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51. 发明授权

US08902496B2 Source of optical pulses 有权
标题翻译：光脉冲源
公开(公告)号：US08902496B2
公开(公告)日：2014-12-02
申请号：US13797640
申请日：2013-03-12
申请人： John Redvers Clowes , Anatoly Borisovich Grudinin , Ian Michael Godfrey , Kestutis Vysniauskas
发明人： John Redvers Clowes , Anatoly Borisovich Grudinin , Ian Michael Godfrey , Kestutis Vysniauskas
IPC分类号： H01S3/23 , H01S3/11 , H01S3/109 , H01S3/067 , H01S3/00 , H01S3/16
CPC分类号： H01S3/11 , G02F1/383 , H01S3/005 , H01S3/0057 , H01S3/0092 , H01S3/067 , H01S3/06712 , H01S3/06754 , H01S3/06758 , H01S3/109 , H01S3/1618 , H01S3/2308
摘要： The invention can include an apparatus for producing optical pulses, comprising an oscillator for producing optical pulses at a first optical pulse repetition frequency, the optical pulses having a first frequency of light; a pulse picker for receiving optical pulses having the first optical pulse repetition frequency and operable to reduce the optical pulse repetition frequency to produce optical pulses having the first frequency and a reduced optical pulse repetition frequency that is less than the first optical pulse repetition frequency; an optical fiber receiving optical pulses having the reduced optical pulse repetition frequency and first frequency, to nonlinearly produce light that includes a frequency that is twice the first frequency; and an Ytterbium doped fiber amplifier in optical communication with the pulse picker and the optical fiber and located between the pulse picker and the oscillator.
摘要翻译：本发明可以包括用于产生光脉冲的装置，包括用于以第一光脉冲重复频率产生光脉冲的振荡器，所述光脉冲具有第一频率的光; 用于接收具有第一光脉冲重复频率的光脉冲的脉冲拾取器，可用于减小光脉冲重复频率以产生具有小于第一光脉冲重复频率的第一频率和降低的光脉冲重复频率的光脉冲; 接收具有降低的光脉冲重复频率和第一频率的光脉冲的光纤，以非线性地产生包括第一频率的两倍的频率的光; 和掺镱光纤放大器，与脉冲拾取器和光纤进行光通信，并位于脉冲拾取器和振荡器之间。

52. 发明授权

US08811435B2 Laser device for production of a frequency comb free of CEO 有权
标题翻译：激光设备生产的频率梳子不含CEO
公开(公告)号：US08811435B2
公开(公告)日：2014-08-19
申请号：US13274442
申请日：2011-10-17
申请人： Thomas Hellerer
发明人： Thomas Hellerer
IPC分类号： H01S3/109 , H01S3/00 , H01S5/00
CPC分类号： H01S3/0092 , G02F1/3534 , G02F1/37 , G02F2001/3507 , G02F2201/16 , G04F5/14 , H01S5/0092
摘要： The invention relates to a laser device, comprising a radiation source (1) that emits radiation having a spectrum in the form of a frequency comb having a plurality of equidistant spectral lines, and a difference frequency generator (5) that converts the radiation in such a manner that the spectrum of the converted radiation once again has the form of a frequency comb, whereby the frequencies of the spectral lines in the spectrum of the converted radiation are harmonics of a base frequency. The invention proposes that a frequency multiplier (6) follows the difference frequency generator (5) in the course of the radiation.
摘要翻译：本发明涉及一种激光装置，其包括发射具有多个等距谱线的频梳形式的光谱的辐射源（1），以及差频发生器（5），其将辐射源转换后的辐射的频谱再次具有频率梳的形式，由此转换的辐射的频谱中的谱线的频率是基频的谐波。本发明提出，在辐射过程中，倍频器（6）跟随差频发生器（5）。

53. 发明授权

US08780946B2 Ultraviolet laser device 有权
标题翻译：紫外线激光装置
公开(公告)号：US08780946B2
公开(公告)日：2014-07-15
申请号：US13704835
申请日：2011-06-17
申请人： Akira Tokuhisa
发明人： Akira Tokuhisa
IPC分类号： H01S3/30 , H01S3/067 , H01S3/109 , H01S3/16 , H01S3/00
CPC分类号： H01S3/067 , H01S3/0092 , H01S3/06716 , H01S3/06754 , H01S3/0677 , H01S3/109 , H01S3/1095 , H01S3/1601 , H01S3/1616 , H01S3/1618 , H01S3/2308 , H01S3/2391
摘要： An ultraviolet laser device equips a laser beam output unit that includes first, second and third amplifiers that output first through third infrared laser beams, and first through third optical systems into which the first through third infrared laser beams through which the first through third infrared laser beams are propagated. A wavelength conversion unit includes a fourth optical system into which the combined first through third laser beams are incident through which they are propagated. The first optical system wavelength converts and generates the first infrared laser beam to a predetermined harmonic wave as the first laser beam, the fourth optical system includes a first wavelength conversion element that generates an earlier stage ultraviolet laser beam between the predetermined harmonic wave and the second laser beam, and the second wavelength conversion element generates an ultraviolet laser beam between the earlier stage ultraviolet laser beam and the third laser beam.
摘要翻译：紫外激光装置配备有激光束输出单元，其包括首先通过第三红外激光束输出的第一，第二和第三放大器以及第一至第三光学系统，第一至第三红外激光束通过第一至第三红外激光束通过第一至第三红外激光光束被传播。波长转换单元包括第四光学系统，组合的第一至第三激光束入射到其中，通过它们被传播。第一光学系统波长将第一红外激光束转换并产生到作为第一激光束的预定谐波，第四光学系统包括在预定谐波和第二激光束之间产生较早阶段的紫外激光束的第一波长转换元件激光束和第二波长转换元件在较早阶段的紫外激光束和第三激光束之间产生紫外激光束。

54. 发明申请

US20140192829A1 MULTI-CRYSTAL FREQUENCY TRIPLER FOR THIRD HARMONIC CONVERSION 审中-公开
标题翻译：用于第三谐波转换的多晶频率TRIPLER
公开(公告)号：US20140192829A1
公开(公告)日：2014-07-10
申请号：US13884598
申请日：2011-11-08
申请人： Mark K. Henesian , Amber L. Bullington , Kenneth R. Manes , Mary L. Spaeth , Robert Deri , Chris A. Ebbers
发明人： Mark K. Henesian , Amber L. Bullington , Kenneth R. Manes , Mary L. Spaeth , Robert Deri , Chris A. Ebbers
IPC分类号： G02F1/35 , G02F1/355 , H01S3/109
CPC分类号： G02F1/3532 , G02F1/353 , G02F1/3551 , G02F2001/3507 , G02F2001/354 , H01S3/0092 , H01S3/109
摘要： An optical system includes a laser source operable to output a laser beam at a fundamental wavelength and a frequency conversion system. The frequency conversion system includes a frequency doubler module including a first plurality of nonlinear optical crystals and a frequency polarization tripler module including a second plurality of nonlinear optical crystals. The optical system also includes a control system coupled to the frequency conversion system and a diagnostics system coupled to the frequency conversion system.
摘要翻译：光学系统包括可操作以输出基波长的激光束和频率转换系统的激光源。该变频系统包括：包括第一多个非线性光学晶体的倍频器模块和包括第二多个非线性光学晶体的频率偏振三倍子模块。光学系统还包括耦合到变频系统的控制系统和耦合到变频系统的诊断系统。

55. 发明申请

US20140111799A1 DEEP ULTRA-VIOLET LIGHT SOURCES FOR WAFER AND RETICLE INSPECTION SYSTEMS 有权
标题翻译：深层超紫外光源用于滤波和反射检测系统
公开(公告)号：US20140111799A1
公开(公告)日：2014-04-24
申请号：US14114737
申请日：2012-05-02
申请人： KLA-Tencor Corporation
发明人： Gang Lei , Damon F. Kvamme
IPC分类号： H01S3/109 , G01N21/95
CPC分类号： H01S3/109 , G01N21/9501 , G02F1/353 , G02F2001/3507 , G02F2001/354 , H01S3/0092 , H01S3/06754 , H01S3/1611 , H01S3/1616 , H01S3/1618 , H01S3/2391
摘要： Disclosed are methods and apparatus for generating a sub-208 nm laser. A laser apparatus includes one or more seed radiation sources for generating a first radiation beam having a first fundamental wavelength on a first optical path and a second radiation beam having a second fundamental wavelength on a second optical path, a first amplifier for amplifying the first radiation beam, a second amplifier for amplifying the second radiation beam, and a wavelength conversion module comprising a plurality of crystals for frequency multiplying and mixing the amplified first and second radiation beams to produce an output beam at a fifth harmonic that is less than about 208 nm.
摘要翻译：公开了用于产生次208nm激光器的方法和装置。激光装置包括一个或多个种子辐射源，用于在第一光路上产生具有第一基本波长的第一辐射束和在第二光路上具有第二基本波长的第二辐射束，用于放大第一辐射的第一放大器光束，用于放大第二辐射束的第二放大器，以及包括多个晶体的波长转换模块，用于对放大的第一和第二辐射束进行倍频和混合，以产生小于约208nm的五次谐波的输出光束。

56. 发明申请

US20110122899A1 SEMICONDUCTOR LASER 审中-公开
标题翻译：半导体激光器
公开(公告)号：US20110122899A1
公开(公告)日：2011-05-26
申请号：US12991590
申请日：2009-06-17
申请人： Michael Kühnelt , Peter Brick , Stephan Lutgen
发明人： Michael Kühnelt , Peter Brick , Stephan Lutgen
IPC分类号： H01S3/109
CPC分类号： H01S5/14 , H01S3/109 , H01S5/1039 , H01S5/141 , H01S5/142 , H01S5/183
摘要： A semiconductor laser includes a semiconductor laser element that emits electromagnetic radiation with at least one fundamental wavelength when in operation, an end mirror, a deflecting mirror reflective as a function of polarization located between the semiconductor laser element and the end mirror, and at least one optically nonlinear crystal configured for type II frequency conversion of the fundamental wavelength and which satisfies a λ/2 condition for the fundamental wavelength.
摘要翻译：半导体激光器包括半导体激光元件，其在运行时发射具有至少一个基本波长的电磁辐射，端镜，作为偏振的反射镜的反射镜位于半导体激光元件和端镜之间，以及至少一个光学非线性晶体被配置为用于基波长的II型频率转换并且满足基波长的λ/ 2条件。

57. 发明申请

US20100309438A1 WAVELENGTH CONVERSION LASER 有权
标题翻译：波长转换激光
公开(公告)号：US20100309438A1
公开(公告)日：2010-12-09
申请号：US12744769
申请日：2008-11-25
申请人： Tetsuro Mizushima , Toshifumi Yokoyama , Tatsuo Itoh , Kenji Nakayama , Kiminori Mizuuchi , Kazuhisa Yamamoto
发明人： Tetsuro Mizushima , Toshifumi Yokoyama , Tatsuo Itoh , Kenji Nakayama , Kiminori Mizuuchi , Kazuhisa Yamamoto
IPC分类号： H01S3/109 , H01S3/10 , G03B21/14
CPC分类号： H01S3/109 , G02F1/3558 , H01S3/025 , H01S3/07 , H01S3/08086 , H01S3/09415 , H01S3/1671 , H01S3/1673 , H01S3/2375
摘要： A wavelength conversion laser 100 is provided with a solid-state laser having a cavity, and a wavelength converting element 6 arranged within the cavity. The solid-state laser includes two or more types of laser crystals 4 and 5 and oscillates solid-state laser light of multiple wavelengths. The wavelength converting element 6 converts the solid-state laser light of multiple wavelengths into light of second harmonic waves and sum-frequency wave of multiple wavelengths and simultaneously generates the second harmonic waves and sum-frequency wave of multiple wavelengths. The wavelength conversion laser 100 outputs converted wavelength light having a broad spectral width and low coherency, thereby enabling it to carry out highly efficient and stable high-output oscillation.
摘要翻译：波长转换激光器100设置有具有空腔的固态激光器和布置在腔内的波长转换元件6。固体激光器包括两种或更多种类型的激光晶体4,5和振荡多个波长的固态激光。波长转换元件6将多个波长的固体激光转换为二次谐波和多个波长的和频波，同时产生多个波长的二次谐波和和频波。波长转换激光器100输出具有宽光谱宽度和低相干性的转换波长光，从而使其能够执行高效稳定的高输出振荡。

58. 发明申请

US20100150186A1 LASER LIGHT SOURCE AND DISPLAY DEVICE 失效
标题翻译：激光光源和显示器件
公开(公告)号：US20100150186A1
公开(公告)日：2010-06-17
申请号：US11997108
申请日：2006-07-28
申请人： Kiminori Mizuuchi , Kazuhisa Yamamoto , Hiroyuki Furuya , Toshifumi Yokoyama
发明人： Kiminori Mizuuchi , Kazuhisa Yamamoto , Hiroyuki Furuya , Toshifumi Yokoyama
IPC分类号： H01S3/10 , H01S3/109 , H01S3/094 , G02F1/37
CPC分类号： H01S3/0627 , G02F2001/3505 , G02F2001/3509 , H01S3/0604 , H01S3/09415 , H01S3/109 , H01S3/2383 , H01S5/4025
摘要： According to the present invention, a laser light source comprises plural semiconductor lasers (2), a solid laser (4), a non-linear material (3) as a wavelength conversion element, a reflection coat (5) formed on one facet of the solid laser, and a reflection coat (6) formed on one facet of the non-linear material (3), and the solid laser and the wavelength conversion element are disposed between the both reflection coats to constitute a laser resonator, and plural pump parts (8) in the solid laser (4) which are pumped by the plural semiconductor lasers are separated from each other by 300 μm or more. Thereby, interference between transverse modes of laser oscillation is avoided, thereby providing a high-power, stable, and compact solid laser light source with which a stable high output power can be obtained.
摘要翻译：根据本发明，激光源包括多个半导体激光器（2），固体激光器（4），作为波长转换元件的非线性材料（3），反射涂层（5），其形成在固体激光器和形成在非线性材料（3）的一个面上的反射涂层（6），并且固体激光器和波长转换元件设置在两个反射涂层之间以构成激光谐振器，并且多个泵由多个半导体激光器泵浦的固体激光器（4）中的部分（8）彼此分开300μm以上。因此，避免了激光振荡的横向模式之间的干扰，从而提供了可获得稳定的高输出功率的高功率，稳定且紧凑的固体激光光源。

59. 发明授权

US07126745B2 Method of irradiating ultraviolet light onto an object 有权
标题翻译：将紫外线照射到物体上的方法
公开(公告)号：US07126745B2
公开(公告)日：2006-10-24
申请号：US11313686
申请日：2005-12-22
申请人： Tomoko Ohtsuki , Soichi Owa
发明人： Tomoko Ohtsuki , Soichi Owa
IPC分类号： G02F1/37 , G02F1/35 , H01S3/109
CPC分类号： H01S3/067 , G02B6/14 , G02B6/32 , G02F1/1303 , G02F1/35 , G02F1/3501 , G02F1/353 , G02F1/37 , G02F2001/3503 , G02F2001/354 , G03F7/70025 , G03F7/70575 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/0085 , H01S3/06716 , H01S3/06729 , H01S3/06745 , H01S3/06758 , H01S3/06766 , H01S3/094011 , H01S3/09415 , H01S3/1608 , H01S3/23 , H01S3/2383
摘要： A method of irradiating ultraviolet light onto an object. The method includes generating pulse light having a single wavelength within a range from 1.51 μm to 1.59 μm from a laser generating portion, amplifying the pulse light plural times with an optical amplifier that includes a plurality of fiber optical amplifiers, wavelength-converting the amplified pulse light into ultraviolet light with a wavelength converting portion that includes a plurality of non-linear optical crystals, and irradiating the ultraviolet light onto the object through an optical system.
摘要翻译：将紫外光照射到物体上的方法。该方法包括从激光产生部分产生具有1.51μm至1.59μm的范围内的单一波长的脉冲光，用包括多个光纤放大器的光放大器多次放大脉冲光，对放大的脉冲进行波长转换通过包括多个非线性光学晶体的波长转换部分将紫外光照射到紫外光中，并通过光学系统将紫外光照射到物体上。

60. 发明授权

US07027209B2 Optical resonant frequency converter 有权
标题翻译：光谐振变频器
公开(公告)号：US07027209B2
公开(公告)日：2006-04-11
申请号：US10450599
申请日：2001-12-13
申请人： Eckhard Zanger , Manfred Salzman
发明人： Eckhard Zanger , Manfred Salzman
IPC分类号： G02F1/35 , H01S3/109
CPC分类号： G02F1/37 , G02F2203/15
摘要： The invention concerns an optical resonant frequency converter comprising two mirrors and a non-linear crystal in a ring resonator arrangement for converting laser radiation into frequency-doubled radiation. Because of the refractive effect of the prism-shaped, non-linear crystal two mirrors are sufficient to form a ring resonator with a total of three optical elements. A suitable choice of the orientation of the crystal axes in relation to the laser beam direction reduces scatter in the crystal. In one embodiment the entry surface of the crystal is at the Brewster angle while the exit surface is perpendicular to the beam and has an antireflection coating. In another embodiment the converted beam is coupled out through a polarisation beam splitter layer on one of the crystal surfaces. In a further embodiment the crystal surfaces are cylindrically curved. That produces an elliptical beam profile in the crystal, which reduces the walk-off effect.
摘要翻译：本发明涉及一种光谐振频率转换器，其包括用于将激光辐射转换成倍频辐射的环形谐振器装置中的两个反射镜和非线性晶体。由于棱镜形状的折射效应，非线性晶体两个反射镜足以形成具有总共三个光学元件的环形谐振器。相对于激光束方向，晶轴的取向的合适选择减少了晶体中的散射。在一个实施例中，晶体的入射表面处于布鲁斯特角，而出射表面垂直于光束并且具有抗反射涂层。在另一个实施例中，转换的光束通过其中一个晶体表面上的偏振分束器层耦合出来。在另一实施例中，晶体表面是圆柱形弯曲的。这在晶体中产生椭圆形的光束轮廓，这降低了离散效应。

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