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    • 2. 发明申请
    • ANALYSIS DEVICE
    • US20220349813A1
    • 2022-11-03
    • US17466288
    • 2021-09-03
    • Keyence Corporation
    • Ryosuke IMAIKenichiro HIROSE
    • G01N21/25G01N21/31G02B5/10G02B19/00
    • An analysis and observation device includes: an electromagnetic wave emitter that emits a primary electromagnetic wave; a reflective object lens having a primary mirror provided with a primary reflection surface reflecting a secondary electromagnetic wave and a secondary mirror provided with a secondary reflection surface receiving and further reflecting the secondary electromagnetic wave; first and second detectors that receive the secondary electromagnetic wave and generate an intensity distribution spectrum; and a controller that performs component analysis of a sample based on the intensity distribution spectrum. A transmissive region through which the primary electromagnetic wave is transmitted is provided at a center of the secondary mirror. The transmissive region transmits the primary electromagnetic wave, which has been emitted from the electromagnetic wave emitter and passed through an opening of the primary mirror, thereby emitting the primary electromagnetic wave along an analysis optical axis of the reflective object lens.