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    • 2. 发明申请
    • PRESSURE SENSOR
    • 压力传感器
    • US20120104518A1
    • 2012-05-03
    • US13321373
    • 2010-05-20
    • Luca Salmaso
    • Luca Salmaso
    • H01L29/84H01L21/02
    • G01L9/0042G01L19/0076H01L2224/48091H01L2224/49171H01L2924/19105H01L2924/00014
    • A pressure sensor has a sensor body at least partly formed with an electrically insulating material, particularly a ceramic material, defining a cavity facing on which is a diaphragm provided with an electric detector element, configured for detecting a bending of the diaphragm. The sensor body supports a circuit arrangement, including, a plurality of circuit components, among which is an integrated circuit, for treating a signal generated by the detection element. The circuit arrangement includes tracks made of electrically conductive material directly deposited on a surface of the sensor body made of electrically insulating material. The integrated circuit is made up of a die made of semiconductor material directly bonded onto the surface of the sensor body and the die is connected to respective tracks by means of wire bonding, i.e. by means of thin connecting wires made of electrically conductive material.
    • 压力传感器具有至少部分地形成有电绝缘材料,特别是陶瓷材料的传感器主体,所述电绝缘材料限定了面向其上的空腔,所述隔膜设置有设置有检测所述隔膜弯曲的电检测器元件的隔膜。 传感器主体支持电路装置,其包括多个电路部件,其中集成电路用于处理由检测元件产生的信号。 电路装置包括由直接沉积在由绝缘材料制成的传感器主体的表面上的导电材料制成的轨道。 集成电路由直接结合到传感器主体的表面上的由半导体材料制成的管芯构成,并且管芯通过引线接合,即通过由导电材料制成的细连接线连接到相应的轨道。
    • 6. 发明授权
    • Pressure sensor
    • 压力传感器
    • US08878313B2
    • 2014-11-04
    • US13321373
    • 2010-05-20
    • Luca Salmaso
    • Luca Salmaso
    • H01L29/84G01L9/00
    • G01L9/0042G01L19/0076H01L2224/48091H01L2224/49171H01L2924/19105H01L2924/00014
    • A pressure sensor has a sensor body at least partly formed with an electrically insulating material, particularly a ceramic material, defining a cavity facing on which is a diaphragm provided with an electric detector element, configured for detecting a bending of the diaphragm. The sensor body supports a circuit arrangement, including, a plurality of circuit components, among which is an integrated circuit, for treating a signal generated by the detection element. The circuit arrangement includes tracks made of electrically conductive material directly deposited on a surface of the sensor body made of electrically insulating material. The integrated circuit is made up of a die made of semiconductor material directly bonded onto the surface of the sensor body and the die is connected to respective tracks by means of wire bonding, i.e. by means of thin connecting wires made of electrically conductive material.
    • 压力传感器具有至少部分地形成有电绝缘材料,特别是陶瓷材料的传感器主体,所述电绝缘材料限定了面向其上的空腔,所述隔膜设置有设置有检测所述隔膜弯曲的电检测器元件的隔膜。 传感器主体支持电路装置,其包括多个电路部件,其中集成电路用于处理由检测元件产生的信号。 电路装置包括由直接沉积在由绝缘材料制成的传感器主体的表面上的导电材料制成的轨道。 集成电路由直接结合到传感器主体的表面上的由半导体材料制成的管芯构成,并且管芯通过引线接合,即通过由导电材料制成的细连接线连接到相应的轨道。
    • 8. 发明申请
    • PRESSURE SENSOR
    • US20220381634A1
    • 2022-12-01
    • US17754963
    • 2020-10-15
    • METALLUX SA
    • Massimo MONICHINO
    • G01L9/00
    • A sensor for detecting the pressure of a fluid has a sensor body having at least one first body part and one second body part. The first body part and the second body part are joined together in such a way that a first face of the first body part faces a first face of the second body part, at a distance therefrom.
      The pressure sensor has a circuit arrangement, which includes at least one first electrical circuit that extends at least in part in an area corresponding to a membrane portion and is configured for detecting an elastic flexure or deformation thereof.
      The first electrical circuit is associated to the first face of one of the first body part and the second body part, and the first face of the other one of the first body part and the second body part forms or has associated thereto at least one circuit element, prearranged for interacting with the first electrical circuit when an elastic flexure or deformation of the membrane portion is of a degree at least equal to a substantially predetermined limit, to generate thereby information or a warning representative of at least one from among an excessive pressure of the fluid, an incorrect pressure measurement, and an anomalous state of the device.