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    • 93. 发明授权
    • Angular rate sensor and electronic device
    • 角速率传感器和电子设备
    • US07913560B2
    • 2011-03-29
    • US12050228
    • 2008-03-18
    • Takamitsu HiguchiYasuhiro Ono
    • Takamitsu HiguchiYasuhiro Ono
    • G01P9/04G01C19/56
    • G01C19/5621
    • An angular rate sensor includes a piezoelectric vibration device; and a detection section, wherein the piezoelectric vibration device includes a vibration section having a first support section, four (first-fourth) cantilever sections supported by the first support section, and a second support section that supports the first support section. The detection section is formed above the vibration section for detecting an angular rate of rotation applied to the vibration section, and has a lower electrode, a piezoelectric layer formed above the lower electrode, and an upper electrode formed above the piezoelectric layer.
    • 角速度传感器包括压电振动装置; 以及检测部,其中所述压电振动装置包括具有第一支撑部的振动部,由所述第一支撑部支撑的四个(第一〜第四)悬臂部以及支撑所述第一支撑部的第二支撑部。 检测部形成在用于检测施加到振动部的旋转角速度的振动部的上方,并且具有下电极,形成在下电极上的压电层和形成在压电层上的上电极。
    • 95. 发明授权
    • Method of manufacturing a piezoelectric element
    • 制造压电元件的方法
    • US07841056B2
    • 2010-11-30
    • US12192161
    • 2008-08-15
    • Akihito MatsumotoTakamitsu HiguchiYasuhiro Ono
    • Akihito MatsumotoTakamitsu HiguchiYasuhiro Ono
    • H04R17/00H01L41/053
    • B41J2/161B41J2/1628B41J2/1629B41J2/1631B41J2/1634B41J2/1639B41J2/1642B41J2/1646H01L41/047H01L41/0973H01L41/314H01L41/332Y10T29/42Y10T29/49126
    • A method of manufacturing a piezoelectric element includes: forming a first base substrate having an element to be transferred; forming a second base substrate; and transferring the element to the second base substrate. The forming of the element includes forming a first electrode above a first substrate, forming a piezoelectric layer above the first electrode, forming a second electrode above the piezoelectric layer, crystallizing the piezoelectric layer, forming a dielectric layer above the second electrode, and etching the dielectric layer such that part of the second electrode is exposed and the dielectric layer has a protrusion upwardly protruding relative to the second electrode. Forming the second base substrate includes forming a third electrode above a second substrate. The transferring includes bonding the element and the second base substrate such that the second substrate is in contact with the protrusion and the second electrode is in contact with the third electrode.
    • 一种制造压电元件的方法包括:形成具有待转印元件的第一基底基板; 形成第二基底; 并将元件转移到第二基底基板。 元件的形成包括在第一基板上形成第一电极,在第一电极之上形成压电层,在压电层上方形成第二电极,使压电层结晶,在第二电极上形成电介质层, 电介质层,使得第二电极的一部分被暴露,并且电介质层具有相对于第二电极向上突出的突起。 形成第二基底基底包括在第二基底上形成第三电极。 转印包括将元件和第二基底基板接合,使得第二基板与突起接触并且第二电极与第三电极接触。