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31. 发明授权

US6099646A Dispensing system of a coater 失效
标题翻译：涂布机分配系统
公开(公告)号：US6099646A
公开(公告)日：2000-08-08
申请号：US185404
申请日：1998-11-03
申请人： Ming-Che Yang , Kuo-Feng Huang , En-Tien Tan , Kuei-Hsi Lai
发明人： Ming-Che Yang , Kuo-Feng Huang , En-Tien Tan , Kuei-Hsi Lai
IPC分类号： B05C11/08 , B05C11/10 , B05C11/00
CPC分类号： B05C11/08 , B05C11/1002
摘要： A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.
摘要翻译：提供用于旋转涂布机中的分配系统以将溶剂输送到晶片。分配系统包括开关阀，回吸阀，电磁阀，回吸阀的速度控制单元和开关阀的速度控制单元。开关阀控制溶剂分配状态。吸回阀从开关阀接收溶剂并将溶剂输出到晶片。电磁阀控制开关阀和回吸阀。开关阀的速度控制单元连接在开关阀和电磁阀之间，用于控制开关阀上的动作速度。回抽阀的速度控制单元联接在开关阀和回吸阀之间，用于通过足够的延迟动作来控制回抽阀的动作速度。

32. 发明授权

US5570792A Hanging file storage unit 失效
标题翻译：挂文件存储单元
公开(公告)号：US5570792A
公开(公告)日：1996-11-05
申请号：US607979
申请日：1996-02-29
申请人： Kuo-Feng Huang
发明人： Kuo-Feng Huang
IPC分类号： B42F15/00 , A47F7/16
CPC分类号： B42F15/0094
摘要： A hanging file storage unit including four supporting plates each provided with a plurality of vertical and horizontal tubular portions at an inner side thereof, a plurality of longitudinal rods having two bent ends adapted to engage with respective vertical and horizontal tubular portions of the supporting plates, and a plurality of transverse rods having two bent ends adapted to engage with respective vertical an horizontal tubular portions of the supporting plates, whereby the storage unit can be easily adjusted to receive hanging files with different sizes.
摘要翻译：一种悬挂文件存储单元，包括四个支撑板，每个支撑板在其内侧具有多个垂直和水平管状部分，多个纵向杆具有适于与支撑板的相应垂直和水平管状部分接合的两个弯曲端，以及具有两个弯曲端部的多个横杆，所述两个弯曲端部适于与所述支撑板的相应垂直的水平管状部分接合，由此可以容易地调节所述存储单元以接收具有不同尺寸的悬挂文件。

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