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1. 发明授权

US11629048B2 Method of fabricating a micro machined channel 有权
公开(公告)号：US11629048B2
公开(公告)日：2023-04-18
申请号：US16647252
申请日：2018-09-17
申请人： BERKIN B.V. , UNIVERSITEIT TWENTE , STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN
发明人： Yiyuan Zhao , Henk-Willem Veltkamp , Yaxiang Zeng , Joost Conrad Lötters , Remco John Wiegerink
IPC分类号： B81C1/00
摘要： The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.

2. 发明授权

US07895905B2 Flowmeter 有权
标题翻译：流量计
公开(公告)号：US07895905B2
公开(公告)日：2011-03-01
申请号：US12335045
申请日：2008-12-15
申请人： Theodorus Simon Josef Lammerink , Marcel Dijkstra , Jeroen Haneveld , Remco John Wiegerink
发明人： Theodorus Simon Josef Lammerink , Marcel Dijkstra , Jeroen Haneveld , Remco John Wiegerink
IPC分类号： G01F1/84
CPC分类号： G01F1/8472 , G01F1/6845 , G01F1/6847 , G01F1/6888 , G01F1/8445
摘要： A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
摘要翻译：一种流量计，其包括设置在载体上的硅基板的系统芯片，在其中设置有至少一个硅流管的开口，用于输送要测量流量的介质，所述管具有经由壁的两端发出的两端在硅衬底中开口形成涂有氮化硅的通道，其中流管形成科里奥利流量传感器和/或热流传感器的一部分，并且其中通道优选地通过载体与连接线连接到外部世界。

3. 发明申请

US20100122585A1 CORIOLIS FLOW SENSOR WITH OPTICALLY REFLECTIVE MOTION SENSOR 有权
标题翻译：具有光学反射运动传感器的CORIOLIS流量传感器
公开(公告)号：US20100122585A1
公开(公告)日：2010-05-20
申请号：US12613861
申请日：2009-11-06
申请人： Dannis Michel BROUWER , Aditya MEHENDALE , Lars KRISTIANSEN , Marvin Ernst Eckhard KLEIN , Marcel Ronald KATERBERG
发明人： Dannis Michel BROUWER , Aditya MEHENDALE , Lars KRISTIANSEN , Marvin Ernst Eckhard KLEIN , Marcel Ronald KATERBERG
IPC分类号： G01F1/84
CPC分类号： G01F1/8427
摘要： A Coriolis flow sensor with at least one vibrating flow tube through which a medium flows, includes elements for exciting the tube, and optical detection element for determining the movements of one or several points of the tube based on the principle of reflection of a light beam against the photosensitive surface of a light sensor. The light beam is directed at the tube wall, at a layer provided on this wall, or at an element fastened against this wall, wherein elements for shaping the beam are arranged for making the convergence of the beam in the direction of movement of the tube associated with the Coriolis forces smaller than the convergence in the direction of movement of the tube associated with the excitation forces. The sensitivity in the detection of the small movements of the tube caused by the Coriolis forces is enhanced.
摘要翻译：具有介质流过的至少一个振动流管的科里奥利流量传感器包括用于激发管的元件和用于基于光束的反射原理来确定管的一个或多个点的运动的光学检测元件抵靠光传感器的感光表面。光束被引导到管壁，设置在该壁上的层或紧固在该壁上的元件，其中用于使梁成形的元件被布置成使梁在管的移动方向上会聚与科里奥利力相关联，其小于与激励力相关联的管的运动方向的收敛。检测由科里奥利力引起的细小运动的灵敏度得到提高。

4. 发明申请

US20090064797A1 CORIOLIS MEASURING SYSTEM WITH AT LEAST THREE SENSORS 有权
标题翻译：具有三个传感器的CORIOLIS测量系统
公开(公告)号：US20090064797A1
公开(公告)日：2009-03-12
申请号：US12205066
申请日：2008-09-05
申请人： WYBREN JOUWSMA , Aditya Mehendale
发明人： WYBREN JOUWSMA , Aditya Mehendale
IPC分类号： G01F1/84
CPC分类号： G01F1/8481 , G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/8436
摘要： A flow measuring system of the Coriolis type for measuring a mass flow, with a flow tube and with excitation means for causing the flow tube to rotate about an axis of rotation, with at least three sensors arranged free of the flow tube for generating analog signals that correspond to the movement of the tube, and with means for digitizing the analog signals and for computing the mass flow from the digitized sensor signals. The computation means are arranged for using exclusively the time information from the sensor signals. The accurate time information of the sensors is used by algorithms in digital electronic circuits for accurately determining the ratio between amplitudes due to excitation and those due to Coriolis forces. The mass flow is derived from this ratio.
摘要翻译：用于测量质量流量的科里奥利流量测量系统，具有流管和用于使流管围绕旋转轴线旋转的激励装置，其中至少三个传感器布置成没有流管用于产生模拟信号这对应于管的移动，并且具有用于数字化模拟信号和用于从数字化的传感器信号计算质量流的装置。计算装置被布置为专门用于来自传感器信号的时间信息。传感器的准确时间信息由数字电子电路中的算法用于精确地确定由激励引起的振幅与科里奥利力之间的比值之间的比率。质量流量来自该比例。

5. 发明申请

US20090013800A1 FLOWMETER OF THE CORIOLIS TYPE 有权
标题翻译： CORIOLIS型流量计
公开(公告)号：US20090013800A1
公开(公告)日：2009-01-15
申请号：US12167257
申请日：2008-07-03
申请人： Aditya Mehendale , Joost Conrad Lotters
发明人： Aditya Mehendale , Joost Conrad Lotters
IPC分类号： G01F1/84 , H03F1/38
CPC分类号： G01F1/849 , G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/844 , G01F1/8472 , G01F1/8481
摘要： Coriolis mass flowmeter with a Coriolis tube and with an optical detection device, which optical detection device comprises at least one optical sensor for generating a signal that is representative of the movement of the Coriolis tube, said optical sensor comprising a light source and a photosensitive sensor, wherein the optical detection device comprises means for applying a constant voltage across the photosensitive sensor during operation independently of the current generated by the photosensitive sensor in response to incident light, as well as means for determining the value of the current generated by the photosensitive sensor and converting it into an output signal.
摘要翻译：科里奥利质量流量计具有科里奥利管和光学检测装置，该光学检测装置包括至少一个用于产生代表科里奥利管的运动的信号的光学传感器，所述光学传感器包括光源和光敏传感器，其中所述光学检测装置包括用于在独立于由光敏传感器响应入射光产生的电流的操作期间在光敏传感器两端施加恒定电压的装置，以及用于确定由光敏传感器产生的电流值的装置并将其转换为输出信号。

6. 发明授权

US07464610B2 Coriolis flowmeter having a contactless excitation device 有权
标题翻译：科里奥利流量计具有非接触式励磁装置
公开(公告)号：US07464610B2
公开(公告)日：2008-12-16
申请号：US12043977
申请日：2008-03-07
申请人： Aditya Mehendale , Joost Conrad Lötters , Jan Marinus Zwikker
发明人： Aditya Mehendale , Joost Conrad Lötters , Jan Marinus Zwikker
IPC分类号： G01F1/84
CPC分类号： G01F1/8422 , G01F1/8427 , G01F1/8431 , G01F1/8472 , G01F1/8486
摘要： A mass flowmeter of the Coriolis type with a tube through which a medium flows during operation and with excitation elements for causing the entire tube or part thereof to perform a rotational vibration about a primary axis of rotation during operation. The excitation elements are electromagnetic and do not make contact with the tube during operation and have no components that are fastened to the tube. The tube is made of an electrically conducting material, and the excitation elements include first members for causing an electric current to flow through the tube during operation and second elements for generating a magnetic field at the area of a portion of the tube. The magnetic field is perpendicular to the direction of the current and in operation either the current or the magnetic field changes its sign periodically.
摘要翻译：具有科里奥利型的质量流量计，其中具有介质在操作期间流动的管和用于使整个管或其一部分在操作期间围绕主旋转轴进行旋转振动的激励元件的管。励磁元件是电磁的，并且在操作期间不与管接触，并且没有固定到管的部件。管由导电材料制成，并且激发元件包括用于在操作期间使电流流过管的第一构件和用于在管的一部分区域处产生磁场的第二元件。磁场垂直于电流的方向，并且在运行中，电流或磁场周期性地改变其符号。

7. 发明授权

US07437928B2 Flow sensor of the thermal type 有权
标题翻译：热式流量传感器
公开(公告)号：US07437928B2
公开(公告)日：2008-10-21
申请号：US11798983
申请日：2007-05-18
申请人： Jeroen Wouter Bos , Ronald Wilhelmus Johannes Hoitink , Johannes Henricus Besseling , Joost Conrad Lötters
发明人： Jeroen Wouter Bos , Ronald Wilhelmus Johannes Hoitink , Johannes Henricus Besseling , Joost Conrad Lötters
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F15/14 , G01F15/18
摘要： A flow sensor of the thermal type having a U-shaped sensor tube with two legs and a connecting limb with two adjoining electrical resistance elements, and with a housing. The sensor tube has an inlet side and an outlet side. The housing has a first and a second housing part of a thermally well-conducting material, each with an inner surface provided with cavities and with an outer surface. The housing parts are placed with their inner surfaces against each other, while the U-shaped sensor tube has a main surface that extends parallel to the inner surfaces. The housing parts surround the connecting limb and the legs of the U-shaped sensor tube such that the sensor tube is thermally clamped in between the housing parts in two locations: a first location situated between its inlet side and the upstream resistance element, and a second location situated between its outlet side and the downstream resistance element.
摘要翻译：热式流量传感器具有具有两个支腿的U形传感器管和具有两个邻接的电阻元件的连接臂以及壳体。传感器管具有入口侧和出口侧。壳体具有导热材料的第一和第二壳体部分，每个壳体具有设置有空腔和外表面的内表面。壳体部件的内表面彼此相对放置，而U形传感器管具有平行于内表面延伸的主表面。壳体部分围绕连接肢和U形传感器管的腿，使得传感器管被热夹紧在两个位置之间的壳体部分之间：位于其入口侧和上游阻力元件之间的第一位置，以及位于其出口侧和下游阻力元件之间的第二位置。

8. 发明申请

US20060243067A1 Mass flowmeter of the coriolis type 有权
标题翻译：科里奥利型质量流量计
公开(公告)号：US20060243067A1
公开(公告)日：2006-11-02
申请号：US11412174
申请日：2006-04-27
申请人： Aditya Mehendale , Joost Lotters , Jan Zwikker
发明人： Aditya Mehendale , Joost Lotters , Jan Zwikker
IPC分类号： G01F1/84
CPC分类号： G01F1/8409 , G01F1/8413 , G01F1/8422 , G01F1/8472 , G01F1/8481 , G01F1/8486
摘要： A mass flowmeter of the Coriolis type with a tube that forms a mechanically closed loop through which a medium flows during operation, and with preferably electromagnetic, contactless excitation elements for causing the loop to rotate in an oscillatory mode about an axis of rotation during operation. The loop has a starting point and an end point. The starting and end points are situated close together and are connected to a flexible inlet tube and a flexible outlet tube, respectively, which extend preferably in parallel and close together. The loop is resiliently suspended from the frame of the flowmeter via the flexible inlet and outlet tubes, which preferably form one integral piece with the tube of the loop.
摘要翻译：科里奥利型的质量流量计，其具有管，该管形成机械闭合回路，介质在操作期间流过该回路，并且优选地具有电磁的非接触激励元件，用于使得环路在振荡模式下围绕旋转轴线在操作期间旋转。循环有起点和终点。起始点和终点分别靠近在一起并且分别连接到柔性入口管和柔性出口管，其优选平行并且靠近在一起延伸。该回路通过柔性入口管和出口管弹性地悬挂在流量计的框架上，优选地与回路管形成一个整体。

9. 发明申请

US20220324701A1 MICROELECTROMECHANICAL SYSTEM COMPONENT OR A MICROFLUIDIC COMPONENT COMPRISING A FREE-HANGING OR FREE-STANDING MICROCHANNEL 有权
公开(公告)号：US20220324701A1
公开(公告)日：2022-10-13
申请号：US17642362
申请日：2020-09-18
申请人： BERKIN B.V.
发明人： Wouter SPARREBOOM , Jarno GROENESTEIJN , Jack Herman VAN PUTTEN , Meint Jelle DE BOER , Remco John WIEGERINK , Henk-Willem VELTKAMP , Qihui YU , Mahdieh YARIESBOUEI , Miguel A. RODRIGUEZ OLGUIN , Joost Conrad LÖTTERS
IPC分类号： B81C1/00 , G01N9/32 , G01F1/84
摘要： The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

10. 发明授权

US10648935B2 Flow measurement system and method for determining at least one property of a medium 有权
公开(公告)号：US10648935B2
公开(公告)日：2020-05-12
申请号：US15112625
申请日：2015-01-23
申请人： BERKIN B.V.
发明人： Joost Conrad Lötters , Egbert Jan Van Der Wouden , Jarno Groenesteijn , Wouter Sparreboom , Theodorus Simon Josef Lammerink , Remco John Wiegerink
IPC分类号： G01N25/00 , G01N25/44 , G01K17/12 , G01F1/68 , G01F1/84
摘要： The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

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