
基本信息:
- 专利标题: 一种新型栅控PIN结构GaN紫外探测器及其制备方法
- 专利标题(英):Novel GaN ultraviolet detector with grid-control PIN structure and preparation method of GaN ultraviolet detector
- 申请号:CN201910899567.X 申请日:2019-09-23
- 公开(公告)号:CN110660882A 公开(公告)日:2020-01-07
- 发明人: 仇志军 , 叶怀宇 , 张国旗
- 申请人: 深圳第三代半导体研究院
- 申请人地址: 广东省深圳市南山区西丽大学城学苑大道1088号台州楼
- 专利权人: 深圳第三代半导体研究院
- 当前专利权人: 南方科技大学
- 当前专利权人地址: 518000 广东省深圳市南山区桃源街道学苑大道1088号
- 代理机构: 北京中知法苑知识产权代理事务所
- 代理人: 阎冬; 李明
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/113 ; H01L31/105 ; H01L31/0224
The invention discloses a novel GaN ultraviolet detector with a grid-control PIN structure and a preparation method of the novel GaN ultraviolet detector. The preparation method comprises the following steps that: 1) a GaN buffer layer and an n-type doped GaN layer are sequentially grown on a substrate; 2) an intrinsically doped GaN layer is grown on the n-type doped GaN layer; 3) a p-type doped AlGaN layer is grown on the intrinsically doped GaN layer; 4) an epitaxial layer material is selectively etched, so that an etched mesa and double steps can be formed; 5) a passivation layer is deposited on the mesa and the double steps; and 6) the passivation layer is etched, so that electrode holes can be formed, and metal electrodes are deposited. According to the novel GaN ultraviolet detectorwith the grid-control PIN structure of the invention, based on the PIN structure, rapid, accurate and high-sensitivity ultraviolet light detection can be realized; the influence of two-dimensional electron gas at a AlGaN/GaN heterogeneous interface can be suppressed or eliminated through a voltage applied by a side grid structure; and therefore, the detector is an ideal PIN structure detector. Theperformance such as the response speed, detection rate and sensitivity of the detector can be improved.
公开/授权文献:
- CN110660882B 一种栅控PIN结构GaN紫外探测器及其制备方法 公开/授权日:2021-05-04