
基本信息:
- 专利标题: 晶体生长炉加热器和蓝宝石晶体生长炉
- 专利标题(英):Crystal growth furnace heater and sapphire crystal growth furnace
- 申请号:CN201110265812.5 申请日:2011-08-29
- 公开(公告)号:CN102345161A 公开(公告)日:2012-02-08
- 发明人: 盛建明 , 王平 , 胡董成 , 张雪平
- 申请人: 江苏同人电子有限公司
- 申请人地址: 江苏省镇江市句容市经济开发区福地路
- 专利权人: 江苏同人电子有限公司
- 当前专利权人: 江苏同人电子有限公司
- 当前专利权人地址: 江苏省镇江市句容市经济开发区福地路
- 代理机构: 北京市德恒律师事务所
- 代理人: 陆鑫; 高雪琴
- 主分类号: C30B15/14
- IPC分类号: C30B15/14 ; C30B29/20
The invention discloses a crystal growth furnace heater with a cylindrical shape. The heater comprises: a plurality of electrodes distributed annularly and arranged at one end of the cylinder; a connecting ring disposed at the other end of the cylinder; a tungsten wire mesh, one end of which is connected to each of the multiple electrodes, and the other end of which is connected to the connecting ring, thus forming a barrel cylinder. On the other hand, the invention provides a sapphire crystal growth furnace with the above heater. The heater of the invention employs a double-star loaded three-phase alternating-current power supply mode, and can improve the load balance. The tungsten wire mesh heating body can endow the heater with good uniformity, reliability and stability.