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    • 35. 发明申请
    • MICROSCOPE DEVICE
    • US20210173192A1
    • 2021-06-10
    • US17267879
    • 2019-08-12
    • Miltenyi Biotec B.V. & CO. KG
    • Rainer UHL
    • G02B21/24G02B21/02G02B21/08G02B21/26G02B27/14
    • There is provided a microscope device comprising: an objective (1); an actuator (6) for adjustment of a distance between the objective and a sample (3) in a focusing direction z during a focusing action to reach and hold a desired focus position, an absolute z-position detector (7) for measuring a z-position of the actuator in the focusing direction, an autofocus light source (11); a first optical arrangement (12, 13) for generating a focused spot (31) of autofocus light from the light source in the backfocal plane (14) of the objective (1) at a position offset from the optical axis of the objective by a lateral offset distance (of), such that the objective generates a collimated incoming beam (22) of autofocus light, which is directed at an oblique angle (13) relative to the optical axis (15) of the objective onto the substrate; and a second optical arrangement (13, 16) for generating collimated outgoing beams (34, 35) of autofocus light from the collimated incoming beam as reflected by a substrate surface (4, 5) through the objective and directing the collimated outgoing beam onto a detector-array (17). The device further comprises a relative z-position detector (20) comprising the sensor-array (17) configured to detect the wandering position of the outgoing collimated autofocus light beam (34, 35) on the detector during the focusing action, the wandering position reflecting a change in the distance between the objective and the reflecting substrate surface (4, 5) in the z-direction; and a central control unit (8, 10) configured to control the actuator based on signals from the absolute z-position detector and the relative z-position detector, wherein the signal of the relative z-position detector is used to dynamically recalibrate the absolute z-position detector during focus-find and focus-hold activities.