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101. 发明申请

WO2010076894A1 EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：曝光装置，曝光方法和装置制造方法
公开(公告)号：WO2010076894A1
公开(公告)日：2010-07-08
申请号：PCT/JP2009/071914
申请日：2009-12-25
申请人： NIKON CORPORATION , SATO Shinji
发明人： SATO Shinji
IPC分类号： G03F7/20
CPC分类号： G03F7/70341 , G03F7/70916
摘要： An exposure apparatus that exposes a substrate includes: an optical system (PL) that includes an emission surface (23) from which an exposure light (EL) is emitted; a first surface (41) that is disposed in at least a part of a surrounding of an optical path of the exposure light emitted from the emission surface; a second surface (42) that is disposed in at least a part of a surrounding of the first surface and at a position lower than the first surface; a space portion (80) into which a liquid (LQ) can flow via a first aperture (33) between the first surface and the second surface and which is opened to the atmosphere via a second aperture (34) different from the first aperture; and a first recovery portion (60) that recovers at least a part of the liquid flowing into the space portion. Here, the emission surface, the first surface, and the second surface are opposed to the surface of the substrate (P) in at least a part of the exposure of the substrate, and the substrate is exposed with the exposure light from the emission surface via the liquid between the emission surface and the surface of the substrate.
摘要翻译：曝光基板的曝光装置包括：包括发射曝光光（EL）的发射面（23）的光学系统（PL）第一表面（41），设置在从所述发射表面发射的所述曝光光的光路的周围的至少一部分中; 第二表面（42），其设置在所述第一表面的周围的至少一部分中并且位于比所述第一表面低的位置; 空间部分（80），液体（LQ）可经由第一孔和第二表面之间的第一孔（33）流动，并且经由第二孔与第一孔不同的方式向大气打开; 以及回收至少部分流入空间部分的液体的第一回收部分（60）。这里，发射表面，第一表面和第二表面在基板的至少一部分曝光中与基板（P）的表面相对，并且基板用来自发射表面的曝光光通过发射表面和衬底表面之间的液体。

102. 发明申请

WO2010047203A1 METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING SUBSTRATE, METHOD FOR PRODUCING DEVICE, APPARATUS FOR MEASURING EXPANSION/CONTRACTION, AND APPARATUS FOR PROCESSING SUBSTRATE 审中-公开
标题翻译：用于测量扩展/承包的方法，用于处理基板的方法，用于生产设备的方法，用于测量扩展/承包的装置以及用于处理基板的装置
公开(公告)号：WO2010047203A1
公开(公告)日：2010-04-29
申请号：PCT/JP2009/066465
申请日：2009-09-14
申请人： NIKON CORPORATION , KIUCHI, Tohru , MIZUTANI, Hideo
发明人： KIUCHI, Tohru , MIZUTANI, Hideo
IPC分类号： B41J11/00 , B41J11/42 , B41J3/407
CPC分类号： B41J3/407 , B41J11/008 , B41J11/42
摘要： An expansion/contraction measuring apparatus includes a transport section which transports a flexible substrate along a surface of the substrate; a detecting section detecting first and second marks which are formed on the substrate while being separated from each other by a predetermined spacing distance in a transport direction of the substrate and which are moved, in accordance with the transport of the substrate, to first and second detection areas disposed on a transport route for the substrate respectively; a substrate length setting section which sets a length of the substrate along the transport route between the first and second detection areas to a reference length; and a deriving section which derives information about expansion/contraction of the substrate in relation to the transport direction based on a detection result of the first and second marks. Accordingly, the expansion/contraction state of an expandable/contractible substrate is measured highly accurately.
摘要翻译：膨胀/收缩测量装置包括：输送部，其沿着基板的表面输送柔性基板; 检测部，其检测形成在所述基板上的第一和第二标记，同时沿着所述基板的输送方向彼此分离预定的间隔距离，并且根据所述基板的输送而移动到所述基板的第一和第二分别设置在基板的输送路径上的检测区域; 基板长度设定部，其将沿着第一和第二检测区域之间的输送路径的基板的长度设定为基准长度; 以及导出部，其基于第一和第二标记的检测结果，得出关于基板相对于输送方向的伸缩的信息。因此，可高精度地测量可膨胀/收缩基材的膨胀/收缩状态。

103. 发明申请

WO2010036247A1 PRINCIPAL COMPONENTS ANALYSIS BASED ILLUMINANT ESTIMATION 审中-公开
标题翻译：主成分分析基于照明的估计
公开(公告)号：WO2010036247A1
公开(公告)日：2010-04-01
申请号：PCT/US2008/077565
申请日：2008-09-24
申请人： NIKON CORPORATION , HONG, Li
发明人： HONG, Li
IPC分类号： G01N21/27
CPC分类号： H04N9/735 , H04N9/73
摘要： An image apparatus for providing an estimated illuminant of a scene and subsequently providing an adjusted image of the scene includes a capturing system and an illuminant database. The capturing system captures information for an input image of the scene. The input image is defined by a plurality of input colors. The illuminant database includes a separate subspace of information for a plurality of possible illuminants. The subspaces can be created from multi-dimensional color information from its respective possible illuminant that is computed using Principal Components Analysis. This allows for more accurate illuminant estimation of the scene and the use of Principal Components Analysis to generate the one or more subspaces allows for accurate and relatively easy generation of the subspaces. Additionally, the image apparatus can include a control system that compares the input colors to the subspaces in the illuminant database.
摘要翻译：用于提供场景的估计光源并随后提供场景的调整图像的图像装置包括拍摄系统和照明器数据库。捕获系统捕获场景输入图像的信息。输入图像由多个输入颜色定义。光源数据库包括用于多个可能的发光体的单独的信息子空间。子空间可以从使用主成分分析计算的各自可能光源的多维颜色信息创建。这允许对场景进行更准确的光源估计，并且使用主成分分析来生成一个或多个子空间，可以准确和相对容易地生成子空间。另外，图像装置可以包括控制系统，其将输入颜色与光源数据库中的子空间进行比较。

104. 发明申请

WO2010035901A1 EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE 审中-公开
标题翻译：曝光装置，曝光方法和生产装置的方法
公开(公告)号：WO2010035901A1
公开(公告)日：2010-04-01
申请号：PCT/JP2009/067200
申请日：2009-09-25
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro , NAGAYAMA, Tadashi , KIUCHI, Tohru
发明人： HIDAKA, Yasuhiro , NAGAYAMA, Tadashi , KIUCHI, Tohru
IPC分类号： G03F7/20
CPC分类号： G03F7/70275 , G03F7/70208
摘要： An exposure apparatus according to an aspect of the present invention includes a mask-moving section (MS) which is movable in a first direction (X direction) while holding a mask (M) formed with a pattern; an illumination system (IL1, IL2) which forms a first illumination area (IR1) and a second illumination area (IR2) separated from each other by a spacing distance in the first direction; a substrate-moving section (WS) which is movable in a second direction (X direction) while holding a photosensitive substrate (W); a projection optical system (PL) which forms a first projected image of the pattern of the first illumination area and a second projected image of the pattern of the second illumination area; and a restricting section (MB, MD, CR) which restricts the first projected image and the second projected image to be within a first projection area (ER1) and a second projection area (ER2) respectively. A spacing distance, in the first direction, between a first conjugate area conjugate with the first projection area and a second conjugate area conjugate with the second projection area is set to be such a spacing distance that scanning exposures are successively performed for a first transfer area and a second transfer area, respectively, which are provided adjacently in the second direction. With this, the throughput in relation to the scanning exposure can be improved.
摘要翻译：根据本发明的一个方面的曝光装置包括一个能够沿着第一方向（X方向）移动并同时保持形成有图案的掩模（M）的掩模移动部分（MS）形成第一照明区域（IR1）和第二照明区域（IR2）的照明系统（IL1，IL2），所述第一照明区域和第二照明区域（IR2）在所述第一方向上彼此间隔开; 基板移动部分（WS），其在保持感光基板（W）的同时沿第二方向（X方向）移动; 投影光学系统（PL），其形成第一照明区域的图案的第一投影图像和第二照明区域的图案的第二投影图像; 以及限制部分（MB，MD，CR），其将第一投影图像和第二投影图像分别限制在第一投影区域（ER1）和第二投影区域（ER2）内。在与第一投影区域共轭的第一共轭区域与第二投影区域共轭的第一共轭区域之间的第一方向上的间隔距离设定为对于第一传送区域连续进行扫描曝光的间隔距离以及分别设置在第二方向上的第二传送区域。由此，可以提高与扫描曝光有关的吞吐量。

105. 发明申请

WO2010032878A2 MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：可移动身体装置，曝光装置，曝光方法和装置制造方法
公开(公告)号：WO2010032878A2
公开(公告)日：2010-03-25
申请号：PCT/JP2009/066848
申请日：2009-09-18
申请人： NIKON CORPORATION , SHIBAZAKI, Yuichi
发明人： SHIBAZAKI, Yuichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G03F7/70716 , G03F7/70775 , H01L21/681
摘要： In measurement of a positional information in the XY plane of a fine movement stage (WFS) held by a coarse movement stage(WCS), an encoder system is used including a head which is placed facing a grating (RG) placed on a surface substantially parallel to the XY plane of the fine movement stage and irradiates a measurement beam on the grating. Then, the fine movement stage is driven individually or integrally with the coarse movement stage by a drive system, based on the positional information measured by the encoder system. In this case, the head of the encoder system can be placed in proximity to the fine movement stage (the grating), which allows a highly precise measurement of the positional information of the fine movement stage by the encoder system.
摘要翻译：在测量由粗移动台（WCS）保持的微动载台（WFS）的XY平面中的位置信息时，使用编码器系统，该编码器系统包括面向放置在表面上的光栅（RG）的头部平行于微动载台的XY平面，并将测量光束照射在光栅上。然后，基于由编码器系统测量的位置信息，通过驱动系统单独地或与粗动部分一体地驱动精细运动级。在这种情况下，编码器系统的头部可以靠近精细移动台（光栅）放置，这允许通过编码器系统高精度地测量精细移动台的位置信息。

106. 发明申请

WO2010018753A1 DEFORMABLE MIRROR, MIRROR APPARATUS, AND EXPOSURE APPARATUS 审中-公开
标题翻译：可变形反射镜，镜子装置和曝光装置
公开(公告)号：WO2010018753A1
公开(公告)日：2010-02-18
申请号：PCT/JP2009/063618
申请日：2009-07-24
申请人： NIKON CORPORATION , SHIRAISHI, Masayuki
发明人： SHIRAISHI, Masayuki
IPC分类号： G02B26/06 , G02B26/08 , G03F7/20
CPC分类号： G03F7/70891 , G02B17/0663 , G02B26/0825 , G02B26/0858 , G03F7/70266 , G21K1/06
摘要： A mirror apparatus 70 includes a plurality of holes 35c which are divided by partition wall portions 35d on a back surface of a mirror M1, a plurality of thin film piezoelectric elements 41 which are fixed to bottom surfaces of the plurality of holes 35c respectively, a radiation temperature-regulating plate 36 which has a plurality of projections 36a inserted into the holes 35c, and a mirror control system 40 which individually controls voltages to be applied to the plurality of thin film piezoelectric elements 41 to deform the mirror M1. The mirror can be efficiently deformed and/or cooled from the side of the back surface without transmitting any vibration to the mirror.
摘要翻译：反射镜装置70包括多个孔35c，其分隔成反射镜M1的后表面上的分隔壁部分35d，多个薄膜压电元件41分别固定到多个孔35c的底表面，具有插入孔35c中的多个突起36a的放射线温度调节板36和分别控制施加到多个薄膜压电元件41的电压以使反射镜M1变形的反射镜控制系统40。镜子可以从后表面的侧面有效地变形和/或冷却，而不会向镜子传递任何振动。

107. 发明申请

WO2010008802A1 DEVICE AND METHOD FOR DETECTING WHETHER AN IMAGE IS BLURRED 审中-公开
标题翻译：用于检测图像的设备和方法
公开(公告)号：WO2010008802A1
公开(公告)日：2010-01-21
申请号：PCT/US2009/048165
申请日：2009-06-22
申请人： NIKON CORPORATION , FARID, Hany , HONG, Li
发明人： FARID, Hany , HONG, Li
IPC分类号： G06K9/62
CPC分类号： G06K9/6269 , G06K9/6234 , H04N5/23248
摘要： The present invention is directed to a method for detecting or predicting (302, 602) whether a test image is blurred. In one embodiment, the method includes extracting a training statistical signature (366) that is based on a plurality of data features (362, 364) from a training image set (14, 16), the training image set (14, 16) including a sharp image (14) and a blurry image (16); training a classifier (368) to discriminate between the sharp image (14) and the blurry image (16) based on the training statistical signature; and applying (302, 602) the trained classifier to a test image that is not included in the training image set (14, 16) to predict whether the test image is sharp (18) or blurry (20). The step of extracting can include measuring one or more statistical moments (576, 776) for various levels (L 0 -L 5 ), estimating a covariance (577, 777) between adjacent levels (L 0 -L 5 ), and/or extracting various metadata features (364, 664) from the images (14, 16). The step of training (300, 600) can include training a non-linear support vector machine (300) or a linear discriminant analysis (600) on the training statistical signature of the training image set (14, 16).
摘要翻译：本发明涉及一种用于检测或预测（302,602）测试图像是否模糊的方法。在一个实施例中，该方法包括从训练图像集（14,16）提取基于多个数据特征（362,364）的训练统计特征（366），所述训练图像组（14,16）包括清晰图像（14）和模糊图像（16）; 训练分类器（368）以基于训练统计签名来区分清晰图像（14）和模糊图像（16）; 以及将所训练的分类器（302,602）应用于不包括在训练图像集（14,16）中的测试图像，以预测测试图像是否锐利（18）或模糊（20）。提取的步骤可以包括测量各种级别（L0-L5）的一个或多个统计矩（576,776），估计相邻级别（L0-L5）之间的协方差（577,777）和/或提取各种元数据特征（364,646）从图像（14,16）中移除。训练步骤（300,600）可以包括在训练图像集（14,16）的训练统计签名上训练非线性支持向量机（300）或线性判别分析（600）。

108. 发明申请

WO2009146297A1 DEVICE AND METHOD FOR ESTIMATING WHETHER AN IMAGE IS BLURRED 审中-公开
标题翻译：用于估计图像的设备和方法
公开(公告)号：WO2009146297A1
公开(公告)日：2009-12-03
申请号：PCT/US2009/045128
申请日：2009-05-26
申请人： NIKON CORPORATION , HONG, Li
发明人： HONG, Li
IPC分类号： G06K9/40
CPC分类号： G06T5/001 , G06T5/003 , G06T7/0002 , G06T2207/30168 , H04N5/23212 , H04N5/23229 , H04N5/23248 , H04N5/23267
摘要： A method for estimating whether an image (14) is either blurred or sharp includes the steps of (i) determining an image gradient histogram distribution (410) of at least a portion of the image (14), (ii) comparing at least a portion of the image gradient histogram distribution (410) to a Gaussian model (414), and (iii) estimating a defocus blur size of at least a portion of the image (14) Additional methods for evaluating whether the image (14) has motion blur are provided herein For example, a dominant gradient orientation can be detected by histogram analysis (716), and the dominant gradient orientation (718) can be used to determine a possible motion blur direction (720) Alternatively, a dominant gradient orientation can be detected using principal component analysis ("PCA") on the image.
摘要翻译：一种用于估计图像（14）是模糊还是尖锐的方法包括以下步骤：（i）确定图像（14）的至少一部分的图像梯度直方图分布（410），（ii）比较至少一个图像梯度直方图分布（410）的部分与高斯模型（414）相关联，以及（iii）估计图像的至少一部分的散焦模糊尺寸（14）用于评估图像（14）是否具有运动的附加方法模糊在这里提供例如，可以通过直方图分析（716）检测主要梯度取向，并且可以使用主梯度取向（718）来确定可能的运动模糊方向（720）。或者，主要梯度取向可以是使用主成分分析（“PCA”）检测图像。

109. 发明申请

WO2009107852A1 SUBSTRATE HOLDING APPARATUS 审中-公开
标题翻译：基板保持装置
公开(公告)号：WO2009107852A1
公开(公告)日：2009-09-03
申请号：PCT/JP2009/054010
申请日：2009-02-25
申请人： NIKON CORPORATION , FUJIWARA, Tomoharu , NAGASAKA, Hiroyuki
发明人： FUJIWARA, Tomoharu , NAGASAKA, Hiroyuki
IPC分类号： G03F7/20
CPC分类号： G03F7/70341 , G03F7/707
摘要： A substrate holding apparatus holds a substrate that is exposed by exposure light that passes through a liquid. The substrate holding apparatus comprises: an opening (21); and a first holding part (23), which has a holding surface for holding the substrate inside the opening. At least part of an edge part (Eg) that defines- the opening has a first surface (41) and a second surface (42), which is provided above and is nonparallel to the first surface. The second surface extends from a boundary part (J) between the first surface and the second surface both upward and toward the outer side with respect to a center of the opening. The boundary part between the first surface and the second surface is substantially the same height as or higher than a front surface of the substrate, which is held by the first holding part.
摘要翻译：基板保持装置保持通过通过液体的曝光光曝光的基板。基板保持装置包括：开口（21）; 以及第一保持部（23），其具有用于将基板保持在开口内的保持面。限定开口的边缘部分（Eg）的至少一部分具有第一表面（41）和第二表面（42），其设置在上方且不平行于第一表面。第二表面从第一表面和第二表面之间的边界部分（J）相对于开口的中心向上和朝向外侧延伸。第一表面和第二表面之间的边界部分基本上与由第一保持部分保持的基板的前表面相同或更高。

110. 发明申请

WO2009075384A1 EXPOSURE APPARATUS, MANUFACTURING METHOD THEREOF, AND MAINTENANCE METHOD OF EXPOSURE APPARATUS 审中-公开
标题翻译：曝光装置及其制造方法和维护方法
公开(公告)号：WO2009075384A1
公开(公告)日：2009-06-18
申请号：PCT/JP2008/073022
申请日：2008-12-11
申请人： NIKON CORPORATION , ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi
发明人： ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70833 , G03F7/70808 , G03F7/70975
摘要： A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.
摘要翻译：投影光学系统PL用于投影图案的图像。曝光装置的制造方法包括：将投影光学系统定位在预定位置的定位步骤; 以及支撑定位的投影光学系统的支撑步骤。定位步骤包括在定位时将投影光学系统从下方向上移动的步骤。

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