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1. 发明授权

US11336070B2 Conductively-cooled slab laser 有权
公开(公告)号：US11336070B2
公开(公告)日：2022-05-17
申请号：US16838564
申请日：2020-04-02
申请人： Coherent, Inc.
发明人： Eric R. Mueller , Vernon A. Seguin , Christian Shackleton
IPC分类号： H01S3/041 , H01S3/038 , H01S3/03 , H01S3/223 , H01S3/04
摘要： A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include fluid coolant channels. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.

2. 发明授权

US11289870B2 Method and system for generating tunable ultrafast optical pulses 有权
公开(公告)号：US11289870B2
公开(公告)日：2022-03-29
申请号：US16784552
申请日：2020-02-07
申请人： INSTITUT NATIONAL DE LA RECHERCHE SCIENTIFIQUE
发明人： Riccardo Piccoli , Bruno E. Schmidt , Luca Razzari , Younggyun Jeong , Roberto Morandotti
IPC分类号： H01S3/00 , G02F1/35 , H01S3/03 , H01S3/30 , G02B27/14 , G02F1/355 , G02F1/365
摘要： A system and a method for generating tunable ultrafast optical pulses, the method comprising spectral broadening of a laser input beam by propagating the laser input beam in a nonlinear medium of a third-order nonlinear susceptibility χ(3), yielding an output laser spectrum; and one of: i) selecting at least one portion of the output laser spectrum, yielding an output pulse different than the input pulse and centered at a different frequency; ii) temporal compensation and spatial spreading of spectral components of the output laser spectrum; selecting two pulses at two different frequencies; and nonlinearly mixing the two pulses together in a first second-order nonlinear susceptibility χ(2) nonlinear crystal into a third pulse centered at a frequency which is a difference between the frequencies of the first two pulses; and iii) dividing output laser spectrum into a pump beam and a probe beam, directing a pump pulse to a third second-order nonlinear crystal for THz radiation generation; and directing a probe pulse to a third second-order nonlinear crystal for THz radiation reconstruction.

3. 发明授权

US11128097B2 Light source apparatus 有权
公开(公告)号：US11128097B2
公开(公告)日：2021-09-21
申请号：US16814418
申请日：2020-03-10
申请人： Samsung Electronics Co., Ltd.
发明人： Akihiro Komatsu , Tomoki Onishi
IPC分类号： H01S3/03 , H01S3/034 , H01S3/032 , H01S3/22 , H01J37/32 , H01S3/223 , H05H1/46
摘要： A light source apparatus includes an airtight container having a hemispherical or semielliptical first curved portion configured to receive laser light, a hemispherical or semielliptical second curved portion opposite to the first curved portion, and a cylindrical portion connecting the first curved portion and the second curved portion; assist gas sealed in the airtight container; and a light source configured to irradiate laser light to the first curved portion from outside of the airtight container.

4. 发明授权

US10965085B2 Laser chamber with metal damper member 有权
公开(公告)号：US10965085B2
公开(公告)日：2021-03-30
申请号：US15864017
申请日：2018-01-08
申请人： Gigaphoton Inc.
发明人： Hisakazu Katsuumi , Hiroaki Tsushima
IPC分类号： H01S3/032 , H01S3/097 , H01S3/0971 , G03F7/20 , H01S3/225 , H01S3/036 , H01S3/03 , H01L21/67
摘要： A laser chamber may include a first discharge electrode, a second discharge electrode, a fan making a laser gas flow through a discharge space between the first and second discharge electrodes, a first insulating member disposed on upstream side and downstream side of the first discharge electrode in the laser gas flow, a first metal damper member disposed on upstream side of the second discharge electrode and a second insulating member disposed on downstream side of the second discharge electrode in the laser gas flow, and a second metal damper member disposed on downstream side of the second insulating member in the laser gas flow. In a boundary portion between the second metal damper member and the second insulating member, a first discharge space side surface of the second metal damper member may be located further toward the opposite side to the discharge space than a second discharge space side surface of the second insulating member. A first corner formed by the first surface and a first side surface of the second metal damper member, the first side surface being on the side of the second insulating member, may be in contact with a second side surface of the second insulating member, the second side surface being on the side of the second metal damper member.

5. 发明申请

US20190288473A1 OPTICAL ELEMENT AND METHOD FOR MANUFACTURING OPTICAL ELEMENT 审中-公开
公开(公告)号：US20190288473A1
公开(公告)日：2019-09-19
申请号：US16427842
申请日：2019-05-31
申请人： NGK INSULATORS, LTD.
发明人： Kousuke NIWA , Jungo KONDOU , Shoichiro YAMAGUCHI , Keiichiro ASAI
IPC分类号： H01S3/03 , F21V8/00 , H01S3/00 , G02B6/122
摘要： An optical element includes an optical waveguide layer. The optical waveguide includes a periodic structure of grooves. The optical waveguide layer has a layer-thickness equal to or greater than 1.5 μm and is made of material selected from a group consisting of Ta2O5, Al2O3, LiNbO3, LiTaO3, AlN, GaN, SiC, and Yttrium aluminum garnet (YAG). (D/0.5Λ)≥2.5 is satisfied where D indicates the depth of groove; and Λ indicates the pitch of the arranged grooves in the periodic structure. The unit of Λ is identical to the unit of D.

6. 发明申请

US20190173258A1 LASER DEVICE 审中-公开
公开(公告)号：US20190173258A1
公开(公告)日：2019-06-06
申请号：US16266279
申请日：2019-02-04
申请人： Gigaphoton Inc.
发明人： Hirotaka MIYAMOTO , Osamu WAKABAYASHI
IPC分类号： H01S3/08 , H01S3/03
摘要： Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.

7. 发明授权

US10211589B2 Laser apparatus and extreme ultraviolet light generation apparatus 有权
公开(公告)号：US10211589B2
公开(公告)日：2019-02-19
申请号：US15552730
申请日：2016-04-20
申请人： MITSUBISHI ELECTRIC CORPORATION
发明人： Kouji Funaoka , Masashi Naruse
IPC分类号： H01S3/03 , H01S3/02 , H01S3/00 , H01S3/034 , H01S3/041 , H01S3/223 , H01S3/23 , H05G2/00
摘要： Kinematic mounts have three points having zero degree of freedom, one degree of freedom, and two degrees of freedom, respectively. As viewed from a direction perpendicular to a plane containing the three points, an extension of an entrance optical axis of a laser beam to an amplifying apparatus or an extension of an exit optical axis from the amplifying apparatus is oriented to the point with the zero degree of freedom. A translational direction of the point with the one degree of freedom is oriented to the point with the zero degree of freedom. One of the extension of the entrance optical axis and the extension of the exist optical axis passes on a side closer to the point with the two degrees of freedom with respect to a side of the point with the one degree of freedom.

8. 发明授权

US10186825B2 Gas slab laser 有权
公开(公告)号：US10186825B2
公开(公告)日：2019-01-22
申请号：US15739735
申请日：2016-03-21
申请人： Soreq Nuclear Research Center
发明人： Yoav Sintov , Zeev Zalevski
IPC分类号： H01S3/03 , H01S3/038 , H01S3/223 , H01S3/097
摘要： A microwave excited gas slab laser comprising a waveguide wherein the electrodes are covered with multi-layered stripes either forming a photonic band-gap or having a refractive index lower than 1.

9. 发明申请

US20180254598A1 HIGH GAIN OPTICALLY PUMPED FAR INFRARED LASER 审中-公开
公开(公告)号：US20180254598A1
公开(公告)日：2018-09-06
申请号：US14586714
申请日：2014-12-30
申请人： TAE TECHNOLOGIES, INC.
发明人： Bihe Deng
IPC分类号： H01S3/094 , H01S3/08 , H01S3/03
CPC分类号： H01S3/094003 , H01S3/0315 , H01S3/08068 , H01S3/2232
摘要： A new optically pumped far infrared (FIR) laser with separate pump beam reflector and FIR output coupler is developed. The configuration of the new FIR laser greatly simplifies the tuning of the laser and enables the optimization of the pump beam absorption without affecting the laser alignment.

10. 发明申请

US20180034228A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开
公开(公告)号：US20180034228A1
公开(公告)日：2018-02-01
申请号：US15552730
申请日：2016-04-20
申请人： MITSUBISHI ELECTRIC CORPORATION
发明人： Kouji FUNAOKA , Masashi NARUSE
IPC分类号： H01S3/03 , H01S3/00 , H01S3/034 , H01S3/041 , H05G2/00 , H01S3/223
CPC分类号： H01S3/03 , H01S3/0071 , H01S3/02 , H01S3/034 , H01S3/041 , H01S3/2232 , H01S3/2366 , H05G2/008
摘要： Kinematic mounts have three points having zero degree of freedom, one degree of freedom, and two degrees of freedom, respectively. As viewed from a direction perpendicular to a plane containing the three points, an extension of an entrance optical axis of a laser beam to an amplifying apparatus or an extension of an exit optical axis from the amplifying apparatus is oriented to the point with the zero degree of freedom. A translational direction of the point with the one degree of freedom is oriented to the point with the zero degree of freedom. One of the extension of the entrance optical axis and the extension of the exist optical axis passes on a side closer to the point with the two degrees of freedom with respect to a side of the point with the one degree of freedom.

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