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    • 1. 发明申请
    • Thin film electret microphone
    • 薄膜驻极体麦克风
    • US20010033670A1
    • 2001-10-25
    • US09859191
    • 2001-05-15
    • California Institute of Technology a California Institute of Technology
    • Yu-Chong TaiTseng-Yang HsuWen H. Hsieh
    • H04R017/00H04R025/00
    • H04R19/016H04R25/604Y10T29/42Y10T29/49005Y10T29/49226
    • An electret formed by micro-machining technology on a support surface, including a self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a microphone back plate, at least one of which includes an electret formed by micro-machining technology. When juxtaposed, the two units form a microphone that can produce a signal without the need for external biasing, thereby reducing system volume and complexity. The electret material used is a thin film of spin-on polytetrafluoroethylene (PTFE). An electron gun preferably is used for charge implantation. The electret has a saturated charged density in the range of about 2null10null5 C/m2 to about 8null10null4 C/m2. Thermal annealing is used to stabilize the implanted charge. An open circuit sensitivity of about 0.5 mV/Pa has been achieved for a hybrid microphone package.
    • 通过微加工技术在支撑表面上形成的驻极体,其包括通过微加工技术形成的优选以麦克风形式的自供电的驻极体声音传感器。 每个麦克风被制造成两件式的单元,其包括麦克风膜单元和麦克风背板,其中至少一个包括由微加工技术形成的驻极体。 当并置时,两个单元形成麦克风,其可以产生信号而不需要外部偏置,从而降低系统体积和复杂性。 使用的驻极体材料是旋涂聚四氟乙烯(PTFE)的薄膜。 电子枪优选用于电荷注入。 驻极体的饱和带电密度在约2×10 -5 C / m 2至约8×10 -4 C / m 2的范围内。 热退火用于稳定植入电荷。 对于混合麦克风封装已经实现了约0.5mV / Pa的开路灵敏度。