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    • 47. 发明申请
    • VERTICAL TUNNEL FIELD EFFECT TRANSISTOR
    • 垂直隧道场效应晶体管
    • US20150069458A1
    • 2015-03-12
    • US14021795
    • 2013-09-09
    • QUALCOMM Incorporated
    • Xia LiMing CaiBin Yang
    • H01L29/66H01L29/78
    • H01L29/66977H01L29/66356H01L29/66795H01L29/7391H01L29/7827
    • A tunnel field transistor (TFET) device includes a fin structure that protrudes from a substrate surface. The fin structure includes a base portion proximate to the substrate surface, a top portion, and a first pair of sidewalls extending from the base portion to the top portion. The first pair of sidewalls has a length corresponding to a length of the fin structure. The fin structure also includes a first doped region having a first dopant concentration at the base portion of the fin structure. The fin structure also includes a second doped region having a second dopant concentration at the top portion of the fin structure. The TFET device further includes a gate including a first conductive structure neighboring a first sidewall of the first pair of sidewalls. A dielectric layer electrically isolates the first conductive structure from the first sidewall.
    • 隧道场晶体管(TFET)器件包括从衬底表面突出的鳍结构。 翅片结构包括靠近基底表面的基部,顶部和从基部延伸到顶部的第一对侧壁。 第一对侧壁的长度对应于翅片结构的长度。 翅片结构还包括在鳍结构的基部处具有第一掺杂剂浓度的第一掺杂区域。 鳍结构还包括在鳍结构的顶部具有第二掺杂剂浓度的第二掺杂区。 TFET器件还包括栅极,其包括与第一对侧壁的第一侧壁相邻的第一导电结构。 电介质层将第一导电结构与第一侧壁电隔离。