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51. 发明公开

EP1153894A1 Manufacturing method of optical waveguide 有权
标题翻译： Verfahren zur Herstellung eines optischen Wellenleiters
公开(公告)号：EP1153894A1
公开(公告)日：2001-11-14
申请号：EP01304085.2
申请日：2001-05-04
申请人： The Furukawa Electric Co., Ltd.
发明人： Komatsu, Takuya , Kashihara, Kazuhisa , Nara, Kazutaka
IPC分类号： C03B19/14 , C23C16/44
CPC分类号： C03B19/1446 , C23C16/4412 , C23C16/453 , Y02P40/57
摘要： The invention provides a manufacturing method of an optical waveguide able to precisely manufacture the optical waveguide having a waveguide construction as designed, and improve yield as one example. In this manufacturing method, a hydrolysis reaction of raw material gas of glass is caused within an oxygen-hydrogen flame by flowing the raw material gas, oxygen gas and hydrogen gas from a burner, and an optical waveguide forming area is formed by depositing glass particulates on a substrate. The oxygen-hydrogen flame is injected toward the optical waveguide forming area in a slanting direction on the substrate. An exhaust pipe is arranged on the discharging side of an injecting flow. Surplus glass particulates unattached to the optical waveguide forming area are sucked and exhausted by the exhaust pipe. The surplus glass particulates are sucked and exhausted by the exhaust pipe by inclining a suction port side of the exhaust pipe by an angle within a range from 5° to 30° with respect to a face of the substrate.
摘要翻译：本发明提供一种光波导的制造方法，其能够精确地制造具有设计的波导结构的光波导，并且作为一个示例提高产量。在该制造方法中，通过使来自燃烧器的原料气体，氧气和氢气流动而在氧 - 氢火焰内引起玻璃原料气体的水解反应，并且通过沉积玻璃微粒形成光波导形成区域在基板上。在基板上沿着倾斜方向朝向光波导形成区域注入氧 - 氢火焰。排气管布置在喷射流的排放侧。未连接到光波导形成区域的剩余玻璃微粒被排气管吸引并排出。通过使排气管的吸入口侧相对于基板的表面倾斜5°〜30°的角度，将多余的玻璃微粒吸引排气。

52. 发明公开

EP1046617A3 Synthetic quartz glass manufacturing process 有权
标题翻译： Verfahren zum Herstellen von synthetischem Quarzglas
公开(公告)号：EP1046617A3
公开(公告)日：2001-03-21
申请号：EP00303479.0
申请日：2000-04-25
申请人： SHIN-ETSU CHEMICAL CO., LTD.
发明人： Yamada, Motoyuki, Advanced Functional Mat. Res. Ct , Otsuka, Hisatoshi, Advanced Functional Mat. Res Ct , Matsuo, Koji, Advanced Functional Mat. Res. Center
IPC分类号： C03B19/14
CPC分类号： C03B37/0144 , C03B19/1407 , C03B19/1446
摘要： A process for manufacturing synthetic quartz glass involves feeding a quartz glass-forming raw material to a high-temperature gas zone within a chamber, converting the quartz glass-forming raw material into quartz soot, and forming synthetic quartz glass from the soot. A suspended soot-discharging gas which has been flow-straightened in a suspended soot discharging direction flows through the chamber in the vicinity of the high-temperature gas zone. This process keeps free suspended soot from settling onto the surface of the quartz ingot where fusion and growth take place, thereby preventing the formation of bubbles within the quartz glass under growth.
摘要翻译：合成石英玻璃制造，其保持悬浮的烟灰沉降在石英锭的表面上，其中发生熔融和生长，从而防止在生长的石英玻璃内形成气泡。制造方法包括：（1）将石英玻璃形成原料供给到室内的高温气体区域; （2）将石英玻璃成型原料转化为石英烟灰; （3）从烟灰形成合成石英玻璃，（4）使气体流过高温气体区附近的室，以沿着一个方向排出悬浮烟尘，排出气体在悬浮烟炱排出方向上流动。在高温气体区域附近，相对于高温气体流的流动方向，在+ -15°内的方向上，流动的排出的烟灰排出气体流过室。

53. 发明公开

EP0127956A1 Method for manufacturing sinterable glass bodies 失效
标题翻译： Verfahren zur Herstellung vongrillfähigenGlaskörpern。
公开(公告)号：EP0127956A1
公开(公告)日：1984-12-12
申请号：EP84303074.3
申请日：1984-05-08
申请人： Aetna Telecommunications Laboratories
发明人： Nath, Dilip K.
IPC分类号： C03B37/025 , C03B19/00 , C03B19/06 , C03B19/10
CPC分类号： C03B19/106 , C03B19/06 , C03B19/1415 , C03B19/1446 , C03B37/01282 , C03B37/014
摘要： An apparatus and method for forming and collecting glass powders and for producing therefrom transparent, highly pure glass bodies of any shape. Glass oxide precursors are introduced into a torch to produce glass powders. These are collected and shaped into any desirable form by a die or mold. The shaped powders are sintered in successive heating steps at temperatures lower than the melting or decomposition temperature of the glass body to produce first a rigid opaque body and then a rigid transparent glass of the desired form. The powders are of submicron size and are extremely reactive and pure, and are produced by supplying glass oxide precursors to a torch, such as an oxyhydrogen, oxyhydrocarbon or plasma torch. The powders are shaped into any complicated form through the use of a non-reactive mold. The compact powdered body thus formed is rigidized by sintering within the mold at a first temperature. The rigid, opaque glass body resulting from the initial sintering is subjected to a final sintering at a temperature above the first temperature and belowthe melting point of the glassto form a fully transparent glass structure. This glass structure is a pure or doped silica body applicable for use as a high-temperature lamp envelope, container for growing silicon crystals, preform for making optical wave guides, couplers, prisms, lenses, filters, or other high-quality optical products of any shape.
摘要翻译：用于形成和收集玻璃粉末并用于生产任何形状的透明，高纯度玻璃体的装置和方法。将玻璃氧化物前体引入火炬中以产生玻璃粉末。这些被模具或模具收集并成形为任何所需的形状。成型的粉末在比玻璃体的熔化或分解温度低的温度下在连续加热步骤中烧结，以首先产生刚性不透明体，然后制成所需形式的刚性透明玻璃。该粉末具有亚微米尺寸并且具有极好的反应性和纯度，并且通过将玻璃氧化物前体供应到诸如氢氧，氧化烃或等离子体焰炬的手电筒来制备。粉末通过使用非反应性模具成形为任何复杂形式。这样形成的致密粉末体在第一温度下在模具内烧结而硬化。由初始烧结产生的刚性不透明玻璃体在高于第一温度且低于玻璃熔点的温度下进行最终烧结以形成完全透明的玻璃结构。该玻璃结构是适用于高温灯管，用于生长硅晶体的容器，用于制造光波导的预成型件，耦合器，棱镜，透镜，滤光器或其它高品质光学产品的纯或掺杂二氧化硅本体任何形状。

54. 发明公开

KR1020150022858A 저-미립자 결함 박형 유리 시트를 형성하기 위한 정전기 방법 및 장치 审中-实审
标题翻译：形成低颗粒缺陷薄膜的静电方法和装置
公开(公告)号：KR1020150022858A
公开(公告)日：2015-03-04
申请号：KR1020147035659
申请日：2013-05-20
申请人： 코닝 인코포레이티드
发明人： 하우토프,대니얼워렌 , 놀리,브렌턴엘렌 , 버뮤리,스리니바스
IPC分类号： C03B19/14 , C03C15/00 , B32B17/06 , B32B37/00 , B05D1/06
CPC分类号： C03B19/1446 , C03B19/1423 , C03B19/1492 , Y02P40/57 , Y10T428/24355 , Y10T428/268
摘要： 고품질-표면 유리 시트는 롤-대-롤 유리 시트 증착 및 소결 공정을 사용하여 형성된다. 상기 유리 시트 형성은 유리 수트 입자를 제공하는 단계, 상기 유리 수트 입자의 제1 부분을 증착 표면에 증착시켜 지지된 수트층을 형성시키는 단계, 상기 유리 수트 입자의 제2 부분을 하전된 플레이트의 표면상으로 전정기적으로 끌어당기고 수집하는 단계; 상기 증착 표면으로부터 수트층을 제거하여 수트 시트를 형성시키는 단계; 및 상기 유리 수트 입자를 소결시키기 위해 상기 수트 시트의 적어도 일부를 가열시켜 유리 시트를 형성시키는 단계를 포함한다.

55. 发明授权

KR101190914B1 감소된 줄무늬의 극 자외선 부재 有权
标题翻译：减少条纹极紫外线元素
公开(公告)号：KR101190914B1
公开(公告)日：2012-10-12
申请号：KR1020047013806
申请日：2003-03-04
申请人： 코닝 인코포레이티드
发明人： 르디나,케네스,이. , 맥슨,존,이. , 맥린,브렌트,알.
IPC分类号： G03F7/20 , G02B1/00 , H01L21/027
CPC分类号： B82Y10/00 , B82Y40/00 , C03B19/1446 , C03B19/1484 , C03B2201/42 , C03B2207/62 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/42 , C03C2203/40 , G03F1/24 , G03F7/70958
摘要： 본 발명은 낮은 줄무늬 레벨을 갖는 티타니아-함유 실리카 유리 바디 및 극 자외선 부재에 관한 것이다. 본 발명에서는 또한 유리 부재 및 극 자외선 부재를 제조하고, 부재내의 줄무늬를 측정하기 위한 방법 및 장치가 기술된다.
티타니아, 실리카 유리 바디, 극 자외선 부재, 줄무늬

56. 发明专利

JP5252258B2 Method of manufacturing a synthesis apparatus for producing a quartz glass preform and the synthetic quartz glass mother material using the same 有权
公开(公告)号：JP5252258B2
公开(公告)日：2013-07-31
申请号：JP2007179939
申请日：2007-07-09
申请人：株式会社ニコン
发明人：雅之山▲崎▼
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1407 , C03B19/1446

58. 发明专利

JP4861939B2 Method for producing a synthetic silica glass using manufacturing equipment and this synthetic silica glass 有权
公开(公告)号：JP4861939B2
公开(公告)日：2012-01-25
申请号：JP2007240512
申请日：2007-09-18
申请人：コバレントマテリアル徳山株式会社
发明人：孝千々松 , 護山門 , 亜紀早川 , 定弘足立
IPC分类号： C03B20/00 , C03B8/04
CPC分类号： C03B19/1407 , C03B19/1446

59. 发明专利

JP2006231244A Method and apparatus for treating hydrochloric acid waste liquid 审中-公开
标题翻译：用于处理氢氯酸废液的方法和装置
公开(公告)号：JP2006231244A
公开(公告)日：2006-09-07
申请号：JP2005051591
申请日：2005-02-25
申请人： Asahi Glass Co Ltd , 旭硝子株式会社
发明人： IWATA KATSURA , SAKUMA TAKUYA , KATO MASAYUKI
IPC分类号： C02F1/66 , C03B8/04 , C03B20/00 , C03B37/018
CPC分类号： C03B19/1446 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide a method for treating a hydrochloric acid waste liquid which efficiently neutralizes the hydrochloric acid waste liquid formed from hydrogen chloride gas generated when synthetic glass such as high-purity quartz glass or the like is produced to allow discharge outside, and its apparatus. SOLUTION: The apparatus for treating the hydrochloric acid waste liquid 8 which forms the hydrochloric acid waste liquid from the hydrogen chloride gas generated when a porous glass base material is produced to discharge by neutralizing the hydrochloric acid waste liquid 8 includes a neutralization tank 5 which feeds the hydrochloric acid waste liquid 8 to the bottom part side and neutralizes this with granular lime stone 9 deposited on the bottom part to form a neutralized waste liquid 8A; an agitation means which comprises a first air pipe V 1 to a fourth air pipe V 4 , a first circulation pipe 51 and a fifth air pipe V 5 , and a second circulation pipe 52 and a sixth air pipe V 6 that agitate the lime stone 9 in the neutralization tank 5; and a discharge port 71 to be a discharge means for discharging the neutralized waste liquid 8A from the upper side of the neutralization tank 5. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种处理盐酸废液的方法，该方法有效地中和在生产合成玻璃如高纯石英玻璃等时产生的氯化氢气体形成的盐酸废液，以允许排出外部及其装置。解决方案：通过生产多孔玻璃基材时通过中和盐酸废液8排出而产生的氯化氢气体中形成盐酸废液的盐酸废液8的处理装置包括中和罐 5，其将盐酸废液8供给到底部侧，并将沉积在底部的颗粒状石灰9中和，形成中和废液8A; 包括第一空气管V 至第四空气管V 4的搅拌装置，第一循环管51和第五空气管V < SB>以及搅拌中和罐5中的石灰石9的第二循环管52和第六空气管V SB 6; 以及作为用于从中和罐5的上侧排出中和的废液8A的排出装置的排出口71.版权所有（C）2006，JPO＆NCIPI

60. 发明专利

JP2005519349A Low striation extreme ultraviolet optical element 审中-公开
公开(公告)号：JP2005519349A
公开(公告)日：2005-06-30
申请号：JP2003575191
申请日：2003-03-04
申请人：コーニングインコーポレイテッド
发明人：イーアーディナ，ケネス , イーマクソン，ジョン , アールマックリーン，ブレント
IPC分类号： G02B1/00 , C03B8/04 , C03B19/14 , C03B20/00 , C03C3/06 , C03C4/00 , G03F1/24 , G03F7/20 , H01L21/027
CPC分类号： B82Y10/00 , B82Y40/00 , C03B19/1446 , C03B19/1484 , C03B2201/42 , C03B2207/62 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/42 , C03C2203/40 , G03F1/24 , G03F7/70958
摘要： Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

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