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1. 发明授权

US11994390B2 Vibratory sensor with electronic balancing 有权
公开(公告)号：US11994390B2
公开(公告)日：2024-05-28
申请号：US17668031
申请日：2022-02-09
申请人： Honeywell International Inc.
发明人： Markus Hans Gnerlich
IPC分类号： G01C19/5712 , G01C19/5726 , G01C19/574
CPC分类号： G01C19/5712 , G01C19/5726 , G01C19/574
摘要： A vibratory sensor with electronic balancing is provided. The vibratory sensor includes at least one pair of proof masses, at least one tunable spring having electro-thermodynamic characteristics for each first and second proof mass in the at least one pair of proof masses, and a steering circuit. Each pair of proof masses include a first proof mass and a second proof mass. The first proof mass and the second proof mass can move in opposing directions. Each tunable spring couples an associated one of the first and second proof masses to a substrate. The steering circuit is configured to selectively couple current from a power source to each tunable spring to adjust the stiffness of at least one tunable spring to balance relative movement between the first and second proof masses of the at least one pair of proof masses.

2. 发明申请

US20220057210A1 3-AXIS GYROSCOPE WITH ROTATIONAL VIBRATION REJECTION 有权
公开(公告)号：US20220057210A1
公开(公告)日：2022-02-24
申请号：US17515271
申请日：2021-10-29
申请人： Analog Devices, Inc.
发明人： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC分类号： G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
摘要： Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

3. 发明授权

US11220424B2 Methods for increasing aspect ratios in comb structures 有权
公开(公告)号：US11220424B2
公开(公告)日：2022-01-11
申请号：US16253421
申请日：2019-01-22
申请人： Honeywell International Inc.
发明人： Mu hong Lin , Eugene Freeman
IPC分类号： B81C1/00 , B81B7/00 , G01C19/574
摘要： A method comprises: patterning a substrate, including a conductive region, with photoresist exposed by lithography, where the substrate is mounted on a handle substrate; forming a comb structure with conductive fingers on the substrate by at least removing a portion of the conductive region of the substrate; removing the photoresist; forming, one atomic layer at a time, at least one atomic layer of at least one conductor over at least one sidewall of each conductive finger; attaching at least one insulator layer to the comb structure, and the substrate from which the comb structure is formed; and removing the handle substrate.

4. 发明授权

US11193771B1 3-axis gyroscope with rotational vibration rejection 有权
公开(公告)号：US11193771B1
公开(公告)日：2021-12-07
申请号：US16894717
申请日：2020-06-05
申请人： Analog Devices, Inc.
发明人： Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
IPC分类号： G01C19/5747 , G01C19/5712 , G01C19/5719 , G01C19/574
摘要： Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

5. 发明授权

US11181547B2 Inertial sensor, electronic device, and vehicle 有权
公开(公告)号：US11181547B2
公开(公告)日：2021-11-23
申请号：US16694569
申请日：2019-11-25
申请人： SEIKO EPSON CORPORATION
发明人： Makoto Furuhata
IPC分类号： G01P15/18 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C19/574 , G01P3/44 , G01S19/49 , G01P15/08 , G05D1/02 , G01C21/16
摘要： An inertial sensor includes a substrate, a first detection movable body and a second detection movable body which overlap the substrate in a direction along the Z-axis and are disposed side by side in a direction along the X-axis, a first detection spring that supports the first detection movable body to be displaceable in the direction along the X-axis, a second detection spring that supports the second detection movable body to be displaceable in the direction along the X-axis, a first drive portion that drives the first detection movable body with a drive component in the direction along the X-axis, a second drive portion that drives the second detection movable body with the drive component in the direction along the X-axis, and a first and second fixed detection electrodes disposed on the substrate and facing the first and second detection movable bodies. The first and second detection springs are provided with a first thin portion thinner than a thickness of the first and second detection movable bodies in the direction along the Z-axis.

6. 发明申请

US20210164781A1 Inertial Sensor, Method For Manufacturing Inertial Sensor, Inertial Measurement Unit, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle 有权
公开(公告)号：US20210164781A1
公开(公告)日：2021-06-03
申请号：US17176379
申请日：2021-02-16
申请人： Seiko Epson Corporation
发明人： Koichiro KOMIZO
IPC分类号： G01C19/574 , H01L21/3065 , B81C1/00 , G01C19/5747 , G01C19/5769 , B81B3/00
摘要： A gyro sensor includes a plurality of beams connected via a turnaround part. A groove is provided on a main surface of at least one beam of the plurality of beams. Wall thicknesses on the main surface of two sidewalls facing each other of the groove in a direction orthogonal to a longitudinal direction of the beam satisfy 0.9≤T1/T2≤1.1, where T1 is the wall thickness of one sidewall and T2 is the wall thickness of the other sidewall.

7. 发明授权

US10612926B2 MEMS anti-phase vibratory gyroscope 有权
公开(公告)号：US10612926B2
公开(公告)日：2020-04-07
申请号：US15444127
申请日：2017-02-27
申请人： Chinese Academy of Sciences Institute of Geology and Geophysics
发明人： Lian Zhong Yu , Chen Sun
IPC分类号： G01C19/5769 , G01C19/5747 , B81B3/00 , B81C1/00 , G01C19/574
CPC分类号： G01C19/5769 , B81B3/0048 , B81C1/00531 , G01C19/574 , G01C19/5747 , B81B2201/0242 , B81B2203/0118 , B81B2203/0136 , B81C2201/0132 , B81C2201/0159 , B81C2201/0176 , B81C2203/0118
摘要： A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

8. 发明授权

US10598491B2 Stacked balanced resonators 有权
公开(公告)号：US10598491B2
公开(公告)日：2020-03-24
申请号：US15841782
申请日：2017-12-14
申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN
发明人： Khalil Najafi , Ali Darvishian
IPC分类号： G01C19/574 , H03H9/00 , H03H9/02 , H03H9/24
摘要： A resonator array comprises substantially paralleled first and second resonant layers having resonating masses. A first set of lateral drive electrodes cause the first resonating mass to vibrate along an axis in a first geometric plane. A second set of lateral drive electrodes cause the second resonating mass to vibrate along an axis in a second geometric plane in an opposite direction of the first resonating mass by about 180 degrees. Rotation in the system causes the masses to vibrate out-of-plane in opposite directions. The opposite vibrational directions of the first and second resonating masses produces a balanced system with small motion in a bonding area between the stacked resonators. As a result, there is minimal propagation of mechanical waves from the balanced system to a substrate resulting in lower anchor loss and a high Q-factor.

9. 发明授权

US10557710B2 Dual-axis ultra-robust rotation rate sensor for automotive applications 有权
公开(公告)号：US10557710B2
公开(公告)日：2020-02-11
申请号：US15751364
申请日：2016-06-27
申请人： Robert Bosch GmbH
发明人： Andreas Lassl , Benjamin Schmidt , Burkhard Kuhlmann , Mirko Hattass , Thorsten Balslink , Christian Hoeppner
IPC分类号： G01C19/5642 , G01C19/5747 , G01C19/574
摘要： A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

10. 发明授权

US10520314B2 Gyroscope 有权
公开(公告)号：US10520314B2
公开(公告)日：2019-12-31
申请号：US15911270
申请日：2018-03-05
申请人： Hitachi, Ltd.
发明人： Joan Giner
IPC分类号： G01C19/00 , G01C19/574
摘要： The purpose of this invention is obtaining a gyroscope with high Q factor, high as fabricated symmetry and reducing the quadrature error. One aspect of this invention is a gyroscope including a semiconductor chip. This semiconductor chip comprising a substrate, first mass, second mass, connection unit. The first mass can move in any direction of a X-Y plane. The second mass can move in any direction of the X-Y plane. The connection unit located between the first mass and the second mass mechanically connects the first mass and the second mass. The connection unit comprises anchor fixed to the substrate, first shuttle located between the anchor and the first mass, second shuttle located between the anchor and the second mass, first beam connecting the anchor and the first shuttle, second beam connecting the anchor and the second shuttle, third beam connecting the first mass and the first shuttle, fourth beam connecting the second mass and the second shuttle, and fifth beam connecting the first shuttle and the second shuttle. The anchor is located between the first shuttle and the second shuttle.

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