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1. 发明授权

US11604089B2 Mass flow verification based on rate of pressure decay 有权
公开(公告)号：US11604089B2
公开(公告)日：2023-03-14
申请号：US17247091
申请日：2020-11-30
申请人： Applied Materials, Inc.
发明人： Zhiyuan Ye , Justin Hough , Marcel E. Josephson
IPC分类号： G01F25/17 , G01F1/36 , G05D7/06 , G05B23/02 , G01F1/50 , G01F1/38 , G01F25/10 , G01F1/42 , H01L21/67
摘要： An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

2. 发明授权

US11555460B2 Mass flow measurement system using adaptive calibration and sensor diagnostics 有权
公开(公告)号：US11555460B2
公开(公告)日：2023-01-17
申请号：US17546789
申请日：2021-12-09
申请人： Garrett Transportation I Inc.
发明人： Tomas Poloni
IPC分类号： F02D41/00 , F02M26/47 , G01F25/10 , F02D41/26 , G01F1/42 , G01F1/44 , G07C5/00
摘要： New and/or alternative approaches to determine mass flow using a flow measurement device in a pulsatile flow context. The flow measurement device is configured to generate a delta-pressure measurement. A semi-physical valve model is generated for the flow measurement device, and the delta-pressure measurement is then is isolated using the model. A discharge coefficient map is determined for the flow measurement device by testing using sets of operating parameters for a system. The operating parameters of the system are then used to determine the discharge coefficient for use in estimating mass flow with the semi-physical valve model. The resultant estimated mass flow can be used to control the system, and a Factor of Effective Area estimate generated using the valve model can be used to determine the status of the flow measurement device and identify or predict a need for maintenance.

3. 发明授权

US11287297B2 Liquid micrometer with a set flow rate value 有权
公开(公告)号：US11287297B2
公开(公告)日：2022-03-29
申请号：US16637706
申请日：2018-08-08
申请人： ADVANCE DENKI KOGYO KABUSHIKI KAISHA
发明人： Kazuhiro Yoshikawa , Makio Asano , Hitomi Hashimoto , Takuya Tsuzuki , Kimihito Sasao
IPC分类号： G01F1/42 , G01F15/00
摘要： A liquid micrometer which includes: a liquid flow path which supplies liquid from a liquid supply device to a discharge nozzle; a flow rate sensor provided in the liquid flow path; a control valve provided in the liquid flow path between the liquid supply device and the flow rate sensor; a controller which controls the control valve such that a flow rate measured by the flow rate sensor becomes equal to a set value; a pressure sensor which measures pressure of the liquid injected from the discharge nozzle; and a calculating section which calculates the size of a work from the pressure measured by the pressure sensor in a state where the flow rate is maintained at the set value by the controller.

4. 发明申请

US20210263541A1 Methods and Apparatus for Pressure Based Mass Flow Ratio Control 有权
公开(公告)号：US20210263541A1
公开(公告)日：2021-08-26
申请号：US16800363
申请日：2020-02-25
申请人： MKS Instruments, Inc.
发明人： Junhua Ding
IPC分类号： G05D7/06 , G01F1/42
摘要： A system and method for dividing a single mass flow into secondary flows of a desired ratio. The system and method include paths for the secondary flows that include a laminar flow element and two pressure sensors. The nonlinear relationship between flow and pressure upstream and downstream of the laminar flow elements can be transformed into a function comprised of the upstream and downstream pressure that has a linear relationship with the flow. This transformation allows for flow ratio control applications using signals from pressure sensors even if there is no information the fluid species and the flow rate into the flow ratio controller.

5. 发明申请

US20210231477A1 Pressure-difference-based flow-measurement device for gases 有权
公开(公告)号：US20210231477A1
公开(公告)日：2021-07-29
申请号：US17273301
申请日：2019-09-03
申请人： SALVUS TECNOLOGIA LTDA - EPP , CESAR CENTRO DE ESTUDOS E SISTEMAS AVANQADOS DO RECIFE
发明人： Maristone GOMES DA SILVA JUNIOR , Caio CESAR BARBOSA DA SILVA , Daniel THIAGO VASCONCELOS PEREIRA , Rafael DE LIMA PACHECO SILVA , Cristóvão ZUPPARDO RUFINO , Felix GALVÃO BATISTA NETO
IPC分类号： G01F1/42 , G01L19/14
摘要： The “PRESSURE-DIFFERENCE-BASED FLOW-MEASUREMENT DEVICE FOR GASES” relates to a device that generates a pressure difference originating from a mechanical restriction of the flow of gases and which provides easy connection to digital measurement equipment, providing high-precision values. Said device comprises a body (1) made from plastics, provided with a pipe (2) for gases with connections at each of the ends, two pressure take-offs (5) on the front face for connection to a pressure differential sensor, and a flow-restriction plate (6) that divides the tube (2) into two compartments in order to create the pressure difference. Connected to this invention is a device comprising a pressure-difference sensor (7) capable of being connected to the Internet and processing the data received using artificial intelligence and machine learning and of presenting the data to the user on an online platform.

6. 发明申请

US20200348160A1 FLOW LAMINATOR 审中-公开
公开(公告)号：US20200348160A1
公开(公告)日：2020-11-05
申请号：US16854191
申请日：2020-04-21
申请人： FAS MEDIC S.A.
发明人： Davide AZZONI , Manuel Diaz , Joel Di Dio , Vincent Tanari
IPC分类号： G01F5/00 , G01F1/42
摘要： There is provided a fluid sensing apparatus (120) comprising a fluid flow channel (121) having a flow restriction (125), a first fluid port (132) at a first location (131) upstream of the flow restriction, a second fluid port (134) at a second location (133) downstream of the flow restriction, a fluid sensor (130) in fluid communication with the first fluid port and second fluid port, and a laminar flow element (150). The laminar flow element includes a flow stabilisation rod (151) which extends along the fluid flow channel at least from the first location to the second location to define a fluid sensing portion of the fluid flow channel between the outer wall (122) of the fluid flow channel and the outer surface (153) of the flow stabilisation rod. The flow restriction comprises a reduction in the hydraulic diameter of the fluid sensing portion of the fluid flow channel which is caused by a decrease in diameter of the fluid flow channel, or by an increase in the diameter of the flow stabilisation rod, or by both a decrease in diameter of the fluid flow channel and an increase in the diameter of the flow stabilisation rod. Also provided is a mass flow controller (100) including such a fluid sensing apparatus.

7. 发明授权

US10571317B2 Flow measurement arrangement including a flow tube and an elastically deformable orifice plate with strain sensors 有权
公开(公告)号：US10571317B2
公开(公告)日：2020-02-25
申请号：US15901033
申请日：2018-02-21
申请人： Siemens Aktiengesellschaft
发明人： Gilbert Alexander Erdler , Stefan Von Dosky , Wolfgang Ens
IPC分类号： G01F1/38 , G01F1/42
摘要： A flow measurement arrangement and measuring transmitter for process instrumentation that includes the flow measurement arrangement, wherein the flow measurement arrangement operating in accordance with the differential-pressure method includes a tube and an elastically deformable measuring diaphragm (orifice plate) arranged in the cross section of the tube and a strain sensor that detects the deformation and converts it into an electric signal, where the measuring diaphragm (orifice plate) and the tube are formed in one piece from uniform material, and where both side of the measuring diaphragm (orifice plate) each pass into the tube via a fillet groove and the at least one strain sensor is arranged on the circumferential side of the tube opposite the fillet groove.

8. 发明授权

US10444044B2 Flow measurement systems and methods 有权
公开(公告)号：US10444044B2
公开(公告)日：2019-10-15
申请号：US16057907
申请日：2018-08-08
申请人： Joel David Bell , Zaki Din Husain
发明人： Joel David Bell , Zaki Din Husain
IPC分类号： G01F1/42 , G01F1/36 , G01N9/00
摘要： A fluid flow measurement system for measuring the flow rate, density and/or other flow parameters of fluid flow through a flowbore. Additionally, the devices and methods advantageously provide for sampling of the fluid flow from different locations within the flow stream (i.e., center, proximate flowbore wall).

9. 发明申请

US20190178389A1 VALVE WITH BUILT-IN ORIFICE, AND PRESSURE-TYPE FLOW RATE CONTROL DEVICE 审中-公开
公开(公告)号：US20190178389A1
公开(公告)日：2019-06-13
申请号：US16310866
申请日：2017-07-25
申请人： FUJIKIN INCORPORATED
发明人： Yohei SAWADA , Kaoru HIRATA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
IPC分类号： F16K1/52 , G01F1/42 , G05D7/06
摘要： A valve with a built-in orifice includes a base section having a housing recess and first and second flow passages; a valve seat body; an inner disc; a valve element; and an orifice body, wherein the housing recess has a wide-diameter section and a narrow-diameter section, the first flow passage is connected to a space between a wall surface of the narrow-diameter section and the orifice body to communicate with a valve chamber, and the second flow passage communicates with the valve chamber through a through hole of the orifice body and a through hole of the valve seat body.

10. 发明授权

US10317266B2 Flow sensor with heated air collar 有权
公开(公告)号：US10317266B2
公开(公告)日：2019-06-11
申请号：US15715764
申请日：2017-09-26
申请人： General Electric Company
发明人： James N. Mashak , Russell J. Kuzelka
IPC分类号： G01F1/699 , G01F15/14 , G01F1/42 , G01F15/02 , G01F1/40 , G01F15/00 , G01F15/18 , G01F1/69
摘要： A collar is provided for use with a fluid flow sensor to reduce condensation of a moist gas flowing through the fluid flow sensor. The collar comprises a body defining an interior that defines an airspace between the collar and the housing of the fluid flow sensor when the collar is positioned on the fluid flow sensor. The collar also includes a heat source secured to the body and adapted to heat air contained within the airspace to consequently heat the housing of the fluid flow sensor and the interior surfaces of the sensor to reduce condensation of the moist gas.

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