
基本信息:
- 专利标题: 一种用于栅控脉冲行波管电子枪中的栅网及其制作工艺
- 专利标题(英):Grid used in grid-controlled pulse traveling wave tube electron gun and manufacturing process thereof
- 申请号:CN201711439142.8 申请日:2017-12-26
- 公开(公告)号:CN109961994A 公开(公告)日:2019-07-02
- 发明人: 吕琴丽 , 李帅 , 王树茂
- 申请人: 北京有色金属研究总院
- 申请人地址: 北京市西城区新街口外大街2号
- 专利权人: 北京有色金属研究总院
- 当前专利权人: 有研工程技术研究院有限公司
- 当前专利权人地址: 北京市西城区新街口外大街2号
- 代理机构: 北京北新智诚知识产权代理有限公司
- 代理人: 刘秀青
- 主分类号: H01J23/06
- IPC分类号: H01J23/06 ; H01J9/14
The invention discloses a grid used in a grid-controlled pulse traveling wave tube electron gun and a manufacturing process thereof. The grid includes a grid substrate made of molybdenum, a gradient functional layer formed on the grid substrate and a composite anti-grid electron emission film formed on the gradient functional layer. The gradient functional layer is prepared by Nb or Ta. The composite anti-grid electron emission film is prepared by using a high-melting point material having a work function of more than 4 eV. The manufacturing process includes the following steps: (1) performinghigh temperature vacuum degassing on the formed grid substrate of a molybdenum material at 700-1000 DEG C; (2) preparing the gradient functional layer on the grid substrate by using ion implantationand vacuum deposition coating; (3) preparing the composite anti-grid electron emission film on the gradient functional layer by using the ion implantation and vacuum deposition coating; and (4) performing high temperature heat treatment on the prepared grid. The grid of the invention can suppress grid electron emission of a grid-controlled pulse traveling wave tube and improve the working reliability and service life of the grid-controlled pulse traveling wave tube.
公开/授权文献:
- CN109961994B 一种用于栅控脉冲行波管电子枪中的栅网及其制作工艺 公开/授权日:2021-06-01