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    • 31. 发明授权
    • Connection device for articulated arm measuring machines
    • 铰接臂测量机连接装置
    • US07765707B2
    • 2010-08-03
    • US12217988
    • 2008-07-10
    • Raffaele Tomelleri
    • Raffaele Tomelleri
    • G01B5/004
    • G01B5/008
    • The present invention concerns a connection device for use in an articulated apparatus comprising two or more tandemly arranged interconnected movable segments, for limiting rotation between two adjoining segments connected by a joint having a single axis of rotation, comprising: a spring assembly comprising one or more helical torsion springs, which assembly has a first end and a second end, configured for placement co-axially along the joint axis of rotation; a stop pin adapted for attachment to one adjoining segment, another stop pin adapted for attachment to the other adjoining segment, each pin moveable around the axis of rotation in fixed relation to the attached segment, wherein the first end of the spring assembly is configured for disengageable connection with the stop pin of one segment, and the second end is configured for disengageable connection with the stop pin of the other segment, such that the degree of rotation by the one segment about the joint axis relative to the other segment is limited as spring assembly engages both pins, and by the torque induced in the spring assembly.
    • 本发明涉及一种用于铰接装置的连接装置,包括两个或多个串列布置的互连可动部分,用于限制通过具有单个旋转轴线的接头连接的两个邻接部分之间的旋转,包括:弹簧组件,包括一个或多个 螺旋扭转弹簧,该组件具有第一端和第二端,构造成用于沿着接头的旋转轴线同轴放置; 止动销,其适于附接到一个相邻的段,另一个止动销适于附接到另一个相邻的段,每个销可围绕所述连接的段固定的旋转轴线移动,其中弹簧组件的第一端被配置为 与一段的止动销的可脱离连接,并且第二端构造成与另一段的止动销可脱离连接,使得相对于另一段围绕接头轴的一个段的旋转程度被限制为 弹簧组件接合两个销,以及通过弹簧组件中引起的扭矩。
    • 32. 发明授权
    • Method for scanning a surface with the aid of a coordinate measuring machine and coordinate measuring machine
    • 借助于坐标测量机和坐标测量机扫描表面的方法
    • US07644507B2
    • 2010-01-12
    • US12189252
    • 2008-08-11
    • Andreas FuchsJochen BurgerHermann Deeg
    • Andreas FuchsJochen BurgerHermann Deeg
    • G01B5/004
    • G01B21/045G01B5/008
    • A method for scanning a work piece surface uses a coordinate measurement device. A probe element is brought into contact with the surface and the probe element is moved along the surface. The coordinate measurement device has a plurality of degrees of freedom, which are independent of one another, in the possible movements of the probe element with respect to the work piece. Maximum speeds which describe the maximum of a movement speed component of the probe element based on the respective degree of freedom are defined for the degrees of freedom. An estimated path on which the probe element is intended to move during scanning is predefined. The actual scanning path can differ from the estimated scanning path. A maximum scanning speed at which the estimated scanning path can be traveled with a constant speed of the probe element is determined.
    • 扫描工件表面的方法使用坐标测量装置。 探针元件与表面接触并且探针元件沿表面移动。 坐标测量装置在探头元件相对于工件的可能移动中具有彼此独立的多个自由度。 基于相应的自由度来描述探针元件的移动速度分量的最大值的最大速度被定义为自由度。 预定义在扫描期间探测元件要移动的估计路径。 实际扫描路径可能与估计的扫描路径不同。 确定以探头元件的恒定速度行进估计的扫描路径的最大扫描速度。
    • 35. 发明授权
    • Pattern measurement apparatus and pattern measuring method
    • 图案测量装置和图案测量方法
    • US07590506B2
    • 2009-09-15
    • US11728822
    • 2007-03-27
    • Jun Matsumoto
    • Jun Matsumoto
    • G01B5/004
    • G01N23/227G01B15/04G06T7/12G06T2207/10061
    • A pattern measurement apparatus includes a line profile creating unit for creating a line profile of a pattern formed on a sample by scanning with a charged particle beam, a derivative profile creating unit for creating a second derivative profile by differentiating twice the line profile, and an edge detecting unit for judging whether an edge in the pattern is a rising edge or a falling edge. Assuming that the two peak positions appearing in the vicinity of the edge position of the pattern obtained from the second derivative profile are defined as X1 and X2, X2 being larger than X1, the edge detecting unit judges that the edge is a rising edge when a signal amount in the peak position X1 is larger than a signal amount in the peak position X2.
    • 图案测量装置包括:线轮廓生成单元,用于通过用带电粒子束扫描来产生在样本上形成的图案的线轮廓;导数轮廓创建单元,用于通过对线轮廓进行微分来产生二阶导数轮廓, 边缘检测单元,用于判断图案中的边缘是上升沿还是下降沿。 假设出现在从二次导数轮廓获得的图案的边缘位置附近出现的两个峰值位置被定义为X1和X2,X2大于X1,边缘检测单元判断边缘是上升沿,当a 峰值位置X1的信号量大于峰值位置X2的信号量。
    • 37. 发明授权
    • Measurement probe for use in coordinate measuring machines
    • 用于坐标测量机的测量探头
    • US07500319B2
    • 2009-03-10
    • US11630672
    • 2005-06-20
    • Bo Pettersson
    • Bo Pettersson
    • G01B5/00G01B5/004G01B7/004
    • G01B11/007G01B5/012
    • A measurement probe for use in coordinate measuring machines, which probe comprises a base (1) connected to a coordinate measuring machine, a measurement tip (4) and a ball (5) arranged at the first end of the measurement tip (4). The measurement tip (4) is supported at its second end with the aid of at least three rigid supports (2) supported by the base (1), whereby the supports (2) are connected to the measurement tip by means of spherical connections and where the supports (2) can be displaced along their longitudinal directions relative to the base (1). The supports (2) are arranged such that they pass through the base (1), and can be displaced along their longitudinal directions by protruding to a greater or lesser degree on the side of the base (1) that is opposite relative to the measurement tip holder (3).
    • 一种用于坐标测量机的测量探针,该探针包括连接到坐标测量机的基座(1),设置在测量尖端(4)的第一端的测量尖端(4)和球(5))。 借助于由基座(1)支撑的至少三个刚性支撑(2),测量头(4)在其第二端处被支撑,由此支撑件(2)通过球形连接连接到测量尖端,并且 其中支撑件(2)可以相对于底座(1)沿其纵向方向移位。 支撑件(2)被布置成使得它们穿过基部(1),并且可以沿着它们的纵向方向移位,大体上或更小程度上在基部(1)的相对于测量方向相反的一侧 尖端保持器(3)。
    • 38. 发明申请
    • Co-Ordinate Measuring Machine
    • 协调测量机
    • US20080120860A1
    • 2008-05-29
    • US11791707
    • 2005-12-06
    • Bo Pettersson
    • Bo Pettersson
    • G01B5/004
    • G01B5/008G01B21/047
    • A co-ordinate measuring machine to determine the co ordinates of a number of points on the surface of a measurement object, including a support beam (4) that supports a measurement head over the surface of a support table (1) that supports the measurement object, the co ordinates of which are to be measured. The support beam (4) is supported above the support table (1) by two legs (7, 8) that are not only possible to displace together along the support table (1) in order to displace the support beam (4) and the measurement head forwards and backwards in a direction relative to the support table (1), but also it is possible to displace the legs (7, 8) relative to each other in different directions along the support table (1) in order to raise and lower the support beam (4) and the measurement head relative to the support table.
    • 一种坐标测量机,用于确定测量对象表面上的若干点的坐标,包括在支撑测量的支撑台(1)的表面上支撑测量头的支撑梁(4) 对象,其坐标是要衡量的。 支撑梁(4)通过两个腿部(7,8)支撑在支撑台(1)上方,这两个腿部(7,8)不仅可以沿着支撑台(1)一起位移,以便使支撑梁(4)和 测量头在相对于支撑台(1)的方向上向前和向后,还可以沿着支撑台(1)在不同的方向上相对于彼此移动腿部(7,8),以便升高和 相对于支撑台降低支撑梁(4)和测量头。