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1. 发明授权

US07927477B2 Precision flow control system 有权
标题翻译：精密流量控制系统
公开(公告)号：US07927477B2
公开(公告)日：2011-04-19
申请号：US12334375
申请日：2008-12-12
申请人： Phillip H. Paul , Jason E. Rehm , Don W. Arnold
发明人： Phillip H. Paul , Jason E. Rehm , Don W. Arnold
IPC分类号： G05B24/04
CPC分类号： G01N30/32 , B01D61/56 , G01N2030/324 , G01N2030/326 , G05D7/0694 , G05D11/132 , Y10T137/85978 , Y10T137/85986 , Y10T137/86027 , G01N30/34 , G01N2030/285
摘要： A precision flow controller is capable of providing a flow rate less than 100 microliters/minute and varying the flow rate in a prescribed manner that is both predictable and reproducible where the accuracy and precision of the flowrate is less than 5% of the flow rate. A plurality of variable pressure fluid supplies pump fluid through a single outlet. Flowmeters measure the flow rates and a controller compares the flow rates to desired flowrates and, if necessary, adjusts the plurality of variable pressure fluid supplies so that the variable pressure fluid supplies pump fluid at the desired flow rate. The variable pressure fluid supplies can be pneumatically driven.
摘要翻译：精密流量控制器能够提供小于100微升/分钟的流量，并以规定的方式改变流速，既可预测又可再现，其中流量的精度和精度小于流量的5％。多个可变压力流体通过单个出口泵送流体。流量计测量流量，并且控制器将流量与所需流量进行比较，并且如果需要，调整多个可变压力流体供应，使得可变压力流体以期望的流速供应泵流体。可变压力流体供应可以气动驱动。

2. 发明授权

US08685218B2 Precision flow control system 有权
标题翻译：精密流量控制系统
公开(公告)号：US08685218B2
公开(公告)日：2014-04-01
申请号：US13046496
申请日：2011-03-11
申请人： Phillip H. Paul , Jason E. Rehm , Don W. Arnold
发明人： Phillip H. Paul , Jason E. Rehm , Don W. Arnold
IPC分类号： G05B24/04
CPC分类号： G01N30/32 , B01D61/56 , G01N2030/324 , G01N2030/326 , G05D7/0694 , G05D11/132 , Y10T137/85978 , Y10T137/85986 , Y10T137/86027 , G01N30/34 , G01N2030/285
摘要： A precision flow controller is capable of providing a flow rate less than 100 microliters/minute and varying the flow rate in a prescribed manner that is both predictable and reproducible where the accuracy and precision of the flowrate is less than 5% of the flow rate. A plurality of variable pressure fluid supplies pump fluid through a single outlet. Flowmeters measure the flow rates and a controller compares the flow rates to desired flowrates and, if necessary, adjusts the plurality of variable pressure fluid supplies so that the variable pressure fluid supplies pump fluid at the desired flow rate. The variable pressure fluid supplies can be pneumatically driven.
摘要翻译：精密流量控制器能够提供小于100微升/分钟的流量，并以规定的方式改变流速，既可预测又可再现，其中流量的精度和精度小于流量的5％。多个可变压力流体通过单个出口泵送流体。流量计测量流量，并且控制器将流量与所需流量进行比较，并且如果需要，调整多个可变压力流体供应，使得可变压力流体以期望的流速供应泵流体。可变压力流体供应可以气动驱动。

3. 发明申请

US20100004785A1 CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND STORAGE MEDIUM STORING CONTROL PROGRAM 有权
标题翻译：等离子体处理系统的控制装置和控制方法以及存储介质存储控制程序
公开(公告)号：US20100004785A1
公开(公告)日：2010-01-07
申请号：US12496117
申请日：2009-07-01
申请人： Hiroaki MOCHIZUKI , Masahiro NUMAKURA
发明人： Hiroaki MOCHIZUKI , Masahiro NUMAKURA
IPC分类号： G05B24/04
CPC分类号： G05B19/41865 , Y02P90/20
摘要： In a control device of a plasma processing system, a communication unit is configured to receive processing information related to a carrier of a next processing lot. A determination unit is configured to determine whether the processing information received by the communication unit has pre-treatment information related to one of the plasma processing devices. When it is determined that the processing information has the pre-treatment information by the determination unit, a generation unit is configured to generate an object for declaring execution of the pre-treatment for the carrier of a next processing lot if a desired condition of transferring of the carrier is satisfied. In addition, if the object is generated by the generation unit, a process executing control unit is configured to start the pre-treatment for the target object in the carrier of a next processing lot without any notification that the carrier reaches a destination plasma processing device.
摘要翻译：在等离子体处理系统的控制装置中，通信单元被配置为接收与下一个处理批次的载体有关的处理信息。确定单元被配置为确定由通信单元接收的处理信息是否具有与等离子体处理设备之一相关的预处理信息。当确定处理信息具有确定单元的预处理信息时，生成单元被配置为产生用于宣告执行下一个处理批次的载体的预处理的对象，如果期望的转移条件的承运人满意。此外，如果对象由生成单元生成，则处理执行控制单元被配置为开始对下一个处理批次的载体中的目标对象的预处理，而不通知载体到达目的地等离子体处理装置。

4. 发明授权

US08452455B2 Control device and control method of plasma processing system, and storage medium storing control program 有权
标题翻译：等离子体处理系统的控制装置和控制方法以及存储控制程序的存储介质
公开(公告)号：US08452455B2
公开(公告)日：2013-05-28
申请号：US12496117
申请日：2009-07-01
申请人： Hiroaki Mochizuki , Masahiro Numakura
发明人： Hiroaki Mochizuki , Masahiro Numakura
IPC分类号： G05B24/04
CPC分类号： G05B19/41865 , Y02P90/20
摘要： In a control device of a plasma processing system, a communication unit is configured to receive processing information related to a carrier of a next processing lot. A determination unit is configured to determine whether the processing information received by the communication unit has pre-treatment information related to one of the plasma processing devices. When it is determined that the processing information has the pre-treatment information by the determination unit, a generation unit is configured to generate an object for declaring execution of the pre-treatment for the carrier of a next processing lot if a desired condition of transferring of the carrier is satisfied. In addition, if the object is generated by the generation unit, a process executing control unit is configured to start the pre-treatment for the target object in the carrier of a next processing lot without any notification that the carrier reaches a destination plasma processing device.
摘要翻译：在等离子体处理系统的控制装置中，通信单元被配置为接收与下一个处理批次的载体有关的处理信息。确定单元被配置为确定由通信单元接收的处理信息是否具有与等离子体处理设备之一相关的预处理信息。当确定处理信息具有确定单元的预处理信息时，生成单元被配置为产生用于宣告执行下一个处理批次的载体的预处理的对象，如果期望的转移条件的承运人满意。此外，如果对象由生成单元生成，则处理执行控制单元被配置为开始对下一个处理批次的载体中的目标对象的预处理，而不通知载体到达目的地等离子体处理装置。

5. 发明授权

US07406910B2 Device and method for controlling the position of a pneumatic actuator 有权
标题翻译：用于控制气动执行器位置的装置和方法
公开(公告)号：US07406910B2
公开(公告)日：2008-08-05
申请号：US11526447
申请日：2006-09-23
申请人： Ulrich Schulz , Joerg Kiesbauer
发明人： Ulrich Schulz , Joerg Kiesbauer
IPC分类号： G05B24/04 , G05B24/00 , G05D7/03 , G05D7/00
CPC分类号： F15B11/06 , F15B2211/40515 , F15B2211/426 , F15B2211/45 , F15B2211/6336 , F15B2211/6653 , F15B2211/86 , F15B2211/8855
摘要： The invention pertains to a device for the controlling the position of a pneumatic actuator comprising: a pneumatically adjustable actuating element (5); a pneumatic actuating drive (6) for adjusting the actuating element (5); an electro-pneumatic position controller (1) for pneumatically driving the actuating drive (6) as a function of a position controller set point and a controlled variable; and at least one main pneumatic power amplifier (10) with bypass throttle for amplifying the power output of the position controller (1) and for pneumatically driving the actuating drive (6). In addition, a pilot control pneumatic power amplifier (9) with a bypass throttle for preamplifying the pneumatic power output of the position controller (1) is installed between the position controller (1) and the main power amplifier (10).
摘要翻译：本发明涉及一种用于控制气动致动器的位置的装置，包括：气动调节的致动元件（5）; 用于调节致动元件（5）的气动致动驱动器（6）; 用于根据位置控制器设定点和受控变量气动驱动所述致动驱动器（6）的电动气动位置控制器（1）; 以及具有旁路节气门的至少一个主气动功率放大器（10），用于放大位置控制器（1）的功率输出并用于气动地驱动致动驱动器（6）。此外，在位置控制器（1）和主功率放大器（10）之间安装有用于对位置控制器（1）的气动功率输出进行前置放大的旁通节气门的先导控制气动功率放大器（9）。

6. 发明授权

US07465382B2 Precision flow control system 有权
标题翻译：精密流量控制系统
公开(公告)号：US07465382B2
公开(公告)日：2008-12-16
申请号：US10246284
申请日：2002-09-17
申请人： Phillip H. Paul , Jason E. Rehm , Don W. Arnold
发明人： Phillip H. Paul , Jason E. Rehm , Don W. Arnold
IPC分类号： G05B24/04 , B01L11/00
CPC分类号： G05D7/0682 , G01N30/32 , G01N30/34 , G01N2030/324 , G01N2030/326 , G05D7/0694 , G05D11/132 , G01N2030/285
摘要： A precision flow controller is capable of providing a flow rate less than 100 microliters/minute and varying the flow rate in a prescribed manner that is both predictable and reproducible where the accuracy and precision of the flowrate is less than 5% of the flow rate. A plurality of variable pressure fluid supplies pump fluid through a single outlet. Flowmeters measure the flow rates and a controller compares the flow rates to desired flowrates and, if necessary, adjusts the plurality of variable pressure fluid supplies so that the variable pressure fluid supplies pump fluid at the desired flow rate. The variable pressure fluid supplies can be pneumatically driven.
摘要翻译：精密流量控制器能够提供小于100微升/分钟的流量，并以规定的方式改变流速，既可预测又可再现，其中流量的精度和精度小于流量的5％。多个可变压力流体通过单个出口泵送流体。流量计测量流量，并且控制器将流量与所需流量进行比较，并且如果需要，调整多个可变压力流体供应，使得可变压力流体以期望的流速供应泵流体。可变压力流体供应可以气动驱动。

7. 发明授权

US07102314B2 Brushless motor control apparatus having overheat protecting function 有权
标题翻译：具有过热保护功能的无刷电机控制装置
公开(公告)号：US07102314B2
公开(公告)日：2006-09-05
申请号：US11053030
申请日：2005-02-08
申请人： Yoshitaka Hayashi
发明人： Yoshitaka Hayashi
IPC分类号： G05B24/04
CPC分类号： H02P21/06 , H02P29/02
摘要： A brushless motor control apparatus detects a phase current flowing in a brushless motor, converts the phase current to a vector current including a d-axis current of a magnetic flux direction component and a q-axis current of a torque direction component orthogonal to the d-axis current, calculates a vector voltage instruction value based on differences between a vector current and a vector current instruction value, calculates a phase voltage instruction value and controls rotation of the brushless motor based on the phase voltage instruction value. The apparatus further calculates electric power produced in the brushless motor and protects the brushless motor based on the magnitude of electric power.
摘要翻译：无刷电动机控制装置检测在无刷电动机中流动的相电流，将相电流转换为与d相正交的转矩方向分量的磁通方向分量d轴电流和q轴电流的矢量电流轴电流根据矢量电流与矢量电流指令值之差计算矢量电压指令值，根据相电压指令值计算相电压指令值，控制无刷电动机的转速。该装置进一步计算在无刷电动机中产生的电力，并且基于电力的大小来保护无刷电动机。

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