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    • 72. 发明授权
    • External cavity tunable laser with dual beam outputs
    • US10418775B2
    • 2019-09-17
    • US14990758
    • 2016-01-07
    • GP PHOTONICS, INC.
    • Peiliang Gao
    • H01S3/106H01S5/14G02F1/33H01S3/082H01S3/101
    • The invention relates to an external cavity tunable laser with dual beam outputs. The first laser cavity of the tunable laser comprises a first laser cavity mirror, a laser gain medium, an intracavity collimating lens, an active optical phase modulator, a tunable acousto-optic filter, a tunable Fabry-Perot tunable filter, a second reflection mirror all disposed inside a laser cavity sequentially, and a laser driver and control system. The laser cavity beam reflected by the first laser cavity mirror enters the tunable acousto-optic filter to generate a zeroth order diffracted beam as the first laser output beam. The laser cavity beam reflected by the second laser cavity mirror enters the tunable acousto-optic filter to generate a zeroth order diffracted beam as the second laser output beam. The tunable laser further comprises a wavelength locker outside the laser cavity. The second laser cavity of the tunable laser has a Fabry-Perot etalon disposed in the first laser cavity to further compress the spectrum width of the laser output beams. The invention is compact with high performance without mechanical moving parts, stable laser output, low cost for volume production and installation.
    • 79. 发明申请
    • ALIGNMENT SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    • 对准系统和极端超紫外光发生系统
    • US20160204567A1
    • 2016-07-14
    • US15076977
    • 2016-03-22
    • GIGAPHOTON INC.
    • Masato MORIYAOsamu WAKABAYASHI
    • H01S3/101H05G2/00H01S3/00
    • H01S3/101H01S3/005H01S3/0078H01S3/2391H05G2/008
    • An alignment system for a laser apparatus includes a guide laser device outputting a guide laser beam, an adjusting mechanism adjusting travel directions of the guide laser beam and a laser beam from the laser apparatus, a beam path combiner controlling travel directions of the laser beam and the guide laser beam to substantially coincide with each other, a first optical detection unit provided from the beam path combiner detecting the laser and guide laser beams, a first controller controlling the adjusting mechanism based on a first optical detection unit detection result, a beam steering unit downstream from the beam path combiner controlling travel directions of the laser and guide laser beams, a second optical detection unit downstream from the beam steering unit detecting the guide laser beam, and a second controller controlling the beam steering unit based on a second optical detection unit detection result.
    • 用于激光装置的对准系统包括:输出导向激光束的导向激光装置,调整引导激光束的行进方向的调节机构和来自激光装置的激光束;光束组合器,控制激光束的行进方向; 所述引导激光束彼此基本一致,从所述光束组合器提供的检测所述激光和引导激光束的第一光学检测单元,基于第一光学检测单元检测结果控制所述调节机构的第一控制器, 控制光束路径组合器的下游,控制激光束和引导激光束的行进方向,第二光学检测单元,在检测引导激光束的光束转向单元的下游;以及第二控制器,其基于第二光学检测器控制光束转向单元 单位检测结果。