
基本信息:
- 专利标题: 一种镀膜设备及其镀膜方法
- 申请号:CN201611089968.1 申请日:2016-12-01
- 公开(公告)号:CN106435532B 公开(公告)日:2019-05-28
- 发明人: 蔡晓峰 , 席红安
- 申请人: 佛山市中国科学院上海硅酸盐研究所陶瓷研发中心
- 申请人地址: 广东省佛山市禅城区华宝南路13号佛山国家火炬创新创业园C座5楼
- 专利权人: 佛山市中国科学院上海硅酸盐研究所陶瓷研发中心
- 当前专利权人: 佛山中科产业技术研究院
- 当前专利权人地址: 广东省佛山市禅城区华宝南路13号佛山国家火炬创新创业园C座5楼
- 代理机构: 北京品源专利代理有限公司
- 代理人: 张海英; 林波
- 主分类号: C23C18/02
- IPC分类号: C23C18/02
The invention discloses film coating equipment. The film coating equipment comprises a heating device, a preparation device, a cooling device, a housing, a rack and a conveying mechanism, wherein the heating device, the preparation device and the cooling device are sequentially arranged in the housing; the rack is arranged at the bottom of the housing; the conveying mechanism comprises a first conveying mechanism, a second conveying mechanism and a third conveying mechanism, the first conveying mechanism is arranged in the heating device, the second conveying mechanism is arranged in the preparation device, and the third conveying mechanism is arranged in the cooling device; and the first conveying mechanism, the second conveying mechanism and the third conveying mechanism are sequentially connected and synchronously transmit. According to the film coating equipment disclosed by the invention, the problems of non-uniform film coating in large area, low utilization rate of plating solution, and the like in the prior art are solved through adopting fine atomizing nozzles which can be randomly distributed; and the whole equipment is linked through the conveying mechanism to achieve integration during a whole production process, thus the production efficiency is increased.
公开/授权文献:
- CN106435532A 一种镀膜设备及其镀膜方法 公开/授权日:2017-02-22