专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

91. 发明申请

US20060020371A1 Methods and apparatus for manipulation and/or detection of biological samples and other objects 审中-公开
标题翻译：用于操作和/或检测生物样品和其他物体的方法和装置
公开(公告)号：US20060020371A1
公开(公告)日：2006-01-26
申请号：US11105322
申请日：2005-04-13
申请人： Donhee Ham , Robert Westervelt , Thomas Hunt , Yong Liu , Hakho Lee
发明人： Donhee Ham , Robert Westervelt , Thomas Hunt , Yong Liu , Hakho Lee
IPC分类号： G05B99/00
CPC分类号： G01R33/302 , B01L3/502761 , B01L2200/0668 , B01L2200/147 , B01L2300/0816 , B01L2300/0819 , B01L2300/0877 , B01L2300/1822 , B01L2300/1827 , B01L2400/043 , G01N15/1031 , G01N24/08 , G01N24/10 , G01R33/307 , G01R33/34092 , G01R33/3415 , G01R33/465 , G01R33/4808 , G01R33/5604
摘要： Methods and apparatus for manipulation, detection, imaging, characterization, sorting and/or assembly of biological or other materials, involving an integration of CMOS or other semiconductor-based technology and microfluidics. In one implementation, various components relating to the generation of electric and/or magnetic fields are implemented on an IC chip that is fabricated using standard protocols. The generated electric and/or magnetic fields are used to manipulate and/or detect one or more dielectric and/or magnetic particles and distinguish different types of particles. A microfluidic system is fabricated either directly on top of the IC chip, or as a separate entity that is then appropriately bonded to the IC chip, to facilitate the introduction and removal of cells in a biocompatible environment, or other particles/objects of interest suspended in a fluid. The patterned electric and/or magnetic fields generated by the IC chip can trap and move biological cells or other objects inside the microfluidic system. Electric and/or magnetic field generating components also may be controlled using signals of various frequencies so as to detect one or more cells, particles or objects of interest, and even the type of particle or object of interest, by measuring resonance characteristics associated with interactions between samples and one or more of the field-generating devices. Such systems may be employed in a variety of biological and medical related applications, including cell sorting and tissue assembly.
摘要翻译：用于操作，检测，成像，表征，分选和/或组装生物或其他材料的方法和装置，涉及CMOS或其他基于半导体的技术和微流体的集成。在一个实现中，与使用标准协议制造的IC芯片上实现与电场和/或磁场的产生有关的各种组件。产生的电场和/或磁场用于操纵和/或检测一个或多个电介质和/或磁性颗粒并区分不同类型的颗粒。微流体系统直接制造在IC芯片的顶部上，或者作为独立的实体，然后适当地结合到IC芯片，以便于在生物相容性环境或其他感兴趣的其它颗粒/物体中引入和去除细胞悬浮在流体中。由IC芯片产生的图案化电场和/或磁场可以捕获并移动微流体系统内的生物细胞或其它物体。可以使用各种频率的信号来控制电场和/或磁场产生组件，以便通过测量与相互作用相关联的共振特性来检测一个或多个感兴趣的细胞，颗粒或感兴趣的物体，甚至是感兴趣的粒子或物体的类型样本和一个或多个场产生装置之间。这样的系统可以用于各种生物和医学相关应用，包括细胞分选和组织组装。

92. 发明申请

US20050281207A1 ZigBee network device for separately determining network parameter and assigning addresses, and address assignment method thereof 有权
标题翻译：用于分别确定网络参数和分配地址的ZigBee网络设备及其地址分配方法
公开(公告)号：US20050281207A1
公开(公告)日：2005-12-22
申请号：US11151651
申请日：2005-06-14
申请人： Myung-jong Lee , Yong Liu , Xu-hui Hu
发明人： Myung-jong Lee , Yong Liu , Xu-hui Hu
IPC分类号： H04L12/28 , H04L12/56 , H04L29/12
CPC分类号： H04W8/26 , H04L29/12254 , H04L29/12801 , H04L45/04 , H04L45/46 , H04L61/2038 , H04L61/6004
摘要： A ZigBee network device assigns addresses to its child devices. The ZigBee network device includes a communication section that connects the ZigBee network device to other devices and which communicates with the other devices; a parameter determination section that determines at least one network parameter; a calculation section that calculates addresses for child devices of the ZigBee network device based on a determined network parameter, where each of the child devices is connected to the ZigBee network device via the communication section; and a controller that assigns addresses to the child devices of the ZigBee network device. At least one determined network parameter is at least one of Cm, which indicates a maximum number of the child devices of the ZigBee network device, and Rm, which indicates a maximum number of the child devices of the ZigBee network device which have routing capabilities.
摘要翻译： ZigBee网络设备为其子设备分配地址。 ZigBee网络设备包括将ZigBee网络设备连接到其他设备并与其他设备进行通信的通信部分; 确定至少一个网络参数的参数确定部分; 计算部，其基于确定的网络参数来计算ZigBee网络设备的子设备的地址，其中每个子设备经由通信部分连接到ZigBee网络设备; 以及向ZigBee网络设备的子设备分配地址的控制器。至少一个确定的网络参数是指示ZigBee网络设备的最大数量的子设备的Cm和Rm中的至少一个，其指示具有路由功能的ZigBee网络设备的最大数量的子设备。

93. 发明授权

US06969974B1 Battery fuel gauge using safety circuit 有权
标题翻译：电池电量计使用安全电路
公开(公告)号：US06969974B1
公开(公告)日：2005-11-29
申请号：US10980553
申请日：2004-11-03
申请人： Yong Liu
发明人： Yong Liu
IPC分类号： G01R31/36 , G08B21/00 , H02J7/00
CPC分类号： G01R19/16542 , Y10S320/21
摘要： A safety circuit for a rechargeable cell is employed as a simple, low cost, fuel gauging circuit. The safety circuit includes an undervoltage circuit having a reference voltage. The input of the safety circuit is selectively coupled between the voltage of a rechargeable cell and a scaled down voltage of the rechargeable cell. The scaled down voltage corresponds to a predetermined capacity threshold. A user or electronic device actuates a switch that couples the scaled down voltage to the safety circuit. The safety circuit compares this scaled down voltage to the reference voltage of it's under voltage circuit. If the scaled down voltage is above the reference voltage, the safety circuit causes a transistor coupled serially with the cell to be on, or in a conductive state, so as to allow current to flow through a capacity indicator like a LED. If the scaled down voltage is below the reference voltage the safety circuit causes the transistor to enter a high impedance state, thereby turning the indicator off. The state of the indicator provides the user with an approximation of the cell's remaining capacity. In a battery pack, two or more safety circuits with different reference voltages may be employed for increased resolution.
摘要翻译：用作可再充电电池的安全电路被用作简单的，低成本的燃料计量电路。安全电路包括具有参考电压的欠压电路。安全电路的输入选择性地耦合在可再充电电池的电压和可再充电电池的按比例缩小电压之间。按比例缩小的电压对应于预定容量阈值。用户或电子设备致动将缩放电压耦合到安全电路的开关。安全电路将此缩小电压与其欠压电路的参考电压进行比较。如果按比例缩小的电压高于参考电压，则安全电路使得与单元串联耦合的晶体管导通或处于导通状态，以允许电流流过诸如LED的容量指示器。如果按比例缩小的电压低于参考电压，则安全电路使晶体管进入高阻态，从而关闭指示器。指示器的状态为用户提供了小区剩余容量的近似值。在电池组中，可以使用具有不同参考电压的两个或更多个安全电路来提高分辨率。

94. 发明申请

US20050116043A1 Hand-supportable imaging-based bar code symbol reader employing a CMOS-type image sensing array with a band-pass optical filter subsystem integrated within the hand-supportable housing thereof 有权
标题翻译：采用CMOS型图像感测阵列的手持支持成像的条形码符号读取器，其具有集成在其可手持外壳内的带通光学滤波器子系统
公开(公告)号：US20050116043A1
公开(公告)日：2005-06-02
申请号：US10894412
申请日：2004-07-19
申请人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
发明人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
IPC分类号： G06K7/10 , G06K9/22
CPC分类号： G06K7/10851 , G06K7/10732 , G06K7/10881
摘要： A hand-supportable digital imaging-based bar code symbol reading device comprises: an automatic object presence and range detection subsystem; an area-type image formation and detection subsystem; a LED-based illumination subsystem having narrow-area and wide area illumination modes of operation; an automatic light exposure measurement and illumination control subsystem; an image capturing and buffering subsystem; a image-processing bar code symbol reading subsystem; an input/output subsystem; and a system control subsystem for controlling each of the above-described subsystems. A narrow-band transmission-type optical filter subsystem is integrated within the hand-supportable, so that only light transmitted from the LED-based illumination subsystem and reflected from the illuminated object is transmitted through the narrow-band transmission-type optical filter subsystem and detected by the CMOS area-type image sensing array, while all other components of ambient light are substantially rejected.
摘要翻译：一种支持手持数字成像的条形码符号读取装置，包括：自动对象存在和范围检测子系统; 区域型图像形成和检测子系统; 具有窄区域和广域照明操作模式的基于LED的照明子系统; 自动曝光测量和照明控制子系统; 图像捕获和缓冲子系统; 图像处理条形码符号读取子系统; 输入/输出子系统; 以及用于控制上述每个子系统的系统控制子系统。窄带传输型光学滤波器子系统被集成在手持式中，使得只有从基于LED的照明子系统发射的并且被照射物体反射的光通过窄带透射型光学滤波器子系统传输，通过CMOS区域型图像感测阵列检测，而环境光的所有其他分量基本上被拒绝。

95. 发明申请

US20050103862A1 HAND-SUPPORTABLE IMAGING-BASED BAR CODE SYMBOL READER EMPLOYING AUTOMATIC OBJECT PRESENCE AND RANGE DETECTION TO CONTROL THE GENERATION OF NEAR-FIELD AND FAR-FIELD WIDE-AREA ILLUMINATION DURING BAR CODE SYMBOL IMAGING OPERATIONS 有权
标题翻译：手持式成像基于条形码的符号读取器使用自动对象存在和范围检测来控制条形码符号成像操作期间的近场和远场广域照明的生成
公开(公告)号：US20050103862A1
公开(公告)日：2005-05-19
申请号：US10894476
申请日：2004-07-16
申请人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
发明人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
IPC分类号： G06K7/10
CPC分类号： G06K7/10851 , G06K7/10732 , G06K7/10881
摘要： A hand-supportable Digital Imaging-Based Bar Code Symbol Reading Device comprises: an IR-based Object Presence and Range Detection Subsystem; a Multi-Mode Area-type Image Formation and Detection Subsystem having narrow-area and wide area image capture modes of operation; a Multi-Mode LED-based Illumination Subsystem having narrow-area and wide area illumination modes of operation; an Automatic Light Exposure Measurement and Illumination Control Subsystem; an Image Capturing and Buffering Subsystem; a Multi-Mode Image-Processing Bar code symbol reading subsystem; an input/output subsystem; a manually-activatable trigger switch; and a system control subsystem integrated with each of the above-described subsystems. The hand-supportable digital imaging-based bar code reading device employs automatic object presence and range detection to control the generation of near-field and far-field wide-area illumination during bar code symbol imaging operations.
摘要翻译：一种支持手持数字成像的条形码符号读取装置，包括：基于IR的对象存在和范围检测子系统; 具有窄区域和广域图像捕获模式的多模式区域型图像形成和检测子系统; 具有窄区域和广域照明操作模式的基于多模LED的照明子系统; 自动曝光测量和照明控制子系统; 图像捕获和缓冲子系统; 多模式图像处理条形码符号读取子系统; 输入/输出子系统; 一个手动启动的触发开关; 以及与上述每个子系统集成的系统控制子系统。基于手持式数字成像的条形码读取装置采用自动对象存在和范围检测来控制条形码符号成像操作期间的近场和远场广域照明的产生。

96. 发明申请

US20050103859A1 Digital imaging-based bar code symbol reader employing an LED-based illumination subsystem driven by an automatic light exposure measurement and control subsystem responsive to control activation signals generated by an area-type image sensing array and an automatic object presence detection subsystem during object illumination and image capture operations 失效
标题翻译：基于数字成像的条形码符号读取器，其采用由自动曝光测量和控制子系统驱动的基于LED的照明子系统，其响应于在对象照明期间由区域型图像感测阵列和自动对象存在检测子系统产生的控制激活信号，以及图像捕获操作
公开(公告)号：US20050103859A1
公开(公告)日：2005-05-19
申请号：US10901429
申请日：2004-07-28
申请人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
发明人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
IPC分类号： G06K7/10 , G02B26/08
CPC分类号： G06K7/10851 , G06K7/10732 , G06K7/10881
摘要： A digital imaging-based bar code symbol reading device comprises: an automatic object presence detection subsystem; an image formation and detection subsystem employing a CMOS area-type image sensing array; an LED-based illumination subsystem; an automatic light exposure measurement and illumination control subsystem; an image capturing and buffering subsystem; an image-processing bar code symbol reading subsystem; an input/output subsystem; and a system control subsystem for controlling the subsystems. The LED-based illumination subsystem is automatically driven by the automatic light exposure measurement and control subsystem responsive to the generation of control activation signals by the image sensing array and the automatic object presence detection subsystem during object illumination and image capture operations.
摘要翻译：一种基于数字成像的条形码符号读取装置，包括：自动对象存在检测子系统; 采用CMOS区域型图像感测阵列的图像形成和检测子系统; 一个基于LED的照明子系统; 自动曝光测量和照明控制子系统; 图像捕获和缓冲子系统; 图像处理条码符号读取子系统; 输入/输出子系统; 以及用于控制子系统的系统控制子系统。响应于在物体照明和图像捕获操作期间由图像感测阵列和自动对象存在检测子系统产生控制激活信号，自动曝光测量和控制子系统自动驱动基于LED的照明子系统。

97. 发明申请

US20050103857A1 Hand-supportable multi-mode imaging-based bar code symbol reader employing an automatic illumination and exposure control subsystem that automatically controls the operation of an LED-based multi-mode illumination subsystem so that detected objects are sufficiently illuminated and good quality digital images of detected objects are formed and detected by a multi-mode image formation and detection subsystem during illumination and imaging operations 有权
标题翻译：基于手持式多模式成像的条形码符号读取器，其采用自动照明和曝光控制子系统，其自动控制基于LED的多模式照明子系统的操作，使得检测到的物体被充分照射，并且检测到高质量的数字图像在照明和成像操作期间，多模式图像形成和检测子系统形成和检测物体
公开(公告)号：US20050103857A1
公开(公告)日：2005-05-19
申请号：US10895271
申请日：2004-07-20
申请人： Xiaoxun Zhu , Yong Liu , Ka Man Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Harry Knowles
发明人： Xiaoxun Zhu , Yong Liu , Ka Man Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Spatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Harry Knowles
IPC分类号： G06K7/10 , G02B26/08
CPC分类号： G06K7/10851 , G06K7/10732 , G06K7/10881
摘要： A hand-supportable digital imaging-based bar code symbol reading device comprises: an automatic object presence detection subsystem; a multi-mode area-type image formation and detection subsystem having a field of view (FOV), and narrow-area and wide area image capture modes of operation; a multi-mode LED-based illumination subsystem having narrow-area and wide area illumination modes of operation; an automatic light exposure measurement and illumination control subsystem; an image capturing and buffering subsystem; an image-processing bar code symbol reading subsystem; an input/output subsystem; and a system control subsystem. In the digital imaging-based bar code reading device of the present invention, the automatic illumination and exposure control subsystem continuously measures the light exposure incident upon a central portion of the FOV, and automatically controls the operation of the LED-based multi-mode illumination subsystem so that the detected object is sufficiently illuminated and the multi-mode image formation and detection subsystem enabled to form and detect good quality digital images of the automatically detected object during illumination and imaging operations.
摘要翻译：一种支持手持式数字成像的条形码符号读取装置，包括：自动对象存在检测子系统; 具有视场（FOV）的多模式区域型图像形成和检测子系统，以及窄区域和广域图像捕获操作模式; 具有窄区域和广域照明操作模式的多模式的基于LED的照明子系统; 自动曝光测量和照明控制子系统; 图像捕获和缓冲子系统; 图像处理条码符号读取子系统; 输入/输出子系统; 和系统控制子系统。在本发明的基于数字成像的条形码读取装置中，自动照明和曝光控制子系统连续地测量入射到FOV的中心部分的曝光，并且自动控制基于LED的多模式照明子系统，使得检测到的物体被充分照明，并且多模式图像形成和检测子系统能够在照明和成像操作期间形成和检测自动检测到的物体的高质量数字图像。

98. 发明申请

US20050103855A1 HAND-SUPPORTABLE SEMI-AUTOMATIC IMAGING-BASED BAR CODE READING SYSTEM WHEREIN AN LED-BASED ILLUMINATION SUBSYSTEM AUTOMATICALLY ILLUMINATES A DETECTED TARGET OBJECT IN A NARROW-AREA FIELD OF ILLUMINATION, AND ILLUMINATES THE DETECTED TARGET OBJECT IN A WIDE-AREA FIELD OF ILLUMINATION UPON MANUAL ACTIVATION OF A TRIGGER SWITCH 失效
标题翻译：手持式半自动成像基于条形码读取系统，其中基于LED的照明子系统自动照明是一个检测到的目标对象，在一个窄幅区域的照明和照明被检测的目标对象在一个大区域的照明领域手动启动触发开关
公开(公告)号：US20050103855A1
公开(公告)日：2005-05-19
申请号：US10893797
申请日：2004-07-16
申请人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Sqatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
发明人： Xiaoxun Zhu , Yong Liu , Ka Au , Rui Hou , Hongpeng Yu , Xi Tao , Liang Liu , Wenhua Zhang , Anatoly Kotlarsky , Sankar Ghosh , Michael Schnee , Pasqual Sqatafore , Thomas Amundsen , Sung Byun , Mark Schmidt , Garrett Russell , John Bonanno , C. Knowles
IPC分类号： G06K7/10 , G02B26/08 , G06K9/22
CPC分类号： G06K7/10851 , G06K7/10732 , G06K7/10881
摘要： A hand-supportable semi-automatic Digital Imaging-Based Bar Code Symbol Reading Device comprises: a Multi-Mode Area-type Image Formation and Detection (IFD) Subsystem having narrow-area and wide area image capture modes of operation; a Multi-Mode LED-based Illumination Subsystem having narrow-area and wide area illumination modes of operation; an Image Capturing and Buffering Subsystem; a Multi-Mode Image-Processing Bar Code Symbol Reading Subsystem; a manually-activatable trigger switch. The LED-based illumination subsystem automatically illuminates a target object in a narrow-area field of illumination while the multi-mode IFD subsystem captures a narrow-area image of an aligned 1D bar code symbol thereon, and when manually switched into a wide-area illumination and image capture mode by the trigger switch, the LED-based illumination subsystem illuminates the target object in a wide-area field of illumination, while the multi-mode IFD subsystem captures a wide-area image of randomly-oriented 1D or 2D code symbols thereon.
摘要翻译：一种手持式半自动数字成像条形码符号读取装置，包括：具有窄区域和广域图像捕获模式的多模式区域型图像形成和检测（IFD）子系统; 具有窄区域和广域照明操作模式的基于多模LED的照明子系统; 图像捕获和缓冲子系统; 多模式图像处理条形码符号读取子系统; 一个手动启动的触发开关。基于LED的照明子系统在狭窄的照明领域中自动照亮目标物体，而多模式IFD子系统捕获其上对齐的1D条形码符号的窄区域图像，并且当手动切换到广域照明和图像捕获模式，基于LED的照明子系统在广域照明领域照亮目标物体，而多模式IFD子系统捕获随机取向的一维或二维码的广域图像符号。

99. 发明申请

US20050047428A1 System and method for selecting beacon transmission starting point in communication system 有权
标题翻译：通信系统中选择信标传输起点的系统和方法
公开(公告)号：US20050047428A1
公开(公告)日：2005-03-03
申请号：US10898234
申请日：2004-07-26
申请人： Jong-hun Park , Yong Liu , Myung-jong Lee , Xu-hui Hu
发明人： Jong-hun Park , Yong Liu , Myung-jong Lee , Xu-hui Hu
IPC分类号： H04B7/26 , H04L12/28 , H04W74/00 , H04W88/04
CPC分类号： H04W74/006 , H04W88/04
摘要： A system and method for selecting a starting point to transmit a beacon (BTSP) from a coordinator and a first node in a communication system. The communication system includes the coordinator, a first node group with at least one node having the first node which receives the beacon from the coordinator, and a second node group with at least one node having a second node which receives the beacon from the first node. The coordinator determines a beacon window size for the beacon transmission, selects the BTSP within the beacon window size, and transmits at the BTSP, the beacon containing information on the beacon window size and the BTSP. The first node selects its BTSP within the beacon window size so as not to overlap with the BTSP of the received beacon.
摘要翻译：一种用于从通信系统中的协调器和第一节点选择发送信标（BTSP）的起始点的系统和方法。所述通信系统包括所述协调器，具有至少一个节点的第一节点组，所述节点具有从所述协调器接收所述信标的所述第一节点，以及具有至少一个节点的第二节点组，所述第二节点具有从所述第一节点接收所述信标的第二节点。协调器确定信标发送的信标窗口大小，在信标窗口大小内选择BTSP，并在BTSP发送包含信标窗口大小和BTSP信息的信标。第一节点在信标窗口大小内选择其BTSP，以便不与接收的信标的BTSP重叠。

100. 发明授权

US06768084B2 Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile 失效
标题翻译：先进的快速热处理（RTP），使用具有轴对称和径向可调谐热辐射轮廓的线性移动加热组件
公开(公告)号：US06768084B2
公开(公告)日：2004-07-27
申请号：US10261907
申请日：2002-09-30
申请人： Yong Liu , Jeff P. Hebb
发明人： Yong Liu , Jeff P. Hebb
IPC分类号： F27B514
CPC分类号： H01L21/67248 , F27B17/0025 , F27D11/00 , F27D19/00 , F27D21/0014 , H01L21/67109 , H01L21/67115
摘要： A system and a method for thermally processing a semiconductor substrate are disclosed which provide a heater chamber and a process chamber environmentally isolated from one another by a thermally-transparent plate. A heater assembly situated within the heater chamber comprises one or more quasi-continuous heater elements, and is operable to linearly translate with respect to the process chamber by a linear translation assembly. Thermal radiation is transmitted from the heater elements through the plate toward a substrate situated within the process chamber, wherein one or more temperature sensors measure a temperature associated with one or more respective locations on the substrate. A controller coupled to the one or more temperature sensors, heater assembly, and linear translation assembly controls the thermal radiation emitted by the heater assembly, as well as a distance between the heater assembly and the substrate, wherein the control is based on the one or more measured temperatures.
摘要翻译：公开了一种用于热处理半导体衬底的系统和方法，其提供通过热透明板彼此隔离的加热室和处理室。位于加热器室内的加热器组件包括一个或多个准连续加热器元件，并且可操作以通过线性平移组件相对于处理室线性平移。热辐射从加热器元件通过板传送到位于处理室内的衬底，其中一个或多个温度传感器测量与衬底上的一个或多个相应位置相关联的温度。耦合到一个或多个温度传感器，加热器组件和线性平移组件的控制器控制由加热器组件发射的热辐射，以及加热器组件和衬底之间的距离，其中控制基于一个或多个更多的测量温度。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式