
基本信息:
- 专利标题: InP阻变存储材料的制备方法和应用
- 申请号:CN201611095501.8 申请日:2016-12-02
- 公开(公告)号:CN106601906B 公开(公告)日:2019-08-20
- 发明人: 赵鸿滨 , 屠海令 , 魏峰 , 杨志民 , 张国成
- 申请人: 北京有色金属研究总院
- 申请人地址: 北京市西城区新街口外大街2号
- 专利权人: 北京有色金属研究总院
- 当前专利权人: 有研工程技术研究院有限公司
- 当前专利权人地址: 北京市西城区新街口外大街2号
- 代理机构: 北京众合诚成知识产权代理有限公司
- 代理人: 朱琨
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; C23C14/34
The invention discloses a production method and application of an InP resistive random access memory material, and belongs to a microelectronic production technology field. The production method comprises steps that 1) a monocrystal InP wafer used as a target material is disposed in a pulse laser device cavity; 2) a substrate is disposed in the pulse laser device cavity, and an electrode is disposed on the surface of the substrate in a deposited manner; 3) the pulse laser device cavity is vacuumized; 4) the substrate is heated; 5) an InP film is deposited on the substrate by using a pulse laser deposition method; 6) the substrate provided with the InP film in a deposited manner is annealed under a vacuum condition at a temperature in a range from 600DEGC to 800 DEG C, and after cooling, the InP resistive random access memory material is acquired. The InP resistive random access memory material has a good storage characteristic, and the resistive random access memory produced based on the above mentioned material has advantages of wide memory window, long data hold time, and high durability.
公开/授权文献:
- CN106601906A InP阻变存储材料的制备方法和应用 公开/授权日:2017-04-26