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31. 发明授权

US07243547B2 MEMS SAW sensor 有权
标题翻译： MEMS SAW传感器
公开(公告)号：US07243547B2
公开(公告)日：2007-07-17
申请号：US10964519
申请日：2004-10-13
申请人： Cornel P. Cobianu , Ioan Pavelescu , James D. Cook
发明人： Cornel P. Cobianu , Ioan Pavelescu , James D. Cook
IPC分类号： H02N2/00
CPC分类号： G01L9/0025
摘要： Devices and methods for acoustically measuring temperature and pressure are disclosed. An illustrative SAW sensor can include an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, a temperature sensor for measuring temperature along a first direction of the SAW delay line, and a pressure sensor for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna that wirelessly transmits and receives RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.
摘要翻译：公开了用于声学测量温度和压力的装置和方法。示意性SAW传感器可以包括沿着SAW延迟线发送和接收表面声波的电极结构，用于沿着SAW延迟线的第一方向测量温度的温度传感器和用于沿着SAW延迟线的第二方向测量压力的压力传感器 SAW延迟线。 SAW传感器可以包括天线，该天线将无线传输和接收来自可以用于为SAW传感器供电的电询问器单元的RF信号。

32. 发明授权

US07000298B2 Method a quartz sensor 有权
标题翻译：方法石英传感器
公开(公告)号：US07000298B2
公开(公告)日：2006-02-21
申请号：US10828142
申请日：2004-04-20
申请人： James D. Cook , Cornel P. Cobianu , Vlad Buiculescu , Ioan Pavelescu , Brian D. Speldrich , James Z. Liu , Brian J. Marsh
发明人： James D. Cook , Cornel P. Cobianu , Vlad Buiculescu , Ioan Pavelescu , Brian D. Speldrich , James Z. Liu , Brian J. Marsh
IPC分类号： H01G7/00 , C23F1/00
CPC分类号： G01L9/0025 , Y10T29/42 , Y10T29/43 , Y10T29/49005 , Y10T29/4913
摘要： A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.
摘要翻译：公开了一种石英传感器方法和系统，其中可以机械地模拟多个SAW感测谐振器以在石英晶片衬底上实现。此后可以适当地蚀刻石英晶片衬底，以从石英晶片衬底产生石英膜。然后可以将多个SAW感测谐振器（例如，压力，参考和/或温度的SAW谐振器）定位在石英晶片衬底上，其基于在衬底上的先前机械模拟实现，从而从衬底上产生石英传感器封装，石英晶片基板。

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