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    • 98. 发明公开
    • Method and apparatus for depositing metal fine lines on a substrate
    • Vorrichtung und Verfahren um feine Metal-linie auf einem Substrat abzulegen。
    • EP0637057A1
    • 1995-02-01
    • EP93480106.9
    • 1993-07-30
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONORSAY PHYSICS
    • Corbin, AntoineFoulu, JacquesDemoncy, PhilippeSudraud, Pierre
    • H01L21/00B23K3/06
    • H01L21/67011B23K3/02B23K3/0615B23K3/0692G03F1/74H01L21/76838H01L21/76892H01L31/022425H05K3/1241Y02E10/50Y10S977/857
    • This invention is concerned with the method and apparatus for forming a desired pattern of a material of either the conductive or non conductive type on a great variety of substrates. It is based on the use of a pen which essentially consists of a refractory tip wetted with the material in the molten state. The pen (10) first consists of a pointed tungsten tip (11) attached, e.g. by micro welding, to the top of a V-shaped tungsten heater (12), forming an assembly (14). The tip and the heater top portion are roughened at the vicinity of the welding point (13). In turn, the extremities of the V-shaped heater are welded to the pins (16, 16') of a 3-lead TO-5 package base (15). The pen (10) is incorporated in an apparatus adapted to the direct writing technique. To that end, the pen is attached to a supporting device capable of movements in the X, Y and Z directions, while the substrate is placed on an X-Y stage for adequate X, Y and Z relative movements therebetween. The two pins of the pen are connected to a power supply to resistively heat the heater. When the welding point of the tip/heater assembly reaches the melting point temperature of the material to be deposited, it is dipped in a crucible containing the said material in the molten state. The welding point nucleates a minute drop of the liquid material thus forming a reservoir. A thin film of the liquid material flows from the reservoir and wets the whole tip surface. Finally, the wetted tip is gently brought into contact with the substrate and deposition of the material can take place, as soon as the substrate is adequately moved, to produce the said desired pattern.
    • 本发明涉及用于在各种基板上形成导电或非导电类型的材料的期望图案的方法和装置。 它基于使用笔,其基本上由在熔融状态下被材料润湿的耐火顶端组成。 笔(10)首先由附着的尖头钨尖(11)组成。 通过微焊接到V形钨加热器(12)的顶部,形成组件(14)。 尖端和加热器顶部在焊接点(13)附近被粗糙化。 依次将V形加热器的末端焊接到3引脚TO-5封装基座(15)的引脚(16,16')上。 笔(10)被并入适用于直写技术的装置中。 为此,将笔连接到能够在X,Y和Z方向上移动的支撑装置,同时将基板放置在X-Y台上以使它们之间有足够的X,Y和Z相对运动。 笔的两个引脚连接到电源以电阻加热加热器。 当尖端/加热器组件的焊接点达到要沉积的材料的熔点温度时,将其浸入含有熔融状态的所述材料的坩埚中。 焊接点使液滴物料滴下一小滴,从而形成储存器。 液体材料的薄膜从储存器流出并润湿整个尖端表面。 最后,一旦衬底被充分移动,润湿的尖端就轻轻地与衬底接触并且材料的沉积可以发生,以产生所需的图案。