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    • 43. 发明申请
    • METHOD AND SOLUTION FOR CLEANING SEMICONDUCTOR DEVICE SUBSTRATE
    • 清洁半导体器件衬底的方法和解决方案
    • US20100294306A1
    • 2010-11-25
    • US12746025
    • 2008-12-03
    • Hideaki MochizukiMakoto IshikawaNoriyuki Saito
    • Hideaki MochizukiMakoto IshikawaNoriyuki Saito
    • B08B3/12C11D3/43
    • C11D3/044C11D1/72C11D3/2068C11D3/3947C11D7/06C11D7/263C11D11/0047H01L21/02052H01L21/02057
    • Provided is a method for cleaning a semiconductor device substrate, which is excellent in removability and re-adhesion-preventing properties of contaminations of fine particles or organic matter, metal contamination and combined contamination of organic matter and metal, which are adhered to a substrate surface, and which can highly clean the substrate surface without corroding it even when an intense ultrasonic wave is not applied.It is a method for cleaning a semiconductor device substrate, the method comprising cleaning the semiconductor device substrate while applying an ultrasonic wave having an intensity of 0.2 W or more and 1.5 W or less per cm2 of substrate to be irradiated with the ultrasonic wave by using a cleaning solution comprising the following components (A) to (D): (A) hydrogen peroxide, (B) an alkali, (C) water, and (D) a compound represented by the following general formula (1): R1—O—(—R2—O—)n—H(1) wherein R1 represents an alkyl group having 1 to 4 carbon atoms, R2 represents an alkylene group having 2 to 3 carbon atoms, and n represents an integer of 1 to 3.
    • 本发明提供一种清洁半导体器件基板的方法,该半导体器件基板具有优异的附着在基板表面上的细小颗粒或有机物污染物的可除去性和再粘合防止性,金属污染和有机物和金属的组合污染 即使在不施加强烈的超声波的情况下,也可以高度清洁基板表面而不使其腐蚀。 本发明是一种清洗半导体器件基板的方法,其特征在于,在施加超声波的情况下,通过使用0.2W以上且1.5W以下的超声波对每1cm 2的被照射超声波的基板进行清洗, 包含以下组分(A)至(D)的清洁溶液:(A)过氧化氢,(B)碱,(C)水和(D)由以下通式(1)表示的化合物:R1- O - ( - R2-O-)n-H(1)其中R1表示碳原子数1〜4的烷基,R2表示碳原子数2〜3的亚烷基,n表示1〜3的整数。
    • 49. 发明申请
    • LIQUID CRYSTAL DISPLAY AND PROCESS FOR PRODUCING THE SAME
    • 液晶显示器及其制造方法
    • US20090066884A1
    • 2009-03-12
    • US11914640
    • 2006-05-19
    • Masato OkabeNaoko SawatariMakoto Ishikawa
    • Masato OkabeNaoko SawatariMakoto Ishikawa
    • G02F1/1334G02F1/1339G02F1/13C09K19/00
    • G02F1/1337G02F1/13394
    • To provide a liquid crystal display, in which substrates are strongly fixed with an even cell gap to exhibit an excellent display quality. The liquid crystal display includes a spacer side substrate and a counter substrate in which the spacer side substrate and the counter substrate oppose a first alignment layer and a second alignment layer to each other; and in which a liquid crystal layer having a liquid crystal material are held between the spacer side substrate and the counter substrate. Additionally, a reactive alignment layer having a curable resin is formed on at least one of the first alignment layer and the second alignment layer, and the spacer side substrate and the counter substrate are bonded to each other with the reactive alignment layer interposed therebetween.
    • 为了提供一种液晶显示器,其中基板以均匀单元间隙牢固地固定以显示出优异的显示质量。 液晶显示器包括间隔物侧基板和相对基板,其中间隔物侧基板和对向基板相对于第一取向层和第二取向层彼此相对; 并且其中具有液晶材料的液晶层保持在间隔物侧基板和对置基板之间。 此外,在第一取向层和第二取向膜中的至少一个上形成有具有可固化树脂的反应性取向层,并且间隔物侧基板和对置基板通过其间插入反应性取向层而彼此接合。