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1. 发明授权

US6062442A Dispense system of a photoresist coating machine 失效
标题翻译：光刻胶涂布机分配系统
公开(公告)号：US6062442A
公开(公告)日：2000-05-16
申请号：US185778
申请日：1998-11-03
申请人： Ming-Che Yang , Kuo-Feng Huang , Eric Liu , En-Tien Tan
发明人： Ming-Che Yang , Kuo-Feng Huang , Eric Liu , En-Tien Tan
IPC分类号： B65D5/72
CPC分类号： H01L21/67017 , H01L21/6715
摘要： A photoresist dispensing system used in a photoresist coating machine includes a pump, a sucking-back valve, a solenoid valve, a first pump speed controller, a second pump speed controller and a sucking-back speed controller. The pump is used to transport photoresist and spray a substrate. The sucking-back valve is used to suck back liquid photoresist from a transporting duct end. The solenoid is used to activate or inactivate the pump and the sucking-back valve. The first and the second pump speed controllers are separately coupled between the pump and the solenoid valve, and the sucking-back speed controller is coupled between the sucking-back valve and the sucking-back speed controller is coupled between the sucking-back valve and the route, where is between the pump and the second pump speed controller. Hence, the sucking-back valve produces a sucking force after the pump is inactivated and releases a sucking force after pump is activated.
摘要翻译：在光致抗蚀剂涂布机中使用的光致抗蚀剂分配系统包括泵，回吸阀，电磁阀，第一泵速控制器，第二泵速控制器和回吸速度控制器。泵用于输送光致抗蚀剂并喷涂基材。吸回阀用于从输送管道端部吸回液态光致抗蚀剂。螺线管用于启动或停用泵和吸回阀。第一和第二泵速控制器分别耦合在泵和电磁阀之间，并且吸回速度控制器耦合在吸回阀和吸回速度控制器之间，该回吸速度控制器耦合在吸回阀和该路径在泵和第二泵速度控制器之间。因此，在泵被激活之后，吸回阀产生吸力并在泵被激活之后释放吸力。

2. 发明授权

US6099646A Dispensing system of a coater 失效
标题翻译：涂布机分配系统
公开(公告)号：US6099646A
公开(公告)日：2000-08-08
申请号：US185404
申请日：1998-11-03
申请人： Ming-Che Yang , Kuo-Feng Huang , En-Tien Tan , Kuei-Hsi Lai
发明人： Ming-Che Yang , Kuo-Feng Huang , En-Tien Tan , Kuei-Hsi Lai
IPC分类号： B05C11/08 , B05C11/10 , B05C11/00
CPC分类号： B05C11/08 , B05C11/1002
摘要： A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.
摘要翻译：提供用于旋转涂布机中的分配系统以将溶剂输送到晶片。分配系统包括开关阀，回吸阀，电磁阀，回吸阀的速度控制单元和开关阀的速度控制单元。开关阀控制溶剂分配状态。吸回阀从开关阀接收溶剂并将溶剂输出到晶片。电磁阀控制开关阀和回吸阀。开关阀的速度控制单元连接在开关阀和电磁阀之间，用于控制开关阀上的动作速度。回抽阀的速度控制单元联接在开关阀和回吸阀之间，用于通过足够的延迟动作来控制回抽阀的动作速度。

3. 发明授权

US5740580A Stepper vacuum chuck wiper 失效
标题翻译：步进真空吸盘刮水器
公开(公告)号：US5740580A
公开(公告)日：1998-04-21
申请号：US757679
申请日：1996-11-29
申请人： Chung-Chien Leu , Hsi-Huang Lee , En-Tien Tan
发明人： Chung-Chien Leu , Hsi-Huang Lee , En-Tien Tan
IPC分类号： B08B1/00 , G03F7/20 , H01L21/027 , H01L21/683 , A47L25/00
CPC分类号： G03F7/707 , B08B1/00 , G03F7/70866 , H01L21/6833
摘要： The present invention discloses a stepper vacuum chuck wiper for cleaning a stepper vacuum chuck, which includes a rod frame, a bearing device, a flare type soft shield, a wiping stick and an illuminating device. The rod frame has a through hole at one end and the bearing device is sleeved inside of the through hole. The flare type soft shield with a flare opening on its lower end is sleeved inside the bearing device, and the diameter of the flare opening is larger than the outside diameter of the bearing device. The wiping stick is sleeved inside the flare type soft shield. The illuminating device for illuminating the stepper vacuum chuck includes a light source, a battery set and a switch. The battery set is coupled to the other end of the rod frame to provide electricity to the light source, and the switch is coupled between the battery set and the light source to control the illumination of the light source, wherein the light source and the switch are disposed on the rod frame.
摘要翻译：本发明公开了一种用于清洁步进真空吸盘的步进真空吸盘刮水器，其包括杆架，轴承装置，火炬式软护罩，擦拭棒和照明装置。杆架在一端具有通孔，轴承装置套在通孔的内部。在其下端具有喇叭口的喇叭型软护罩套在轴承装置的内部，喇叭口的直径大于轴承装置的外径。擦拭棒套在Flare型软屏内。用于照射步进真空吸盘的照明装置包括光源，电池组和开关。电池组联接到杆框架的另一端以向光源提供电力，并且开关耦合在电池组和光源之间以控制光源的照明，其中光源和开关设置在杆框架上。

4. 发明授权

US6048399A SOG coater nozzle pot 失效
标题翻译： SOG涂布机喷壶
公开(公告)号：US6048399A
公开(公告)日：2000-04-11
申请号：US82949
申请日：1998-05-21
申请人： En-Tien Tan , Ming-Che Yang , Kuo-Feng Huang , Ching-Chih Cheng
发明人： En-Tien Tan , Ming-Che Yang , Kuo-Feng Huang , Ching-Chih Cheng
IPC分类号： B05C5/00 , B05C11/08 , B05C11/10 , H01L21/00 , H01L21/31 , B05C11/02 , B05D3/12
CPC分类号： H01L21/6715 , B05C11/08 , B05C11/10
摘要： A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.
摘要翻译： SOG涂布机喷嘴罐包括用于容纳流体并使罐中的流体流出的罐，包括用于从罐接收流体的较宽开口和在插入管道中的突起上的较窄开口的漏斗喷嘴，以及安装装置用于将漏斗喷嘴安装在SOG涂布机上。根据本发明的喷嘴罐使得罐的安装/拆卸操作更方便和更少耗时。也保持SOG涂布机的稳定性。

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