
基本信息:
- 专利标题: 一种接合材料、半导体装置及其制造方法
- 专利标题(英):Joint material, semiconductor device and manufacturing method of semiconductor device
- 申请号:CN201811630981.2 申请日:2018-12-28
- 公开(公告)号:CN109755208A 公开(公告)日:2019-05-14
- 发明人: 郎丰群 , 胡竣富 , 吴虹 , 王军鹤
- 申请人: 西安华为技术有限公司
- 申请人地址: 陕西省西安市高新区锦业路127号
- 专利权人: 西安华为技术有限公司
- 当前专利权人: 西安华为技术有限公司
- 当前专利权人地址: 陕西省西安市高新区锦业路127号
- 代理机构: 广州三环专利商标代理有限公司
- 代理人: 郝传鑫; 熊永强
- 主分类号: H01L23/488
- IPC分类号: H01L23/488 ; H01L25/16 ; H01L21/60
The embodiment of the invention provides a joint material. The joint material comprises a supporting layer and solder layers arranged on the opposite side surfaces of the supporting layer. The supporting layer comprises at least one of Cu metal, Ni metal, Ag metal, Ti metal, Zn metal and alloys of the Cu metal, the Ni metal, the Ag metal, the Ti metal, the Zn metal, the supporting layer is provided with a porous structure, and the solder layers comprise at least one of tin-based solder and indium-based solder. According to the joint material, solder of the solder layers and the metal or alloysof the supporting layer can react at the joint temperature to form a high melting point intermetallic compound with a melting point higher than the joint temperature, so that a high temperature resistant joint layer is obtained through lower joint temperature, and multiple reflux can be resisted; and the supporting structure is provided with the porous structure, and the porous structure of the supporting layer is retained in a joint layer to effectively buffer the internal stress and improve the joint reliability. The embodiment of the invention further provides a semiconductor device usingthe joint material to joint and a manufacturing method of the semiconductor device.
公开/授权文献:
- CN109755208B 一种接合材料、半导体装置及其制造方法 公开/授权日:2021-01-29
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/34 | .冷却装置;加热装置;通风装置或温度补偿装置 |
----------H01L23/488 | ..由焊接或黏结结构组成 |