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61. 发明授权

US10475575B2 In-situ oxidized NiO as electrode surface for high k MIM device 有权
公开(公告)号：US10475575B2
公开(公告)日：2019-11-12
申请号：US14649334
申请日：2013-09-30
申请人： ENTEGRIS, INC.
发明人： Bryan C. Hendrix , Weimin Li , James Anthony O'Neill
IPC分类号： H01G4/10 , H01G4/01 , C23C16/44 , C23C16/455 , H01L49/02
摘要： A high dielectric constant metal-insulator structure, including an electrode comprising NiOx wherein 1

62. 发明授权

US10395963B2 Electrostatic chuck 有权
公开(公告)号：US10395963B2
公开(公告)日：2019-08-27
申请号：US15294950
申请日：2016-10-17
申请人： Entegris, Inc.
发明人： Richard A. Cooke
IPC分类号： H01L21/683 , H01L21/687 , H02N13/00
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of protrusions extending to a height above portions of the surface layer surrounding the protrusions to support the substrate upon the protrusions during electrostatic clamping of the substrate. The protrusions are substantially equally spaced across the surface layer as measured by a center to center distance between pairs of neighboring protrusions.

63. 发明授权

US10352491B2 Anti-rotation device for hydraulic connectors 有权
公开(公告)号：US10352491B2
公开(公告)日：2019-07-16
申请号：US15030805
申请日：2014-10-22
申请人： ENTEGRIS, INC.
发明人： John Leys , Michael Schleicher , Jeffrey J. McKenzie
IPC分类号： F16L19/04 , F16L47/04 , F16L19/00 , F16L33/22
摘要： An anti-rotation device for preventing a hydraulic connector assembly from leaking. Various embodiments of the anti-rotation device provide a mechanism whereby threadably engaged connectors, such as compression fittings, are permitted to rotate only a fraction of a turn after loosening. For many applications, the limited degree of loosening is sufficient to prevent the onset of leaking. Structurally, the anti-rotation device can include a band that is secured to a female nut of a hydraulic connector. Protrusions extend laterally from the band and engage with a stop tab on the male body of the hydraulic connector assembly, thereby limiting rotation of the female nut that would otherwise cause leaks.

64. 发明授权

US10290505B2 Passivation of germanium surfaces 有权
公开(公告)号：US10290505B2
公开(公告)日：2019-05-14
申请号：US15752640
申请日：2016-08-12
申请人： Entegris, Inc.
发明人： Steven Bilodeau , Emanuel I. Cooper , Hsing-Chen Wu , Min-Chieh Yang
IPC分类号： H01L21/02 , H01L21/28 , H01L21/762
摘要： Compositions useful for the passivation of germanium-containing materials on a microelectronic device having same thereon.

65. 发明授权

US10247363B2 Smart package 有权
公开(公告)号：US10247363B2
公开(公告)日：2019-04-02
申请号：US15549875
申请日：2016-02-12
申请人： ENTEGRIS, INC.
发明人： Joseph D. Sweeney , Edward E. Jones , Joseph R. Despres , Richard S. Ray , Peter C. Van Buskirk , Edward A. Sturm , Chris Scannell
IPC分类号： G06K19/06 , F17C13/02 , F17C11/00 , F17C13/00 , G06K19/07
摘要： A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

66. 发明授权

US10217655B2 Wafer container with shock condition protection 有权
公开(公告)号：US10217655B2
公开(公告)日：2019-02-26
申请号：US15536980
申请日：2015-12-18
申请人： ENTEGRIS, INC.
发明人： Ryan Mushel , Jason T. Steffens
IPC分类号： H01L21/673
摘要： A front opening wafer container has a container portion and a door sized to close an open front of the container portion. The container portion has shelves for holding wafers defining a seating position and has forward and rearward wafer supports to suspend wafers therebetween in a transport position above the seating position. Shock condition cushion portions are arranged adjacent the transport position for protecting the wafers during a shock condition. The wafers may be bonded wafers having a thinned wafer side and a carrier substrate side. Wafer engagement pads and finger members extend in opposing directions from a central strip on the door providing a balance wafer engagement. When closing the door, a primary wafer support portion engages the wafers first and a secondary elastomeric wafer support engages the wafer secondly. A V-groove for receiving the wafers in the wafer supports has a greater angle defined between the V-groove and the thinned wafer side than the angle defined between the V-groove and carrier substrate side providing enhanced protection for the bonded wafers.

67. 发明授权

US10155649B2 Dip tube assemblies 有权
公开(公告)号：US10155649B2
公开(公告)日：2018-12-18
申请号：US15029497
申请日：2014-10-17
申请人： ENTEGRIS, INC.
发明人： Amy Koland , Rick Wilson
IPC分类号： B67D1/08 , B67D1/04 , B67D7/02 , B67D1/12
摘要： A dip tube assembly having a tubular portion and a coupler portion, the coupler configured for removable coupling with the mouth of a container storing contents therein. The coupler portion comprises a first end for connection with a tubular portion; a second end for connection with a connector assembly, wherein the connector assembly provides a pressure to the container; an outer surface and an inner surface with a thickness therebetween, wherein the inner surface defines a lumen that allows the chemical fluid to be conveyed from the chamber through the tubular portion to the connector assembly; and at least one pressure relief feature on the outer surface.

68. 发明申请

US20180333672A1 FLUIDIZED GRANULAR ABSORBENT BED FILTER 审中-公开
公开(公告)号：US20180333672A1
公开(公告)日：2018-11-22
申请号：US15980176
申请日：2018-05-15
申请人： Entegris, Inc.
发明人： Tyler Moulton , James Britto
IPC分类号： B01D53/12
CPC分类号： B01D53/12 , B01D2253/102 , B01D2257/708
摘要： Described are filter products and methods of using filter products, wherein the filter products include multiple cells, each cell containing an individual circulating fluidized beds during use.

69. 发明授权

US10107755B2 System and method for dectection and signaling of component end-of-life in a dissolved oxygen sensor 有权
公开(公告)号：US10107755B2
公开(公告)日：2018-10-23
申请号：US15124532
申请日：2015-03-19
申请人： Entegris-Jetalon Solutions, Inc.
发明人： Francisco Javier Machuca , Ronald Phillip Chiarello , Kyle William Montgomery
IPC分类号： G01N21/77 , G01N21/64 , G01N21/85 , G01N33/18 , A61B5/083 , G01N27/404
摘要： Embodiments as disclosed herein may include a sensor including a luminophor exposed to a fluid flow path. The luminophor may emit light in response to illumination by an excitation light source. The magnitude of light emitted by the luminophor in response to illumination may be determined. It can be determined if this magnitude is within a threshold of the baseline magnitude and an alarm state set based on this determination. This alarm state may indicate that the luminophor has reached an end-of-life state or otherwise should be replaced.

70. 发明申请

US20180299017A1 OBLONG DIAPHRAGM VALVES 审中-公开
公开(公告)号：US20180299017A1
公开(公告)日：2018-10-18
申请号：US15737963
申请日：2016-06-22
申请人： ENTEGRIS, INC.
发明人： Iraj Gashgaee
IPC分类号： F16K7/17
CPC分类号： F16K7/17 , F04B7/0076 , F04B7/02 , F04B7/0208 , F04B13/00 , F04B43/0036 , F04B43/04
摘要： An oblong diaphragm valve has curved surfaces carved into faces of a body and a plate. The curved surfaces have an oblong shape and define an oval or egg-shaped valve chamber when the body and the plate are joined and secured to each other, with a diaphragm sandwiched there-between. An inlet and an outlet are defined in the curved surface of the body at opposite ends defined by a length of the valve chamber. A flow passage is defined in the curved surface of the plate and has an opening centrally located relative to the valve chamber for actuation of the diaphragm to close or open the oblong diaphragm valve with minimal or no stress, ensuring durability and longevity of the oblong diaphragm valve with increased precision, while reducing fluid waste and pressure spikes in pumping operations.

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