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61. 发明申请

WO2006044221A3 METHOD AND APPARATUS HAVING A RETICLE STAGE SAFETY FEATURE 审中-公开
公开(公告)号：WO2006044221A3
公开(公告)日：2006-04-27
申请号：PCT/US2005/035972
申请日：2005-10-07
申请人： NIKON CORPORATION , PHILLIPS, Alton, Hugh
发明人： PHILLIPS, Alton, Hugh
IPC分类号： G03B27/58
摘要： An apparatus and method are disclosed having a stage reticle safety feature. The apparatus includes a reticle stage and an optical stage. The reticle stage supports a reticle and is capable of moving the reticle in x-y-z directions. The optical stage includes a plurality of components to direct light reflected from the reticle onto a wafer substrate and a safety mechanism to move one or more components of the optical stage away from the reticle stage.

62. 发明申请

WO2004095135A2 OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LITHOGRAPHY 审中-公开
标题翻译：使用自动光刻技术的自适应元件的光学布置
公开(公告)号：WO2004095135A2
公开(公告)日：2004-11-04
申请号：PCT/US2004/011287
申请日：2004-04-12
申请人： NIKON CORPORATION , NOVAK, W., Thomas
发明人： NOVAK, W., Thomas
IPC分类号： G03F
CPC分类号： G03F7/70258 , G03F7/2041 , G03F7/70341 , G03F7/70641 , G03F7/70958 , G03F9/7026 , G03F9/7034
摘要： An autofocus unit is provided to an immersion lithography apparatus for having a fluid over a target surface of a workpiece and an image pattern projected on this target surface through the fluid. The autofocus unit has an optical element such as a projection lens disposed opposite and above the target surface. An autofocus light source is arranged to project a light beam obliquely at a specified angle such that this light beam passes through the fluid and is reflected by the target surface of the workpiece at a specified reflection position which is below the optical element. A receiver receives and analyzes the reflected light. Correction lenses may be disposed on the optical path of the light beam for correcting propagation of the light beam.
摘要翻译：自动对焦单元被提供到浸没式光刻设备，用于使工件的目标表面上的流体和通过流体投影在该目标表面上的图像图案。自动对焦单元具有相对设置在目标表面上方的投影透镜等光学元件。自动对焦光源被布置成以特定角度倾斜地投射光束，使得该光束通过流体并被在光学元件下方的指定反射位置处的工件的目标表面反射。接收器接收并分析反射光。校正透镜可以设置在光束的光路上，用于校正光束的传播。

63. 发明申请

WO2004093160A2 RUN-OFF PATH TO COLLECT LIQUID FOR AN IMMERSION LITHOGRAPHY APPARATUS 审中-公开
标题翻译：运行路径收集液体用于静态光刻设备
公开(公告)号：WO2004093160A2
公开(公告)日：2004-10-28
申请号：PCT/US2004/009993
申请日：2004-04-01
申请人： NIKON CORPORATION , NOVAK, Thomas, W.
发明人： NOVAK, Thomas, W.
IPC分类号： H01L
CPC分类号： G03F7/70341 , G03F7/70716 , G03F7/7095
摘要： An exposure apparatus (10) for transferring an image to a device (30) includes an optical assembly (16), an immersion fluid system (252), and a device stage assembly (20). The optical assembly (16) is positioned a gap (246) above the device (30). The immersion fluid system (252) fills the gap (246) with an immersion fluid (248). The device stage assembly (20) includes a sloped region (282) that facilitates movement of the immersion fluid (248) that exits the gap (246) away from the device (30). The device stage assembly (20) can include a collection region (284) and a recovery system (286) that recovers immersion fluid (248) from the collection region (284).
摘要翻译：用于将图像传送到装置（30）的曝光装置（10）包括光学组件（16），浸没流体系统（252）和装置台组件（20）。光学组件（16）定位在装置（30）上方的间隙（246）。浸没流体系统（252）用浸没流体（248）填充间隙（246）。装置级组件（20）包括倾斜区域（282），其有助于离开间隙（246）的浸没流体（248）远离装置（30）的运动。装置级组件（20）可以包括从收集区域（284）回收浸没流体（248）的收集区域（284）和回收系统（286）。

64. 发明申请

WO2004001479A1 SOFT SUPPORT TO REDUCE DEFORMATION OF VERTICALLY MOUNTED LENS OR MIRROR 审中-公开
标题翻译：软件支持减少垂直安装的镜头或镜子的变形
公开(公告)号：WO2004001479A1
公开(公告)日：2003-12-31
申请号：PCT/US2003/019720
申请日：2003-06-19
申请人： NIKON CORPORATION
发明人： WATSON, Douglas, C.
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/026 , G02B7/182
摘要： A soft support for vertically mounting an optical element such as a lens or a mirror has one or more soft mounts each supporting the optical element from below at a peripheral position either vertically or radially and a plurality of position defining constraints that are more rigid that the soft mounts, each applying a peripheral tangential force on the optical element.
摘要翻译：用于垂直安装诸如透镜或反射镜的光学元件的软支撑件具有一个或多个软安装件，每个软安装件在垂直或径向的周边位置从下方支撑光学元件，并且多个位置限定更严格的约束，软安装件，每个都在光学元件上施加外围切向力。

65. 发明申请

WO1998010419A1 OPTICAL RECORDING METHOD AND OPTICAL RECORDER 审中-公开
标题翻译：光学记录方法和光学记录仪
公开(公告)号：WO1998010419A1
公开(公告)日：1998-03-12
申请号：PCT/JP1997003135
申请日：1997-09-05
申请人： NIKON CORPORATION , MATSUMOTO, Hiroyuki , ISHII, Koichiro , TAKIZAWA, Minoru , YOSHIBE, Satomi
发明人： NIKON CORPORATION
IPC分类号： G11B11/10
CPC分类号： G11B7/126 , G11B7/006 , G11B7/1267 , G11B11/10521 , G11B11/10595
摘要： Information is recorded on a recording medium by applying light to the recording medium, A test recording is carried out by applying light to the recording medium while the intensity of the light is successively varied. At least one of the upper limit and the lower limit of the light intensity with which information can be recorded on the medium normally is determined from the recording test results and the information concerning the upper limit or the lower limit is held on the predetermined part of the recording medium or a recorder. The next test is carried out with the light intensity based upon the held upper limit or lower limit.
摘要翻译：通过向记录介质施加光来将信息记录在记录介质上。通过在光的强度连续变化的同时向记录介质施加光来进行测试记录。可以从记录测试结果确定在介质上正常记录信息的光强度的上限和下限中的至少一个，并且关于上限或下限的信息被保持在记录介质或记录器。下一个测试是基于所保持的上限或下限的光强度进行的。

66. 发明申请

WO1997000517A1 DEVICE AND METHOD FOR REPRODUCING INFORMATION 审中-公开
标题翻译：用于复制信息的设备和方法
公开(公告)号：WO1997000517A1
公开(公告)日：1997-01-03
申请号：PCT/JP1996001617
申请日：1996-06-13
申请人： NIKON CORPORATION , TANAKA, Toshihisa , ARAI, Hiroshi , MATSUZAKI, Takako , ISHII, Yuwa
发明人： NIKON CORPORATION
IPC分类号： G11B07/085
CPC分类号： G11B7/08505 , G11B7/005 , G11B11/10563
摘要： A magneto-optical reproducing device of land/group reproduction system capable of reproducing arbitrarily information recorded on both tracks. A method for the reproduction is also disclosed. The information reproducing device reproduces information from an information recording medium on which first and second groups of information tracks on which information is recorded are alternately provided concentrically or spirally. The height of the tracks of the first group is different from that of the second group. The device is provided with an optical head which projects a light beam upon an information track of the first or second group and a moving mechanism which moves the position of the spot of the light beam in the radial direction of the medium. The moving mechanism moves the spot of the light beam from one track to another of the first group or from one track of one group to another of another group.
摘要翻译：一种陆/群复制系统的磁光再现装置，其能够再现任意记录在两个轨道上的信息。还公开了一种再现方法。信息再现装置从信息记录介质再现信息，信息记录介质上记录有信息的第一和第二组信息轨道以同心或螺旋方式交替地设置。第一组的轨道的高度与第二组的轨迹的高度不同。该装置设置有将光束投射到第一组或第二组的信息轨道上的光学头，以及沿着介质的径向移动光束的位置的移动机构。移动机构将光束的光点从第一组的一个轨道移动到另一个轨迹，或者将一组的一个轨道移动到另一个组的另一个轨道。

67. 发明申请

WO1995010111A1 OPTICAL DISK RECORDING DEVICE 审中-公开
标题翻译：光盘记录装置
公开(公告)号：WO1995010111A1
公开(公告)日：1995-04-13
申请号：PCT/JP1994001670
申请日：1994-10-06
申请人： NIKON CORPORATION , YAMANAKA, Yoshihiro , SAITO, Jun , KURITA, Shinichi
发明人： NIKON CORPORATION
IPC分类号： G11B20/18
CPC分类号： G11B11/10504 , G11B7/0045 , G11B11/10515 , G11B11/10595 , G11B19/02 , G11B19/04 , G11B20/1879
摘要： An optical disk recording device such that the time required for checking data is reduced, and any extra head optical system is not needed. By detecting the disturbance of signal resulting from reflected light from an optical disk while signals are recorded on the optical disk, whether or not the signals are properly recorded on the optical disk can be judged while the signals are being recorded on the disk.
摘要翻译：一种光盘记录装置，使得检查数据所需的时间减少，并且不需要任何额外的头部光学系统。通过在信号被记录在光盘上时检测由来自光盘的反射光产生的信号的干扰，可以判断信号是否正确记录在光盘上，同时信号被记录在光盘上。

68. 发明申请

WO1990001769A1 OVERWRITE TYPE MAGNETOOPTICAL RECORDING APPARATUS 审中-公开
标题翻译： OVERWRITE型磁记录记录装置
公开(公告)号：WO1990001769A1
公开(公告)日：1990-02-22
申请号：PCT/JP1989000815
申请日：1989-08-11
申请人： NIKON CORPORATION , SATO, Masatoshi , KAWAI, Toshihiko
发明人： NIKON CORPORATION
IPC分类号： G11B11/10
CPC分类号： G11B11/10519 , G11B11/10595 , G11B19/12
摘要： The magnetooptical recording unit includes a moving mechanism (22a) which can displace initial auxiliary field application unit (22), is necessary for the overwrite recording medium but detrimental to the non-overwrite recording medium, to a first or second position. The auxiliary field application with applies an initial auxiliary field to the recording medium at the first position corresponding to overwriting but does not apply the initial auxiliary field to the recording medium at the second position corresponding to non-overwriting. Information can be recorded by a single apparatus independently of whether recording medium is of the overwrite type of of the non-overwrite type.

69. 发明申请

WO2023059574A1 SYSTEMS AND METHODS FOR IMPROVED MELTING IN THREE-DIMENSIONAL PRINTING PROCESSES 审中-公开
公开(公告)号：WO2023059574A1
公开(公告)日：2023-04-13
申请号：PCT/US2022/045589
申请日：2022-10-03
申请人： NIKON CORPORATION
发明人： PHILLIPS, Alton, Hugh , GOODWIN, Eric, Peter
IPC分类号： B22F12/40 , B33Y30/00 , B22F10/28 , B22F12/13 , B22F12/44 , B33Y10/00 , G02B19/00 , B22F10/85 , B22F12/41 , B23K26/34 , B29C64/00 , B29C64/10 , B33Y50/02
摘要： A system comprising: a three-dimensional (3D) printing platform configured to support production of a 3D printed component during a 3D printing process; an energy source configured to direct energy to the production during the 3D printing process, thereby generating a melt pool on the production; and a mirror configured to: (i) receive the energy reflected from the melt pool and (ii) reflect at least a portion of the energy reflected from the melt pool to the production.

70. 发明申请

WO2022150340A1 MATERIAL BED ASSEMBLY FOR A PROCESSING MACHINE 审中-公开
公开(公告)号：WO2022150340A1
公开(公告)日：2022-07-14
申请号：PCT/US2022/011247
申请日：2022-01-05
申请人： NIKON CORPORATION
发明人： CHANG, Patrick, Shih , MARQUEZ, Johnathan, Agustin , KETSAMANIAN, Serhad , PHILLIPS, Alton, Hugh , ROSA, Matthew, David , GUO, Lexian , BINNARD, Michael, Birk
IPC分类号： B22F10/28 , B22F12/20 , B22F12/30 , B22F12/33 , B22F12/37 , B22F12/00 , B29C64/153 , B29C64/227 , B29C64/245 , B29C64/25 , B33Y10/00 , B33Y30/00
摘要： A processing machine (10) for building an object (11) from a material (12) includes a build platform (38), an energy system (22), a platform mover assembly (42) and a mover connector assembly (44). The build platform (38) supports the material (12). The energy system (22) directs an energy beam (22A) at the material (12) on the build platform (38) to selectively melt the material (12). The energy beam (22A) being directed at the material (12) generates heat that is transferred to the build platform (38). The platform mover assembly (42) causes relative movement between the build platform (38) and the energy system (22). The mover connector assembly (44) connects the platform mover assembly (42) to the build platform (38). The mover connector assembly (44) is configured to reduce the amount of heat transferred from the build platform (38) to the platform mover assembly (42).

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