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1. 发明授权

US10704883B2 Strain sensor with measurement discrimination according to the deformation direction 有权
公开(公告)号：US10704883B2
公开(公告)日：2020-07-07
申请号：US16082142
申请日：2017-02-28
申请人： ETAT FRANÇAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT , SILMACH
发明人： Thierry Cote , Vianney Sadoulet , Patrice Minotti , Vincent Walter , Pascal Girardin
IPC分类号： G01B5/30 , G01B21/32 , G01D5/04 , G01L1/00 , G01L1/04
摘要： A deformation passive sensor includes a system for detecting a variation in the distance between two points or regions of a structure, and a carrier having first and second parts configured to be fixed to the points or regions. The system includes a measuring assembly carried by the first part and actuatable only in one measurement direction in order to measure and store a measurement associated with at least one deformation in a measurement direction, and an actuating device including an intermediary assembly having an actuating member for actuating the measuring assembly, and an actuating assembly having a push part facing the intermediary assembly and configured such that the actuating member is moved with respect to the measuring assembly only when the second part moves in the measurement direction.

2. 发明申请

US20140292137A1 Actuation device with a drive element actuated by crawling 有权
标题翻译：驱动装置与驱动元件通过爬行动作
公开(公告)号：US20140292137A1
公开(公告)日：2014-10-02
申请号：US14091223
申请日：2013-11-26
申请人： SILMACH , UNIVERSITE DE FRANCHE-COMTE , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
发明人： Patrice Le Moal , Gilles Bourbon , Patrice Minotti , Paul Vescovo
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , Y10T29/41
摘要： The subject matter here is an actuation device (1) comprising an actuation element (3) including a fixed portion (31) and a driving portion (32); wherein the fixed portion (31) includes a crawling surface (311), the driving portion (32) includes a flexible moveable blade (321) positioned in parallel and at a distance from the crawling surface (311), and wherein, when a power supply voltage is applied between the moveable blade (321) and the crawling surface (311), the free end (3211) comes into contact with the crawling surface (311), and a contact area, between the moveable blade (321) and the crawling surface (311), increases by propagation of the crawling front (3213) along the moveable blade (321), the propagation of the crawling front displacing the moveable blade (321) according to a first orientation.
摘要翻译：这里的主题是包括具有固定部分（31）和驱动部分（32）的致动元件（3）的致动装置（1）。其特征在于，所述固定部（31）包括爬行面（311），所述驱动部（32）包括与所述爬行面（311）平行且距离所述爬行面（311）一定距离地配置的柔性可动叶片（321），并且其中，在可动叶片（321）和爬行面（311）之间施加电源电压，自由端（3211）与爬行面（311）接触，并且在可动叶片（321）和爬行面（311）通过沿着可移动刀片（321）的爬行前沿（3213）的传播而增加，爬行前沿根据第一方向移动可移动刀片（321）的传播。

3. 发明申请

US20090096323A1 Method and Device for Moving an Element to Be Driven Using an Actuating Element Formed by Etching in a Semiconductor Material 有权
标题翻译：使用通过在半导体材料中蚀刻形成的致动元件来移动要驱动的元件的方法和装置
公开(公告)号：US20090096323A1
公开(公告)日：2009-04-16
申请号：US11886504
申请日：2006-03-16
申请人： Patrice Minotti , Gilles Bourbon , Patrice Le Moal , Eric Joseph
发明人： Patrice Minotti , Gilles Bourbon , Patrice Le Moal , Eric Joseph
IPC分类号： H02N2/12
CPC分类号： H02N1/008
摘要： The invention concerns an element to be driven, a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to move the driving element so that it drives the element to be driven in step-by-step displacement, the driving element and the actuating element being formed by etching in a semiconductor material wafer. The invention is characterized in that it comprises elastic prestressing means for maintaining the driving element in contact with the element to be driven.
摘要翻译：本发明涉及要被驱动的元件，被设计成被推动与要驱动的元件接合的驱动元件和适于移动驱动元件的致动元件，使得驱动元件以逐步位移驱动被驱动元件驱动元件和致动元件通过在半导体材料晶片中进行蚀刻形成。本发明的特征在于它包括用于保持驱动元件与被驱动元件接触的弹性预应力装置。

4. 发明申请

US20220146247A1 MEMS SENSOR FOR SENSING DEFORMATION BY BREAKING CONTACT BETWEEN TWO ELECTRODES 有权
公开(公告)号：US20220146247A1
公开(公告)日：2022-05-12
申请号：US17605692
申请日：2020-05-07
申请人： SILMACH
发明人： Marc SWOROWSKI , Charles HAYE
IPC分类号： G01B7/16 , B81B3/00
摘要： The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: —a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); —a thrust element (4) mounted fixed with respect to the first portion; —a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; —a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

5. 发明授权

US09712085B2 Actuation device with a drive element actuated by crawling 有权
公开(公告)号：US09712085B2
公开(公告)日：2017-07-18
申请号：US14091223
申请日：2013-11-26
申请人： SILMACH , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) , UNIVERSITE DE FRANCHE-COMTE
发明人： Patrice Le Moal , Gilles Bourbon , Patrice Minotti , Paul Vescovo
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , Y10T29/41
摘要： An actuation device (1) which includes an actuation element (3) with a fixed 10 portion (31) and a driving portion (32); wherein the fixed portion (31) includes a crawling surface (311). The driving portion (32) includes a flexible moveable blade (321) positioned in parallel and at a distance from the crawling surface (311). When a power supply voltage is applied between the moveable blade (321) and the crawling surface (311), the free end (3211) comes into contact with the crawling surface (311), and a contact area, between the moveable blade (321) and the crawling surface (311), increases by propagation of the crawling front (3213) along the moveable blade (321). The propagation of the crawling front displaces the moveable blade (321) according to a first orientation.

6. 发明授权

US07768161B2 Method and device for moving an element to be driven using an actuating element formed by etching in a semiconductor material 有权
标题翻译：使用通过在半导体材料中蚀刻形成的致动元件来移动待驱动元件的方法和装置
公开(公告)号：US07768161B2
公开(公告)日：2010-08-03
申请号：US11886512
申请日：2006-03-15
申请人： Patrice Le Moal , Gilles Bourbon , Patrice Minotti , Eric Joseph
发明人： Patrice Le Moal , Gilles Bourbon , Patrice Minotti , Eric Joseph
IPC分类号： H02K7/07 , H02N1/00
CPC分类号： H02N1/008 , Y10T74/1529
摘要： A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.
摘要翻译：一种装置，包括待驱动的元件和设计成被推动与被驱动元件接合的驱动元件，以及适于产生往复运动以使驱动元件移动的致动元件，驱动元件和致动元件由提供了半导体材料块中的蚀刻。在由致动元件产生的运动的第一交替（a）期间，驱动元件被推动与待驱动的元件接合以拉动待驱动的元件。在由致动元件产生的相反方向的第二次交替（b）期间，驱动元件在待驱动的元件上滑动，使得被驱动的元件由驱动元件逐步移动。

7. 发明授权

US09939246B2 Amplified passive and reversible micro-sensor of deformations 有权
公开(公告)号：US09939246B2
公开(公告)日：2018-04-10
申请号：US14901872
申请日：2014-07-01
申请人： ETAT FRANCAIS represente par LE DELEGUE GENERAL POUR L'ARMEMENT , SILMACH
发明人： Pierre-Francois Louvigne , Patrice Minotti , Paul Vescovo , Vianney Sadoulet
IPC分类号： G01B5/00 , G01D5/00 , G01B5/30 , G01D5/04
CPC分类号： G01B5/30 , G01D5/04
摘要： The disclosed micro-sensor includes: a substrate including a first portion and a second portion; a third portion and fourth portion provided between the portions and connected to the first portion and the second portion respectively by an elastic member; detection and a counter including: a counting gear, a third beam capable of meshing with the gear, an amplifier for the value of a relative movement between the portions and including: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to the plate, the third beam being attached on one side to the plate and including a tooth capable of meshing with the gear.

8. 发明授权

US09140584B2 Passive, reversible deformation sensor 有权
标题翻译：被动，可逆变形传感器
公开(公告)号：US09140584B2
公开(公告)日：2015-09-22
申请号：US14113306
申请日：2012-04-20
申请人： Pierre-Francois Louvigne , Patrice Minotti , Paul Vescovo , Vincent Walter
发明人： Pierre-Francois Louvigne , Patrice Minotti , Paul Vescovo , Vincent Walter
IPC分类号： G01D1/00 , G01D9/00 , G01B5/30 , G01K7/01 , G01Q80/00
CPC分类号： G01D9/00 , G01B5/30 , G01K7/01 , G01Q80/00
摘要： The present invention relates to the field of microsensors, and particularly to a passive and reversible deformation sensor, specifically cycles of deformations in a direction OX of a structure, specifically during cycles of temperatures or mechanical stresses to which the structure is subjected, this sensor including elements (4, 5, 6) for detecting and, preferably, counting cycles of variations in the distance between two points or areas of a structure, these elements including a support having first and second portions (41, 44) attachable to, respectively, either of the two points or areas of the structure, wherein the detecting elements are associated with each of the first and second portions of the support, sensor characterized by in that the detecting elements include elements (541, 542, 543, 551, 552, 553, 561, 562, 563) for distinguishing between at least two different thresholds of cycles of variations in distance.
摘要翻译：本发明涉及微传感器的领域，特别涉及一种被动和可逆的变形传感器，特别是在结构的方向OX上，特别是在结构受到的温度或机械应力的循环期间变形的循环，该传感器包括元件（4,5,6），用于检测并且优选地计数结构的两个或多个区域之间的距离变化的周期，这些元件包括具有分别可连接到第一和第二部分的第一和第二部分（41,44）检测元件与支架的第一和第二部分中的每一个相关联，传感器的特征在于检测元件包括元件（541,542,543,551,552， 553,561,562,563），用于区分距离变化周期的至少两个不同阈值。

9. 发明申请

US20080150391A1 Method and Device for Moving an Element to Be Driven Using an Actuating Element Formed by Etching in a Semiconductor Material 有权
标题翻译：使用通过在半导体材料中蚀刻形成的致动元件来移动要驱动的元件的方法和装置
公开(公告)号：US20080150391A1
公开(公告)日：2008-06-26
申请号：US11886512
申请日：2006-03-15
申请人： Patrice Le Moal , Gilles Bourbon , Patrice Minotti , Eric Joseph
发明人： Patrice Le Moal , Gilles Bourbon , Patrice Minotti , Eric Joseph
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , Y10T74/1529
摘要： A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.
摘要翻译：一种装置，包括待驱动的元件和设计成被推动与被驱动元件接合的驱动元件，以及适于产生往复运动以使驱动元件移动的致动元件，驱动元件和致动元件由提供了半导体材料块中的蚀刻。在由致动元件产生的运动的第一交替（a）期间，驱动元件被推动与待驱动的元件接合以拉动待驱动的元件。在由致动元件产生的相反方向的第二次交替（b）期间，驱动元件在待驱动的元件上滑动，使得被驱动的元件由驱动元件逐步移动。

10. 发明授权

US10401192B2 Method for counting events occurring during a duration T and associated mechanical event counters 有权
公开(公告)号：US10401192B2
公开(公告)日：2019-09-03
申请号：US15510321
申请日：2015-09-10
申请人： ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT , SILMACH
发明人： Pierre-Francois Louvigne , Patrice Minotti , Vianney Sadoulet , Pascal Girardin , Charles Haye
IPC分类号： G01D5/04 , G01D5/245 , G01D5/26
摘要： Disclosed is a method for counting events occurring during a period T carried out by a mechanical counter including two toothed wheels with the same pitch, the occurrence of an event causing the rotation of each wheel by an angle corresponding to the pitch of the teeth thereof, the method including: counting or calculating, for each wheel at the end of T, the difference in the number of teeth between the initial and final position thereof, the step being at least partially carried out either by an optical unit, requiring the presence on each wheel of at least one marker, or by a unit for measuring the angular displacement of each wheel and associated calculation unit; and calculating the number of occurred events N in accordance with the difference between the values counted or measured and in accordance with the number of teeth of the wheels.

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