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    • 2. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US08754459B2
    • 2014-06-17
    • US13728311
    • 2012-12-27
    • Masaaki HiguchiMasaru Kito
    • Masaaki HiguchiMasaru Kito
    • H01L27/108H01L27/105H01L27/11H01L27/115H01L21/8229H01L21/8239H01L27/112H01L29/68
    • H01L27/105H01L21/8229H01L21/8239H01L27/11H01L27/112H01L27/115H01L27/11582H01L29/685H01L29/792
    • According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a plurality of insulative separating films, a channel body, and a memory film. The stacked body includes a plurality of electrode layers and a plurality of insulating layers. The plurality of insulative separating films separates the stacked body into a plurality. The channel body extends in the stacking direction between the plurality of insulative separating films. A width of the electrode layer of a lower layer side between the insulative separating film and the memory film is greater than a width of the electrode layer of an upper layer side between the insulative separating film and the memory film. An electrical resistivity of the electrode layer is higher for the electrode layer of the lower layer side having the greater width than for the electrode layer of the upper layer side having the lesser width.
    • 根据一个实施例,半导体存储器件包括衬底,层叠体,多个绝缘分离膜,通道体和存储膜。 层叠体包括多个电极层和多个绝缘层。 多个绝缘分离膜将堆叠体分离成多个。 通道体在层叠方向上在多个绝缘分离膜之间延伸。 绝缘分离膜和记忆膜之间的下层侧的电极层的宽度大于绝缘分离膜和记忆膜之间的上层侧的电极层的宽度。 对于具有比具有较小宽度的上层侧的电极层的宽度大的下层侧的电极层,电极层的电阻率较高。
    • 3. 发明申请
    • SEMICONDUCTOR MEMORY DEVICE
    • 半导体存储器件
    • US20130234222A1
    • 2013-09-12
    • US13598748
    • 2012-08-30
    • Naoki YASUDAMasaaki HiguchiKatsuyuki SekineMasao Shingu
    • Naoki YASUDAMasaaki HiguchiKatsuyuki SekineMasao Shingu
    • H01L29/78
    • H01L27/11582G11C16/0483
    • A semiconductor memory device includes a substrate, a structure body, a semiconductor layer, and a memory film. The memory film is provided between the semiconductor layer and the plurality of electrode films. The memory film includes a charge storage film, a block film, and a tunnel film. The block film is provided between the charge storage film and the plurality of electrode films. The tunnel film is provided between the charge storage film and the semiconductor layer. The tunnel film includes a first film containing silicon oxide, a second film containing silicon oxide, and a third film provided between the first film and the second film and containing silicon oxynitride. When a composition of the silicon oxynitride contained in the third film is expressed by a ratio x of silicon oxide and a ratio (1−x) of silicon nitride, 0.5≦x
    • 半导体存储器件包括衬底,结构体,半导体层和存储膜。 存储膜设置在半导体层和多个电极膜之间。 存储膜包括电荷存储膜,块膜和隧道膜。 阻挡膜设置在电荷存储膜和多个电极膜之间。 隧道膜设置在电荷存储膜和半导体层之间。 隧道膜包括含有氧化硅的第一膜,含有氧化硅的第二膜和设置在第一膜和第二膜之间并含有氮氧化硅的第三膜。 当第三膜中所含的氮氧化硅的组成由氧化硅的比率x和氮化硅的比例(1-x)表示时,0.5×x≤1。
    • 4. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US08254175B2
    • 2012-08-28
    • US12638836
    • 2009-12-15
    • Masaaki HiguchiHiroshi MatsubaYoshio OzawaTetsuya Kai
    • Masaaki HiguchiHiroshi MatsubaYoshio OzawaTetsuya Kai
    • G11C11/34
    • H01L21/28282
    • A semiconductor device includes a semiconductor region, a tunnel insulating film formed on the semiconductor region, a charge-storage insulating film formed on the tunnel insulating film, a block insulating film formed on the charge-storage insulating film, and a control gate electrode formed on the block insulating film, wherein the tunnel insulating film comprises a first region which is formed on a surface of the semiconductor region and contains silicon and oxygen, a second region which contains silicon and nitrogen, a third region which is formed on a back surface of the charge-storage insulating film and contains silicon and oxygen, and an insulating region which is formed at least between the first region and the second region or between the second region and the third region, and contains silicon and nitrogen and oxygen and the second region is formed between the first region and the third region.
    • 半导体器件包括半导体区域,形成在半导体区域上的隧道绝缘膜,形成在隧道绝缘膜上的电荷存储绝缘膜,形成在电荷存储绝缘膜上的块绝缘膜和形成的控制栅电极 在所述块绝缘膜上,其中所述隧道绝缘膜包括形成在所述半导体区域的表面上并且包含硅和氧的第一区域,包含硅和氮的第二区域,形成在所述第二区域的背面 的电荷存储绝缘膜并且包含硅和氧,以及至少形成在第一区域和第二区域之间或者在第二区域和第三区域之间形成的绝缘区域,并且包含硅和氮和氧,并且第二 区域形成在第一区域和第三区域之间。
    • 5. 发明申请
    • SEMICONDUCTOR MEMORY DEVICE
    • 半导体存储器件
    • US20120068251A1
    • 2012-03-22
    • US13004238
    • 2011-01-11
    • Masaaki HiguchiJunya Fujita
    • Masaaki HiguchiJunya Fujita
    • H01L29/792
    • H01L27/11582H01L29/40114H01L29/7926
    • According to one embodiment, a semiconductor memory device includes a multilayer body, a block layer, a charge storage layer, a tunnel layer, and a semiconductor pillar. The multilayer body includes a plurality of insulating films and electrode films alternately stacked. The multilayer body includes a through hole extending in stacking direction of the insulating films and the electrode films. The block layer is provided on an inner surface of the through hole. The charge storage layer is surrounded by the block layer. The tunnel layer is surrounded by the charge storage layer. The semiconductor pillar is surrounded by the tunnel layer. Dielectric constant of a portion of the tunnel layer on a side of the semiconductor pillar is higher than dielectric constant of a portion of the tunnel layer on a side of the charge storage layer.
    • 根据一个实施例,半导体存储器件包括多层体,块层,电荷存储层,隧道层和半导体柱。 多层体包括交替层叠的多个绝缘膜和电极膜。 多层体包括在绝缘膜和电极膜的堆叠方向上延伸的通孔。 阻挡层设置在通孔的内表面上。 电荷存储层被阻挡层包围。 隧道层被电荷存储层包围。 半导体柱被隧道层包围。 半导体柱一侧的隧道层的一部分的介电常数高于电荷存储层一侧的隧道层的一部分的介电常数。
    • 6. 发明授权
    • Engine generator
    • 发动机发电机
    • US07004134B2
    • 2006-02-28
    • US10778889
    • 2004-02-12
    • Masaaki Higuchi
    • Masaaki Higuchi
    • F02P23/00
    • F02B75/16F02B63/04F02B63/048F02B2063/046
    • A positioning pin is knocked onto a crankshaft of an engine and a key way is formed in a boss of a first flywheel. When an outer rotor type generator is connected with the engine, the boss of the first flywheel is fitted over the crankshaft so as to adjust the positioning pin to the key way. When an inner rotor type generator is connected with the engine, a rotor shaft on which a rotor of a generator is mounted is fitted to a second flywheel so as to adjust the positioning pin to a key way formed in the second flywheel. The ignition angle of the engine is determined by fitting the positioning pin to the key way.
    • 定位销被撞击到发动机的曲轴上,并且在第一飞轮的凸台中形成关键方式。 当外转子型发电机与发动机连接时,第一飞轮的凸台装配在曲轴上,以便将定位销调整为关键方式。 当将内转子式发电机与发动机连接时,将安装有发电机的转子的转子轴装配到第二飞轮上,以将定位销调整成形成在第二飞轮中的键。 发动机的点火角通过将定位销配合到钥匙方式来确定。
    • 10. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US08772859B2
    • 2014-07-08
    • US13415057
    • 2012-03-08
    • Masaaki Higuchi
    • Masaaki Higuchi
    • H01L29/792
    • H01L27/11582H01L27/1157
    • According to one embodiment, a semiconductor memory device includes a substrate, a first stacked body, a second stacked body, a memory film, a gate insulating film, and a channel body. The first stacked body has a plurality of electrode layers and a plurality of first insulating layers. The second stacked body has a selector gate and a second insulating layer. The memory film is provided on a sidewall of a first hole. The gate insulating film is provided on a sidewall of a second hole. The channel body is provided on an inner side of the memory film and on an inner side of the gate insulating film. A step part is provided between a side face of the selector gate and the second insulating layer. A region positioned near a top end of the selector gate of the channel body is silicided.
    • 根据一个实施例,半导体存储器件包括衬底,第一层叠体,第二层叠体,存储膜,栅极绝缘膜和通道体。 第一层叠体具有多个电极层和多个第一绝缘层。 第二层叠体具有选择栅和第二绝缘层。 记忆膜设置在第一孔的侧壁上。 栅极绝缘膜设置在第二孔的侧壁上。 通道体设置在存储膜的内侧和栅极绝缘膜的内侧。 在选择栅极的侧面和第二绝缘层之间设置台阶部。 位于通道主体的选择器门的顶端附近的区域被硅化。