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    • 89. 发明申请
    • HIGH-FREQUENCY POWER SUPPLY DEVICE AND OUTPUT CONTROL METHOD THEREFOR
    • US20230134559A1
    • 2023-05-04
    • US17908797
    • 2021-03-04
    • KYOSAN ELECTRIC MFG. CO., LTD.
    • Takeshi FujiwaraHiroyuki KojimaSatoshi Kawai
    • H01J37/32
    • Provided are a high-frequency power supply device and an output control method therefor which are capable of constantly keeping the phase of the outputted high-frequency pulse uniform even in a structure in which the synchronizing pulse and the clock pulse are generated separately. A high-frequency power supply device and an output control method therefor for outputting a high-frequency pulse to a target device on the basis of a synchronizing pulse and a clock pulse, wherein: the period interval of one period of the synchronizing pulse is detected; the phase difference between the synchronizing pulse and the clock pulse during the previous one period is determined; the number of pulses and oscillation frequency of oscillation in the subsequent period is calculated on the basis of the period interval and the phase difference; a clock pulse is generated on the basis of the oscillation frequency signal; and a number of pulses and oscillation frequency for the subsequent period which will cancel the phase difference in the previous one period are determined in a manner such that the phase remains constant after the period interval of the subsequent period elapses when forming a high-frequency pulse on the basis of the period reference signal, the level setting signal, the pulse number signal and the clock pulse.