
基本信息:
- 专利标题: 缺陷检查用拍摄装置、缺陷检查系统以及膜制造装置
- 专利标题(英):Defect detecting test is with shooing device, defect detecting test system and film production device
- 申请号:CN201621361034.4 申请日:2016-12-12
- 公开(公告)号:CN206583816U 公开(公告)日:2017-10-24
- 发明人: 尾崎麻耶
- 申请人: 住友化学株式会社
- 申请人地址: 日本国东京都
- 专利权人: 住友化学株式会社
- 当前专利权人: 住友化学株式会社
- 当前专利权人地址: 日本国东京都
- 代理机构: 中科专利商标代理有限责任公司
- 代理人: 蒋亭
- 优先权: 2015-244553 2015.12.15 JP
- 主分类号: G01N21/896
- IPC分类号: G01N21/896 ; G01N21/89
The utility model provides a defect detecting test is with shooing device, defect detecting test system and film production device can integrate different inspection series, reduces the serial number of inspection. The utility model discloses a related shooting device for the defect detecting test of an embodiment is used for having the defect detecting test of the membrane of polarization characteristic, possesses: light is shone in light struck mechanism, its photographing area to the membrane, shoot the mechanism, its photographing area with the membrane shoot for the twodimensional diagram like, first polarization wave filter, it disposes between the photographing area of light struck mechanism and membrane with the mode with filming quadrature polarization, transport mechanism, its for light struck mechanism, take mechanism and polarization wave filter and relatively carry the membrane along transport orientation Y, photographing area includes is cut apart the photographing area and the 2nd photographing area that in the transport orientation, first polarization wave filter disposes between a light struck mechanism and a photographing area.
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N21/00 | 利用光学手段,即利用红外光、可见光或紫外光来测试或分析材料 |
--------G01N21/01 | .便于进行光学测试的装置或仪器 |
----------G01N21/88 | ..测试瑕疵、缺陷或污点的存在 |
------------G01N21/89 | ...在移动的材料中,例如,纸张、织物中 |
--------------G01N21/892 | ....特征在于待测的瑕疵、缺陷或物品的特点 |
----------------G01N21/896 | .....透明材料之中或表面的光学缺陷,例如形变、表面瑕疵 |