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    • 73. 发明申请
    • ULTRA-CLOSE-RANGE METALLIC HEATER THERMO-OPTIC PHASE SHIFTER
    • US20220197064A1
    • 2022-06-23
    • US17396350
    • 2021-08-06
    • Huazhong University of Science and Technology
    • Janji DongYanxian WeiHailong ZhouXinliang Zhang
    • G02F1/00G02F1/01G02F1/025
    • The present invention belongs to the field of integrated optical waveguide modulation, and specifically, relates to an ultra-close-range metallic heater thermo-optic phase shifter, which includes: a substrate, and a metallic heater and an optical waveguide respectively arranged on the substrate; in which the metallic heater and the optical waveguide are arranged at a close distance, and the distance is less than 600 nm. The material of the metallic heater is titanium, titanium nitride, aluminum, gold, and/or a metal with a larger imaginary part of the refractive index. The present invention includes two solutions: side heating and top surface heating. In the side heating solution, the heater is placed close to a side of the waveguide in parallel, and heat is conducted to the optical waveguide through the substrate to achieve thermo-optic phase shift; while in the top surface heating solution, an auxiliary waveguide is placed on a side of the optical waveguide, and the heater is placed above the auxiliary waveguide; heat is conducted to the optical waveguide through a top silicon oxide layer to achieve thermo-optic phase shift. The present invention utilizes the principle of parity-time symmetry, greatly shortens the distance between the heaters and the waveguide, realizes low-loss and high-rate thermo- optic modulation. In addition, it is compatible with the CMOS process, and is a standard process.