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    • 31. 发明授权
    • Semiconductor device with shielding
    • 半导体器件带屏蔽
    • US07096732B2
    • 2006-08-29
    • US10022224
    • 2001-12-20
    • Takashi KatsumataHirofumi Higuchi
    • Takashi KatsumataHirofumi Higuchi
    • G01P15/125G01P3/483H01L29/84
    • G01C19/5719G01P2015/0814H01L2224/48091H01L2924/00014
    • A semiconductor device includes gaps formed in a semiconductor substrate to provide an inner portion movable in x and y directions. Drive electrodes vibrate the inner portion in the x direction, and detection electrodes detect movement in the y direction generated when an angular velocity is applied thereto. Monitor electrodes generate monitor signals for monitoring movement of the inner portion in the x direction. Shield wires are provided between the drive and detection electrodes and the monitor electrodes to suppress capacitive coupling. Dummy electrodes adjacent to the output electrodes and capacitively coupled to the drive electrodes generate a dummy signal. Dummy signal wires are respectively connected to the dummy electrodes and to the circuit substrate. The dummy signal includes an induced component of a periodical signal and is supplied to the circuit substrate to cancel another induced component of the periodical signal in the drive and monitor signals.
    • 半导体器件包括形成在半导体衬底中的间隙,以提供在x和y方向上可移动的内部部分。 驱动电极在x方向上振动内部,检测电极检测在施加角速度时产生的y方向的移动。 监视电极产生监测信号,用于监测内部在x方向上的运动。 在驱动和检测电极和监视电极之间提供屏蔽线以抑制电容耦合。 与输出电极相邻并且电容耦合到驱动电极的虚拟电极产生虚拟信号。 虚拟信号线分别连接到虚拟电极和电路基板。 虚拟信号包括周期信号的感应分量,并被提供给电路基板以消除驱动和监视信号中的周期信号的另一个感应分量。
    • 32. 发明申请
    • Angular velocity sensor
    • 角速度传感器
    • US20060000280A1
    • 2006-01-05
    • US11153368
    • 2005-06-16
    • Hirofumi Higuchi
    • Hirofumi Higuchi
    • G01P15/08
    • G01C19/5719
    • A vibration-type angular velocity sensor realizing a suitably vibrating state of the vibrators by canceling the displacement of the vibrators caused by the gravity. The angular velocity sensor comprises base portions, vibrators coupled to the base portions, exciting means for driving and vibrating the vibrators in the x-direction, and detection means which, when an angular velocity is applied while the vibrators are being driven and vibrated, detects the angular velocity based on the vibrations of the vibrators in the y-direction at right angles with the x-direction, the angular velocity sensor further comprising position adjusting means for so adjusting the positions of the vibrators as to cancel the amount of displacement by which the vibrators are displaced by the gravity in the direction of the gravity.
    • 一种振动型角速度传感器,其通过消除由重力引起的振动器的位移而实现振动器的适当振动的状态。 角速度传感器包括基部,耦合到基部的振动器,用于在x方向上驱动和振动振动器的激励装置,以及当振动器被驱动和振动时施加角速度时的检测装置, 基于振动器在y方向上与x方向成直角的振动的角速度,角速度传感器还包括位置调节装置,用于调节振动器的位置以消除振动器的位移量,由此, 振动器在重力方向上被重力移位。