about a covering material that covers the measured surface based on a feature of the obtained measuring data.

25. 发明授权

US11635287B2 Magnet-based rotary angle sensor system 有权
公开(公告)号：US11635287B2
公开(公告)日：2023-04-25
申请号：US17239700
申请日：2021-04-26
申请人： FRABA B.V.
发明人： Andreas Backes
IPC分类号： G01B7/30 , G01D5/14
摘要： A magnet-based rotary angle sensor system for detecting a shaft rotation. The magnet-based rotary angle sensor system includes a rotatable excitation unit which is mounted to a shaft for rotation therewith, and a static sensor unit. The rotatable excitation unit includes at least one excitation magnet. The static sensor unit detects an excitation-magnetic field generated by the at least one excitation magnet. The static sensor unit includes a first Wiegand sensor module and a second Wiegand sensor module which are arranged in a cross-shaped manner and axially spaced from each other.

26. 发明授权

US11632904B2 Method for analyzing the operating condition of a cutting device and cutting device 有权
公开(公告)号：US11632904B2
公开(公告)日：2023-04-25
申请号：US16627943
申请日：2018-07-04
申请人： SMF—HOLDING GMBH
发明人： Steffen Gürke , Ralf Schmidt , Sascha Otto
IPC分类号： A01D41/127 , A01D34/14 , G01B21/00 , G01L5/00
摘要： A method for analyzing the operating state of a cutting device for mowing crop, the cutting device having at least one mowing knife having cutting edges which interact with counter cutting edges of the cutting device, including: detecting of a signal representing the stroke position of the mowing knife; detecting a signal representing the knife force for driving the mowing knife as a function of the stroke position, and determining crop and/or cutting system properties on the basis of an evaluation of the signal representing the knife force as a function of the stroke position.

27. 发明申请

US20230124422A1 OPTICAL METROLOGY SYSTEM AND METHOD 有权
公开(公告)号：US20230124422A1
公开(公告)日：2023-04-20
申请号：US17904950
申请日：2021-02-24
申请人： NOVA LTD.
发明人： Gilad BARAK , Amir Shayari
IPC分类号： G03F7/20 , G01B9/02
摘要： A measurement system is provided for use in optical metrology measurements. The measurement system comprises a control system which processes raw measured data indicative of spectral interferometric signals measured on a sample in response to illuminating electromagnetic field incident onto a top portion of the sample and comprising at least one spectral range to which said sample is substantially not absorbing. The processing comprises: extracting, from the raw measured data, a portion of spectral interferometric signals describing signal intensity variation with change of optical path difference during interferometric measurements, the extracted signal portion being independent of interferometric signals returned from a bottom portion of the sample in response to said illuminating electromagnetic field; and directly determining, from said extracted portion, both spectral amplitude and phase of reflection of the electromagnetic field from the top portion of the sample, thereby determining measured spectral signature characterizing the SA, SC, SD, SE, SG, SK, SL, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW.

28. 发明申请

US20230123109A1 CURING OVEN AND METHOD OF CONTROLLING CURING OVEN 有权
公开(公告)号：US20230123109A1
公开(公告)日：2023-04-20
申请号：US17792442
申请日：2021-01-15
申请人： ROCKWOOL A/S
发明人： Ole Andreasen
IPC分类号： C03B37/10 , F27B9/10 , F27B9/40 , G01B15/06 , D04H1/4209 , D04H1/58
摘要： A curing oven for curing a mineral wool web includes an air permeable conveyor for advancing the mineral wool web through a substantially closed cabinet from a mineral wool web inlet provided at one end of the cabinet to a mineral wool web outlet provided at another end of the cabinet. The curing oven also includes a heated air inlet arranged for directing a flow of heated air through the conveyor. The curing oven includes at least one wool deformation detector.

29. 发明申请

US20230122542A1 PRECISION DECIMAL INCH TAPE MEASURE 有权
公开(公告)号：US20230122542A1
公开(公告)日：2023-04-20
申请号：US17504981
申请日：2021-10-19
申请人： Charles ALDRICH
发明人： Charles ALDRICH
IPC分类号： G01B3/1056 , G01B3/00
摘要： A precision decimal inch tape measure has a housing that holds a retractable measurement tape. The retractable measurement tape has a hook on an end. The retractable measurement tape has an upper measurement scale defined along an upper portion of the retractable measurement tape and a lower measurement scale defined along a lower portion of the retractable measurement tape. Both the upper measurement scale and the lower measurement scale indicate inches divided into decimal divisions. The upper measurement scale includes a cumulative foot indicia and the lower measurement scale includes a cumulative inch indicia. The cumulative foot indicia is indicated in red and the cumulative inch indicia is indicated in black. The precision decimal inch tape measure is designed to work with drawings produced in decimal inches as is the preferred standard of CAD drawings. This instant invention works with cumulative feet and inches or with cumulative inches.

30. 发明申请

US20230122401A1 METHOD AND APPARATUS FOR DEADBOLT POSITION SENSING 有权
公开(公告)号：US20230122401A1
公开(公告)日：2023-04-20
申请号：US17851903
申请日：2022-06-28
申请人： Schlage Lock Company LLC
发明人： William B. Ainley , David M. Baty , David Newby , Justin D. Seacat
IPC分类号： E05B47/00 , G01B7/00 , G01D5/12
摘要： The present disclosure is directed to an electronic deadbolt control system including a deadbolt configured to extend or retract between a locked position and an unlocked position, respectively. An output shaft connected between a final gear and the deadbolt is configured to transmit an actuation force to the deadbolt from an electric motor. A first magnet and a second magnet are associated with the final gear to define a home position for either a left hand deadbolt or a right hand deadbolt. A cam is positioned on the output shaft to engage with a switch such that, in combination with a threshold current motor output, the control system determines whether the deadbolt is in an extended position or a retracted position. A thumb-turn shaft is disengaged from the final gear in the home position to permit manual actuation of a thumb-turn.

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