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    • 2. 发明授权
    • Piezoelectric in-line RF MEMS switch and method of fabrication
    • 压电式在线RF MEMS开关及其制造方法
    • US07518474B1
    • 2009-04-14
    • US11347291
    • 2006-02-06
    • Jeffrey S. PulskampRonald G. PolcawichDaniel C. Judy
    • Jeffrey S. PulskampRonald G. PolcawichDaniel C. Judy
    • H01P1/10H01H57/00
    • H01P1/127H01H57/00H01H2057/006
    • A MEMS switch and method of fabrication comprises a RF transmission line; a RF beam structure comprising a RF conductor; a cantilevered piezoelectric actuator coupled to the RF beam structure; a plurality of air bridges connected to the cantilevered piezoelectric actuator; and a plurality of contact dimples on the pair on the RF beam structure. The RF transmission line comprises a pair of co-planar waveguide ground planes flanking the RF conductor; and a plurality of ground straps, wherein the RF transmission line is operable to provide a path along which RF signals propagate. The cantilevered piezoelectric actuator comprises a dielectric layer connected to the RF beam structure; a bottom electrode connected to the dielectric layer; a top electrode; and a piezoelectric layer in between the top and bottom electrodes, wherein the top electrode is offset from an edge of the piezoelectric layer and the bottom electrode.
    • MEMS开关和制造方法包括RF传输线; 包括RF导体的射频束结构; 耦合到RF束结构的悬臂式压电致动器; 连接到悬臂式压电致动器的多个气桥; 以及在射频束结构上的一对上的多个接触凹坑。 RF传输线包括在RF导体侧面的一对共面波导接地平面; 和多个接地带,其中RF传输线可操作以提供RF信号沿着该路径传播的路径。 悬臂式压电致动器包括连接到射频束结构的电介质层; 连接到电介质层的底部电极; 顶电极 以及在顶部和底部电极之间的压电层,其中顶部电极偏离压电层和底部电极的边缘。