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    • 66. 发明授权
    • Method and fabricating semiconductor device and semiconductor device
    • 制造半导体器件和半导体器件的方法
    • US07749891B2
    • 2010-07-06
    • US12603197
    • 2009-10-21
    • Tetsuya Ueda
    • Tetsuya Ueda
    • H01L21/4763
    • H01L21/76801H01L21/76802H01L21/7682H01L21/76849H01L23/5222H01L23/53238H01L23/53295H01L2924/0002H01L2924/12044H01L2924/00
    • A method for fabricating a semiconductor device includes the steps of: forming a plurality of lower interconnections at intervals in a first insulating film; removing a portion of the first insulating film located between the lower interconnections, thereby forming an interconnection-to-interconnection gap; forming a second insulating film over the first insulating film in which the lower interconnections and the interconnection-to-interconnection gap are formed such that an air gap is formed out of the interconnection-to-interconnection gap; and forming, in the second insulating film, a connection portion connected to one of the lower interconnections and an upper interconnection connected to the connection portion. The connection portion is formed to be connected to one of the lower interconnections not adjacent to the air gap.
    • 一种制造半导体器件的方法包括以下步骤:在第一绝缘膜中间隔地形成多个下互连; 去除位于下互连之间的第一绝缘膜的一部分,从而形成互连互连间隙; 在所述第一绝缘膜上形成第二绝缘膜,其中所述下互连和互连互连间隙形成为使得从所述互连互连间隙形成气隙; 以及在所述第二绝缘膜中形成连接到所述下部互连中的一个的连接部分和连接到所述连接部分的上部互连件。 连接部分形成为连接到不邻近气隙的下互连中的一个。
    • 67. 发明申请
    • Cogeneration system
    • 热电联产系统
    • US20090020281A1
    • 2009-01-22
    • US11578724
    • 2006-02-17
    • Tetsuya UedaHideo OharaAkinori Yukimasa
    • Tetsuya UedaHideo OharaAkinori Yukimasa
    • G05D23/00F28D15/00
    • F24D11/005F24D2200/16F24D2200/26F24H1/18F24H2240/06F24H2240/10F28D20/0034F28D21/0007F28F27/00F28F2265/10H01M2008/1095H01M2250/10H01M2250/402H01M2250/405Y02B90/12Y02B90/14Y02B90/16Y02E20/14Y02E60/142Y02P80/15
    • A cogeneration system of the present invention includes: an electric power generator (5); a cooling circuit (10) configured to cool the electric power generator (5) with a first heat transfer medium; a heat exchanger (16) provided on the cooling circuit (10); an exhaust heat recovery circuit (12) through which a second heat transfer medium that exchanges heat with the first heat transfer medium via the heat exchanger (16) flows; a heat storage unit (20) connected to the exhaust heat recovery circuit (12) and configured to store the second heat transfer medium that has undergone a heat exchange by the heat exchanger (16); and a controller (21), wherein a first temperature sensor (17), and a heater to which electric power is supplied from the electric power generator (5), are connected, in this order, downstream of the heat exchanger (16) in a direction in which the second heat transfer medium flows, and the controller (21) controls a flow rate of a circulating pump (13) so that, based on a temperature detected by the first temperature sensor (17), the detected temperature becomes a predetermined target temperature. In addition to preventing water temperature decrease in heat recovery and ensuring safety, this configuration can keep water temperature high at all times.
    • 本发明的热电联产系统包括:发电机(5); 冷却回路(10),被配置为用第一传热介质冷却所述发电机(5); 设置在所述冷却回路(10)上的热交换器(16)。 通过热交换器(16)与第一传热介质进行热交换的第二传热介质通过该排气热回收回路(12); 连接到排气热回收回路(12)并构造成存储由热交换器(16)进行热交换的第二传热介质的蓄热单元(20)。 以及控制器(21),其中第一温度传感器(17)和从发电机(5)供应电力的加热器依次连接在热交换器(16)的下游 第二传热介质流动的方向,并且控制器(21)控制循环泵(13)的流量,使得基于由第一温度传感器(17)检测到的温度,检测到的温度变为 预定目标温度。 除了防止热回收中的水温下降和确保安全性之外,这种配置可以始终保持水温高。