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    • 21. 发明授权
    • Vibration type angular velocity sensor
    • 振动式角速度传感器
    • US07028548B2
    • 2006-04-18
    • US10811877
    • 2004-03-30
    • Hirofumi HiguchiTakeshi Ito
    • Hirofumi HiguchiTakeshi Ito
    • G01P9/04
    • G01C19/5719
    • To cancel in-phase components acting on vibrators of first and second sensor units in an angular velocity sensing direction Y, a differential amplification circuit obtains a differential waveform between a first angular velocity sensing waveform J1 and a second angular velocity waveform J2. Furthermore, to reduce a residual in-phase component of the obtained differential waveform, input gain adjusting circuits adjust an input gain of the first angular velocity sensing waveform J1 and an input gain of the second angular velocity sensing waveform J2 before these waveforms J1 and J2 are entered into the differential amplification circuit.
    • 为了抵消作用在角速度感测方向Y上的第一和第二传感器单元的振动器的同相分量,差分放大电路获得第一角速度感测波形J 1和第二角速度波形J 2之间的差分波形。此外 为了减小获得的差分波形的残余同相分量,输入增益调整电路在这些波形J 1之前调整第一角速度检测波形J 1的输入增益和第二角速度检测波形J 2的输入增益 和J 2进入差分放大电路。
    • 27. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US08794069B2
    • 2014-08-05
    • US13531680
    • 2012-06-25
    • Takashi KatsumataHirofumi Higuchi
    • Takashi KatsumataHirofumi Higuchi
    • G01C19/56
    • G01C19/5712
    • An angular velocity sensor includes a vibrator, a support substrate, an anchor section, a connection beam section, a driving section, and a detection section. The vibrator includes an inner vibrator and an outer vibrator, which vibrate in opposite circumferential directions when driven by the driving section. The connection beam section couples the vibrator to the anchor section, and is elastic in a z-direction and a circumferential direction. The connection beam section includes first connection beams, each of which is coupled to the outer vibrator at one end and is coupled to the inner vibrator at the other end, and second connection beams, each of which is coupled to a vibration node of a corresponding first connection beam at one end and is coupled to the anchor section at the other end.
    • 角速度传感器包括振动器,支撑基板,锚固部分,连接梁部分,驱动部分和检测部分。 振动器包括内部振动器和外部振动器,当由驱动部驱动时振动器在外周振动。 连接梁部分将振动器连接到锚固部分,并且在z方向和圆周方向上是弹性的。 连接梁部分包括第一连接梁,每个连接梁在一端连接到外部振动器,并在另一端连接到内部振动器;第二连接梁,每个连接梁连接到相应的振动节点 第一连接梁在一端并且在另一端耦合到锚固部分。
    • 30. 发明授权
    • Angular velocity sensor and method for operating the same
    • 角速度传感器及其操作方法
    • US07523665B2
    • 2009-04-28
    • US11653344
    • 2007-01-16
    • Takashi KatsumataTakeshi ItoHirofumi HiguchiMutsuhito OginoTetsuya Morishima
    • Takashi KatsumataTakeshi ItoHirofumi HiguchiMutsuhito OginoTetsuya Morishima
    • G01P15/125
    • G01C19/5719
    • An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.
    • 角速度传感器包括第一振动器和第二振动器,该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个,交流电压之一或第一和第二驱动电压的占空比中的一个,使得第一振动器与第二振动器相反地振动。