
基本信息:
- 专利标题: 制作光电二极管的方法、光电二极管及光感应器
- 专利标题(英):Method for manufacturing photodiode, photodiode and optical inductor
- 申请号:CN201610025128.2 申请日:2016-01-14
- 公开(公告)号:CN106972076A 公开(公告)日:2017-07-21
- 发明人: 宋华 , 杨欢
- 申请人: 无锡华润上华半导体有限公司
- 申请人地址: 江苏省无锡市国家高新技术产业开发区新洲路8号
- 专利权人: 无锡华润上华半导体有限公司
- 当前专利权人: 无锡华润上华科技有限公司
- 当前专利权人地址: 江苏省无锡市国家高新技术产业开发区新洲路8号
- 代理机构: 广州华进联合专利商标代理有限公司
- 代理人: 邓云鹏
- 主分类号: H01L31/103
- IPC分类号: H01L31/103 ; H01L31/0232 ; H01L31/18 ; H01L27/06 ; H01L21/822 ; H01L21/311
The invention relates to a method for manufacturing a photodiode. The method includes the following steps: providing a semiconductor substrate and forming a photodiode PN junction in the semiconductor substrate, the photodiode PN junction and an active device in an analog circuit being formed synchronously; depositing to form a multi-layer structure on the semiconductor substrate; forming a window in the multi-layer structure, the window being arranged on the PN junction of the photodiode; and depositing silicon nitride and/or silicon dioxide on the window area surface to form a reflecting layer. In addition, also provided are a photodiode and an optical inductor. Under the circumstance that original device performance is kept unchanged in an existing semiconductor technology, the photodiode PN junction and the active device in the analog circuit are synchronously formed, the corrosion technology of the photodiode window is changed at the same time, the window area is additionally provided with the reflecting layer, and single-chip integration of the photodiode and the active device in the analog circuit on an arbitrary technology platform is realized. The technological process of integration of the photodiode and the analog circuit in the same chip is simple and is low in cost.
公开/授权文献:
- CN106972076B 制作光电二极管的方法、光电二极管及光感应器 公开/授权日:2018-10-12
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L31/00 | 对红外辐射、光、较短波长的电磁辐射,或微粒辐射敏感的,并且专门适用于把这样的辐射能转换为电能的,或者专门适用于通过这样的辐射进行电能控制的半导体器件;专门适用于制造或处理这些半导体器件或其部件的方法或设备;其零部件 |
--------H01L31/02 | .零部件 |
----------H01L31/10 | ..特点在于至少有一个电位跃变势垒或表面势垒的,例如光敏晶体管 |
------------H01L31/101 | ...对红外、可见或紫外辐射敏感的器件 |
--------------H01L31/102 | ....仅以一个势垒或面垒为特征的 |
----------------H01L31/103 | .....为PN单质结型势垒的 |