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    • 64. 发明授权
    • Angular rate sensor
    • 角速度传感器
    • US07418863B2
    • 2008-09-02
    • US11528606
    • 2006-09-28
    • Hirofumi Higuchi
    • Hirofumi Higuchi
    • G01P1/02
    • G01C19/5719
    • An angular rate sensor includes a base member serving as a base, an angular rate sensing element having a vibrating member, a wiring member having a flexible, electrical insulating tape portion and a electrical wire portion. The wiring member has end portions fixed to the base member and a middle portion positioned between the end portions. The middle portion is separated from the base member and the sensing element is mounted to the middle portion. Thus, due to an elasticity of the wiring member, the sensing element can be isolated from an external vibration.
    • 角速率传感器包括用作基座的基座构件,具有振动构件的角速度检测元件,具有柔性电绝缘带部分和电线部分的布线构件。 布线构件具有固定到基部构件的端部和位于端部之间的中间部分。 中间部分与基部部件分离,并且感测元件安装到中间部分。 因此,由于布线构件的弹性,感测元件可以与外部振动隔离。
    • 65. 发明申请
    • Angular velocity sensor and method for operating the same
    • 角速度传感器及其操作方法
    • US20070199377A1
    • 2007-08-30
    • US11653344
    • 2007-01-16
    • Takashi KatsumataTakeshi ItoHirofumi HiguchiMitsuhito OginoTetsuya Morishima
    • Takashi KatsumataTakeshi ItoHirofumi HiguchiMitsuhito OginoTetsuya Morishima
    • G01P15/125
    • G01C19/5719
    • An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.
    • 角速度传感器包括第一振动器和第二振动器,该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个,交流电压之一或第一和第二驱动电压的占空比中的一个,使得第一振动器与第二振动器相反地振动。
    • 67. 发明申请
    • Electrostatically oscillated device
    • 静电摆动装置
    • US20060255694A1
    • 2006-11-16
    • US11489682
    • 2006-07-20
    • Hirofumi Higuchi
    • Hirofumi Higuchi
    • G01P15/125H01L41/00
    • G01C19/5762
    • An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the drive oscillation of the oscillator, a predetermined electric charge is accumulated in the oscillator, and electric charges of opposite polarities are alternately and periodically accumulated in the first and second driving electrodes, respectively, to exert an attractive force between the oscillator and a corresponding one of the first and second driving electrodes and also to exert a repulsive force between the oscillator and the other one of the first and second driving electrodes, and vice versa.
    • 振荡器可在预定方向上振荡。 第一驱动电极和第二驱动电极固定到基座并向振荡器施加静电力,以使振荡器在预定方向上的驱动振荡。 在振荡器的驱动振荡时,在振荡器中累积预定的电荷,相反极性的电荷分别交替地周期地累积在第一和第二驱动电极中,以在振荡器之间施加吸引力 以及第一和第二驱动电极中的相应一个,并且还在振荡器和第一和第二驱动电极中的另一个之间施加排斥力,反之亦然。
    • 68. 发明申请
    • Angular velocity detector having inertial mass oscillating in rotational direction
    • 角速度检测器在旋转方向上具有惯性质量振荡
    • US20060112764A1
    • 2006-06-01
    • US11239084
    • 2005-09-30
    • Hirofumi Higuchi
    • Hirofumi Higuchi
    • G01P9/04
    • G01C19/5719
    • An angular velocity detector includes a disk-shaped inertial mass supported on a substrate via driving beams and a second mass connected to the inertial mass via detecting beams. The inertial mass is oscillated in its rotational direction around a center axis (z) by an electrostatic force. When an angular velocity around a detection axis (x), which is perpendicular to the center axis (z), is imposed on the second mass while the inertial mass is oscillating, the second mass displaces in the direction parallel to the center axis (z). A capacitance between the second mass and the substrate changes according to the displacement of the second mass. The angular velocity is detected based on the changes in the capacitance. Since the driving beams allow the inertial mass to oscillate only in the rotational direction, the driving beams can be easily designed and manufactured.
    • 角速度检测器包括通过驱动梁支撑在基板上的盘形惯性质量块,以及通过检测梁连接到惯性质量块的第二质量块。 惯性质量通过静电力围绕中心轴线(z)以其旋转方向摆动。 当惯性质量正在振荡时,围绕垂直于中心轴线(z)的检测轴(x)的角速度施加在第二质量上时,第二质量沿平行于中心轴线(z )。 第二质量块和基板之间的电容根据第二质量块的位移而变化。 基于电容的变化来检测角速度。 由于驱动梁允许惯性质量仅在旋转方向上振荡,因此可以容易地设计和制造驱动梁。
    • 69. 发明授权
    • Vibration type of micro gyro sensor
    • 振动型微陀螺传感器
    • US06993969B2
    • 2006-02-07
    • US10808544
    • 2004-03-25
    • Hirofumi Higuchi
    • Hirofumi Higuchi
    • G01C19/56
    • G01C19/5719
    • An oscillation type of micro gyro sensor equipped with two vibrators is provided. The gyro sensor has a monitoring electrode, a signal processor, and a driving electrode attached to both the vibrators. The monitoring electrode monitors a vibration of only one of the two vibrators to output signal indicative of the monitored vibration. The signal processor drives the two vibrators in mutually opposite phases, by using the signal from said monitoring electrode. The driving electrode drives both the vibrators on the basis of the two driving signals.
    • 提供了配有两个振动器的微型陀螺传感器的振荡型。 陀螺仪传感器具有监测电极,信号处理器和连接到两个振动器的驱动电极。 监视电极仅监测两个振动器中的一个的振动,以输出指示所监视的振动的信号。 信号处理器通过使用来自所述监控电极的信号来驱动两个相互相反相位的振动器。 驱动电极基于两个驱动信号驱动振动器。