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51. 发明授权

US10043689B2 Chamber apparatus and processing system 有权
公开(公告)号：US10043689B2
公开(公告)日：2018-08-07
申请号：US14732064
申请日：2015-06-05
申请人： HIRATA CORPORATION
发明人： Jyunichi Hirakida
IPC分类号： H01L21/67
摘要： A chamber apparatus according to the present invention including a chamber main body including an opening portion in an upper surface; a door that opens/closes the opening portion; and a guide mechanism that slides the door with respect to the chamber main body. The door includes a movable member slidably supported by the guide mechanism; a first support provided on the movable member in a fixed manner; a door main body that opens/closes the opening portion; a second support provided on the door main body in a fixed manner; and a floating mechanism that connects the first support and the second support immovably in a horizontal direction and support the second support displaceably in a vertical direction with respect to the first support.

52. 发明申请

US20180178335A1 TURNTABLE 审中-公开
公开(公告)号：US20180178335A1
公开(公告)日：2018-06-28
申请号：US15902558
申请日：2018-02-22
申请人： HIRATA CORPORATION
发明人： Takeru HIGUCHI , Yuichi IWATA , Bungo MATSUMOTO
IPC分类号： B23Q1/52 , A47B11/00
CPC分类号： B23Q1/522 , A47B11/00 , A47B13/081 , B25H1/14
摘要： A turntable includes a rotatably supported table, an electric cylinder, and a cam mechanism configured to convert the linear motion of the electric cylinder into the rotary motion of the table. The cam mechanism includes at least one cam groove provided on the table side, and at least one cam follower moved in parallel to the linear motion direction of the electric cylinder and configured to engage with the at least one cam groove.

53. 发明申请

US20180117722A1 ASSEMBLING APPARATUS, ASSEMBLING HEAD, AND ASSEMBLING METHOD 审中-公开
公开(公告)号：US20180117722A1
公开(公告)日：2018-05-03
申请号：US15801769
申请日：2017-11-02
申请人： HIRATA CORPORATION
发明人： Hisayuki SUEOKA
IPC分类号： B23P19/04 , B23P21/00
摘要： An assembling apparatus assembles a retainer by engaging a pair of cotter pieces with a valve stem. The apparatus includes an assembling head configured to hold, in a separated state, the pair of cotter pieces in the separated state prepared by a preparation unit and engage the pair of cotter pieces with the upper end of the valve stem. The head includes a storage member including a storage chamber, and a holding unit capable of pressing the pair of cotter pieces stored in the storage chamber against the upper end of the valve stem. The storage member includes first and second abutting portions. The second abutting portion positions the valve stem in the axial direction, and the first abutting portion positions the pair of cotter pieces in the axial direction.

54. 外观设计

USD811457S1 Substrate conveyance arm 有权
公开(公告)号：USD811457S1
公开(公告)日：2018-02-27
申请号：US29544295
申请日：2015-11-02
申请人： HIRATA CORPORATION
设计人： Tetsuya Sakai , Hideki Sakaue

55. 发明授权

US09776333B2 Hand member and hand 有权
公开(公告)号：US09776333B2
公开(公告)日：2017-10-03
申请号：US15337073
申请日：2016-10-28
申请人： Hirata Corporation
发明人： Tetsuya Sakai , Hideki Sakaue
IPC分类号： H01L21/687 , B25J15/00 , B25J11/00
CPC分类号： B25J15/0014 , B25J11/0095 , H01L21/68707
摘要： A hand member forms a hand of a robot arm for transferring a semiconductor wafer. The hand member is a U-shaped member on which the semiconductor wafer is placed. The hand member includes at least one fitting portion on which a frictional holding member for holding the semiconductor wafer is fitted sideways, on each of an inner edge and an outer edge.

56. 发明授权

US09620399B2 Load port 有权
公开(公告)号：US09620399B2
公开(公告)日：2017-04-11
申请号：US14622973
申请日：2015-02-16
申请人： Hirata Corporation
发明人： Hidenobu Tanimura , Minoru Soraoka , Shinji Yokoyama , Noriyoshi Toyoda
IPC分类号： H01L21/677 , H01L21/67
CPC分类号： H01L21/67775 , H01L21/67017 , H01L21/67772
摘要： A load port is provided with a table and a plate. The table is arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and is adapted to mount on it a container with the piece of material received in the same. The plate serves to isolate an interior of the atmospheric transfer unit from an exterior of the atmospheric transfer unit. The load port includes an exhaust duct arranged on a rear side of the plate and a fan arranged in a lower extremity of the exhaust duct. By the exhaust duct and the fan, an internal atmosphere of the atmospheric transfer unit can be exhausted into the atmosphere.

57. 发明授权

US09597758B2 Work support apparatus 有权
公开(公告)号：US09597758B2
公开(公告)日：2017-03-21
申请号：US14136535
申请日：2013-12-20
申请人： HIRATA CORPORATION
发明人： Tatsuya Tayama
IPC分类号： B23Q3/04 , B25B11/00 , B23Q1/54 , B23Q3/02
CPC分类号： B23Q3/04 , B23Q1/5406 , B23Q3/02 , B25B11/00
摘要： A work support apparatus according to the present invention includes a base unit, a holding unit stands on the base unit and holds a work in a cantilevered state, and a tilt mechanism that makes the holding unit pivot with respect to the base unit. The holding unit includes a holding portion holding the work in a state in which a side portion of the work on the holding unit side is exposed. The tilt mechanism is an arcuate slide mechanism including an arcuate shape portion with respect to a virtual horizontal line as the center, and an abutting portion abutting against the arcuate shape portion.

58. 发明申请

US20160375447A1 ELECTRIC DUST COLLECTOR OF CYCLONE SEPARATOR 审中-公开
标题翻译：循环式分离器的集尘器
公开(公告)号：US20160375447A1
公开(公告)日：2016-12-29
申请号：US15190991
申请日：2016-06-23
申请人： HIRATA CORPORATION
发明人： Yuichiro HIRATA , Toshihiro TOYOSHIMA , Yoko OSUMI , Maasa IZUMIDA
IPC分类号： B04C9/00 , B03C3/36 , B03C3/68 , B03C3/74 , B03C3/15 , B03C3/41
CPC分类号： B03C3/68 , B03C3/011 , B03C3/017 , B03C3/49 , B04C2009/001
摘要： A cyclone separator includes a centrifugal separator which separates solid matters from a fluid mixture containing fluid and solid matters. The centrifugal separator includes a fluid introducing unit which introduces the fluid subjected to the separation of the solid matters. An electric dust collector of the cyclone separator includes a main unit and a container. The container is provided in the fluid introducing unit and houses the main unit. The main unit includes an electrostatic member, an introducing member, a voltage applying unit and a controller. The introducing member is slidable along a longitudinal direction of the electrostatic member. The electrostatic member is switched to an electrically-charged state or a non-electrically-charged state by on and off control of the voltage applying unit using the controller. Minute particles of the solid matters are adhered to the electrostatic member by an electrostatic force generated by electrical charging of the electrostatic member.
摘要翻译：旋风分离器包括将固体物质与含有流体和固体物质的流体混合物分离的离心分离器。离心分离器包括引入固体物分离的流体的流体引入单元。旋风分离器的电除尘器包括主单元和容器。容器设置在流体引入单元中并容纳主单元。主单元包括静电元件，引入元件，电压施加单元和控制器。引导构件可沿着静电构件的纵向方向滑动。通过使用控制器的电压施加单元的接通和关断控制，静电构件被切换到带电状态或非充电状态。通过静电部件的充电产生的静电力将固体物质的微粒子附着在静电部件上。

59. 发明申请

US20160358800A1 CHAMBER APPARATUS AND PROCESSING SYSTEM 审中-公开
标题翻译：室内设备和加工系统
公开(公告)号：US20160358800A1
公开(公告)日：2016-12-08
申请号：US14732064
申请日：2015-06-05
申请人： HIRATA CORPORATION
发明人： Jyunichi HIRAKIDA
IPC分类号： H01L21/677 , H01L21/67
CPC分类号： H01L21/67196 , H01L21/67126 , H01L21/6719
摘要： A chamber apparatus according to the present invention including a chamber main body including an opening portion in an upper surface; a door that opens/closes the opening portion; and a guide mechanism that slides the door with respect to the chamber main body. The door includes a movable member slidably supported by the guide mechanism; a first support provided on the movable member in a fixed manner; a door main body that opens/closes the opening portion; a second support provided on the door main body in a fixed manner; and a floating mechanism that connects the first support and the second support immovably in a horizontal direction and support the second support displaceably in a vertical direction with respect to the first support.
摘要翻译：根据本发明的室装置，包括：室主体，其在上表面包括开口部; 打开/关闭开口部的门; 以及使门相对于室主体滑动的引导机构。所述门包括由所述引导机构可滑动地支撑的可动构件; 以固定方式设置在所述可动构件上的第一支撑件; 打开/关闭开口部的门主体; 以固定方式设置在门主体上的第二支撑件; 以及浮动机构，其在水平方向上不可移动地连接第一支撑件和第二支撑件，并且相对于第一支撑件在垂直方向上可移动地支撑第二支撑件。

60. 发明授权

US09469479B2 Transport unit, deceleration stop device, transport system, and control method 有权
标题翻译：运输单元，减速停止装置，运输系统和控制方法
公开(公告)号：US09469479B2
公开(公告)日：2016-10-18
申请号：US14672918
申请日：2015-03-30
申请人： HIRATA CORPORATION
发明人： Bungo Matsumoto
IPC分类号： B65G47/26 , B65G43/08 , B65G13/02 , B65G13/071 , B65G13/073 , B65G37/00
CPC分类号： B65G13/02 , B65G13/071 , B65G13/073 , B65G37/00 , B65G43/08 , B65G47/261
摘要： This invention provides a transport unit that includes driving rollers arrayed in the transport direction of a work, and when the work transported by the driving rollers reaches a predetermined stop position, stops movement of the work. The driving rollers include at least one first driving roller, and at least one second driving roller arranged on the side of the predetermined stop position in the transport direction with respect to the first driving roller. The first driving roller is a roller capable of idling on a driving shaft. The second driving roller is a roller incapable of idling on the driving shaft.
摘要翻译：本发明提供了一种输送单元，其包括沿着工件的输送方向排列的驱动辊，并且当由驱动辊输送的工件达到预定的停止位置时，停止工件的移动。驱动辊包括至少一个第一驱动辊和至少一个第二驱动辊，其布置在相对于第一驱动辊的输送方向上的预定停止位置的一侧。第一驱动辊是能够在驱动轴上空转的辊。第二驱动辊是不能在驱动轴上空转的辊。

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