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61. 发明专利

JP2009234860A Apparatus for producing synthetic silica glass tube and method for producing synthetic silica glass tube 审中-公开
标题翻译：合成二氧化硅玻璃管的制造方法及合成硅胶管的制造方法
公开(公告)号：JP2009234860A
公开(公告)日：2009-10-15
申请号：JP2008083701
申请日：2008-03-27
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： ISOMURA YOSHITOSHI
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1492 , C03B19/1446 , C03B2207/64
摘要： PROBLEM TO BE SOLVED: To provide an apparatus which is suitable for producing a synthetic silica glass tube with a large aperture and produces a high-purity synthetic silica glass tube with a uniform wall thickness at a low cost.
SOLUTION: The apparatus for producing a synthetic silica glass tube is equipped with the following: a target which is arranged in a furnace so as to be able to perform rotative up-and-down going and has air holes adjacent to a central part; a rotative up-and-down going device which subjects the target to rotative up-and-down going; a burner which is installed on the upper side of the target with an inclination with a predetermined angularity to a plumb line so that the direction of blowdown from a target rotation central axis side is opposite to one side of the target and which deposits a cylindrical soot on the upper side of the target; a first exhaust system equipped with an exhaust port which is prepared at near the upper end of the cylindrical soot and on the outer peripheral side of the target; and a second exhaust system which communicates with the down side of a vent hole.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种适合于生产具有大孔径的合成石英玻璃管的设备，并以低成本生产具有均匀壁厚的高纯度合成石英玻璃管。＆lt; P＆gt;解决方案：合成石英玻璃管的制造装置具备以下装置：设置在炉中以能够进行上下旋转并具有与中央相邻的气孔的靶部分; 一个旋转的上下移动装置，使目标旋转上下移动; 燃烧器，其安装在目标的上侧，具有与铅垂线的预定角度的倾斜度，使得来自目标旋转中心轴侧的排污方向与靶的一侧相反，并且沉积圆柱形烟灰在目标的上侧; 配备有排气口的第一排气系统，所述排气口在所述圆筒形煤烟的上端附近和所述目标的外周侧准备; 以及与通气孔的下侧连通的第二排气系统。版权所有（C）2010，JPO＆INPIT

62. 发明专利

JP2009007190A Manufacturing apparatus for synthetic silica glass block and manufacturing method using the same 审中-公开
标题翻译：合成二氧化硅玻璃块的制造装置及其制造方法
公开(公告)号：JP2009007190A
公开(公告)日：2009-01-15
申请号：JP2007168425
申请日：2007-06-27
申请人： Covalent Materials Tokuyama Corp , コバレントマテリアル徳山株式会社
发明人： TERANISHI TAIICHI , KUNIDA TAKESHI , YOSHII ICHIRO , IKUNO HIROTO
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1407 , C03B19/1446 , C03B19/1492
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a synthetic silica glass block capable of manufacturing a high quality synthetic silica glass block being reduced in staining at a low cost and in high yield.
SOLUTION: The manufacturing apparatus for the synthetic silica glass block comprises a burner provided in a furnace and is used for forming silica by the oxidation reaction or the hydrolysis of a silicon compound, a molding container which is arranged below the burner and in which the silica is deposited, a lowering mechanism for letting down the molding container, a side wall member accumulating mechanism for accumulating an additional side wall member in order to extend upward the side wall of the molding container and an exhaust means for performing the evacuation of the inside of in a furnace.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种能够制造高品质合成石英玻璃块的合成石英玻璃块的制造装置，其以低成本和高产率降低了染色。＆lt; P＆gt;解决方案：合成石英玻璃块的制造装置包括设置在炉中的燃烧器，用于通过氧化反应或硅化合物的水解形成二氧化硅，模制容器布置在燃烧器下方二氧化硅沉积物，用于放下成型容器的下降机构，用于堆积另外的侧壁构件的侧壁构件堆积机构，以便向模制容器的侧壁向上延伸，以及用于执行排出的排气装置在炉内。版权所有（C）2009，JPO＆INPIT

63. 发明专利

JP2008137871A Apparatus and method for manufacturing synthetic silica glass 有权
标题翻译：用于制造合成二氧化硅玻璃的装置和方法
公开(公告)号：JP2008137871A
公开(公告)日：2008-06-19
申请号：JP2006328125
申请日：2006-12-05
申请人： Covalent Materials Tokuyama Corp , Toshiba Ceramics Co Ltd , コバレントマテリアル徳山株式会社 , 東芝セラミックス株式会社
发明人： YAMAKADO MAMORU , CHIJIMATSU TAKASHI , HAYAKAWA AKI , ADACHI SADAHIRO , NAKAJIMA TOSHIO , IWAI SEIJI
IPC分类号： C03B8/04 , C03B20/00
CPC分类号： C03B19/1407 , C03B19/1446
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing synthetic silica glass with which high quality synthetic silica glass can be manufactured.
SOLUTION: The apparatus for manufacturing the synthetic silica glass is equipped with: an exhaust chamber which communicates with a furnace body having a target, a burner or the like therein and is provided at a lower part of the furnace body; an exhaust flow passage provided so as to communicate with the exhaust chamber; an exhaust device provided so as to communicate with the exhaust flow passage; a pressure detection means for detecting the pressure in the exhaust chamber and atmospheric pressure; and an outside air intake mechanism which is provided in the exhaust flow passage and is capable of controlling the amount of outside air taken into the exhaust flow passage. The intake amount of outside air of the outside air intake mechanism is controlled by the differential pressure between the pressure in the exhaust chamber and atmospheric pressure, detected by the pressure detection means.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以制造高品质合成石英玻璃的合成石英玻璃的制造装置。＆lt; P＆gt;解决方案：合成石英玻璃的制造装置具备：排气室，其与炉体，燃烧器等连通，设置在炉体的下部; 排气流路，设置成与排气室连通; 设置成与排气流路连通的排气装置; 用于检测排气室中的压力和大气压力的压力检测装置; 以及外部进气机构，其设置在所述排气流路中，并且能够控制进入所述排气流路的外部空气量。外部空气吸入机构的外部空气的吸入量由压力检测单元检测到的排气室内的压力与大气压之间的差压来控制。版权所有（C）2008，JPO＆INPIT

64. 发明专利

JPS59164644A Production of ingot of molten quartz 失效
标题翻译：生产黄油的地方
公开(公告)号：JPS59164644A
公开(公告)日：1984-09-17
申请号：JP3911883
申请日：1983-03-11
申请人： Denki Kagaku Kogyo Kk
发明人： SAKAGUCHI YUKIO , OOTAGURO KENJI , KOBAYASHI AKIRA
IPC分类号： C03B20/00 , B01J19/00 , C03B19/01 , C03B19/14 , C03C1/00 , C04B35/653
CPC分类号： C03B19/01 , C03B19/1407 , C03B19/1446
摘要： PURPOSE:To obtain an ingot of molten quartz contg. no impurities by measuring the temp. in the waste gas passage between the ingot formed in a furnace and the furnace wall, and opening or closing an adjustment door at a discharging outlet of the waste gas in accordance with the measured temp. to adjust the temp. in the furnace. CONSTITUTION:A bomb-shaped ingot of molten quartz 12 is formed by Verneuil process by ejecting raw material powder, combustible gas, and O2 onto a seed plate 13 from a burner 3. In this stage, the temp. of the waste gas passage between the bottom part of the ingot 12 and the furnace wall is measured by a temp. measuring means 16, and an adjustment door 8 for the waste gas at the discharging outlet 7 of the waste gas provided on the furnace wall is opened or closed in accordance with the measured temp. In this way, the temp. of the ingot 12 is controlled by maintaining the temp. of the melting zone for the ingot 12 at above the melting temp. of the raw material SiO2 preventing also the increase of the diameter of the ingot 12. Mixing of impurities such as uranium can be simultaneously prevented in this way, and the productivity of the ingot 12 is improved.
摘要翻译：目的：获得熔融石英晶锭通过测量温度无杂质。在炉中形成的锭与炉壁之间的废气通道中，以及根据测得的温度在废气排出口处打开或关闭调节门。调整温度在炉中。构成：通过Verneuil方法通过从燃烧器3将原料粉末，可燃气体和O 2喷射到种子板13上形成熔融石英12的炸弹形锭。通过温度测量锭12的底部与炉壁之间的废气通道。测量装置16和用于设置在炉壁上的废气的排出口7处的废气的调节门8根据测得的温度打开或关闭。这样，通过保持温度来控制锭块12。在熔化温度以上的锭12的熔化区。的原料SiO 2也防止了锭12的直径的增加。可以以这种方式同时防止诸如铀的杂质的混合，并且提高锭12的生产率。

65. 发明专利

JPS59131564A Formation of high purity ceramic or glass body 失效
标题翻译：形成高纯度陶瓷或玻璃体
公开(公告)号：JPS59131564A
公开(公告)日：1984-07-28
申请号：JP19226483
申请日：1983-10-14
申请人： Kee Naasu Deiritsupu
发明人： DEIRITSUPU KEE NAASU
IPC分类号： C03B19/06 , C03B19/10 , C03B19/14 , C03B37/014 , C03C1/02 , C04B35/584 , C04B35/622 , C04B35/64
CPC分类号： C03B37/01426 , C03B19/06 , C03B19/106 , C03B19/1423 , C03B19/1446 , C03B19/1453 , C03B37/014 , C04B35/584 , C04B35/64

66. 发明公开

KR1020070061414A 티타니아 도핑 석영 유리, ＥＵＶ 리소그래피용 부재,ＥＵＶ 리소그래피용 포토마스크 기판 및 티타니아 도핑석영 유리의 제조 방법 有权
标题翻译： TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD，EUV LITHOGRAPHIC MEMBER AND PHOTOMASK SUBSTRATE
公开(公告)号：KR1020070061414A
公开(公告)日：2007-06-13
申请号：KR1020060123770
申请日：2006-12-07
申请人： 신에쓰 가가꾸 고교 가부시끼가이샤
发明人： 마이다,시게루 , 야마다,모또유끼
IPC分类号： C03C17/00 , C03C17/06
CPC分类号： C03B19/1407 , B82Y10/00 , B82Y40/00 , C03B19/1415 , C03B19/1446 , C03B19/1453 , C03B19/1484 , C03B2201/42 , C03C3/06 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2201/42 , G03F1/24 , G03F1/60 , G21K2201/067
摘要： Titania doped quartz glass for EUV lithographic material is provided to have high homogeneity sufficient to endow excellent surface precision to the lithographic material, and to make EUV lithographic material with planarity or thermal expansion property by comprising titania with desired content and defining specific apparent permeability of the glass. The titania doped quartz glass includes 3-12wt.% of titania with concentration gradient of less than 0.01wt.% /micron. The quartz glass has more than 30% of apparent permeability at 440nm in case thickness of the glass is 6.35mm, and also double refraction of less than 20nm/cm. The quartz glass has average line thermal expansion coefficient of -30 to +30ppb/deg.C at 10-30deg.C, distribution of OH group concentrations less than 400ppm and chlorine concentration of 1-500ppm. The quartz glass does not produce crystalline materials by annealing process at 700deg.C.
摘要翻译：提供用于EUV平版印刷材料的二氧化钛掺杂石英玻璃以具有足够高的均匀性以赋予平版印刷材料优异的表面精度，并且通过包含具有期望含量的二氧化钛并且定义具有所需含量的特定表观渗透性来制备具有平面性或热膨胀性质的EUV平版印刷材料玻璃。掺杂二氧化钛的石英玻璃包括3-12重量％的浓度梯度小于0.01重量％/微米的二氧化钛。在玻璃厚度为6.35mm的情况下，石英玻璃在440nm处具有超过30％的表观渗透率，并且双折射小于20nm / cm。石英玻璃的平均线热膨胀系数为30〜30ppb /℃，10-30℃，OH基浓度分布小于400ppm，氯浓度为1-500ppm。石英玻璃在700℃退火过程中不会产生结晶材料。

67. 发明公开

KR1020040089703A 감소된 줄무늬의 극 자외선 부재 有权
标题翻译：减少条纹的极端紫外线吸收剂
公开(公告)号：KR1020040089703A
公开(公告)日：2004-10-21
申请号：KR1020047013806
申请日：2003-03-04
申请人： 코닝 인코포레이티드
发明人： 르디나,케네스,이. , 맥슨,존,이. , 맥린,브렌트,알.
IPC分类号： G03F7/20 , G02B1/00 , H01L21/027
CPC分类号： B82Y10/00 , B82Y40/00 , C03B19/1446 , C03B19/1484 , C03B2201/42 , C03B2207/62 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/42 , C03C2203/40 , G03F1/24 , G03F7/70958 , G03F1/52
摘要： 본 발명은 낮은 줄무늬 레벨을 갖는 티타니아-함유 실리카 유리 바디 및 극 자외선 부재에 관한 것이다. 본 발명에서는 또한 유리 부재 및 극 자외선 부재를 제조하고, 부재내의 줄무늬를 측정하기 위한 방법 및 장치가 기술된다.

68. 实用新型

KR2019980052839U 광섬유 제작용 프리폼(preform)의 증착효율 향상을 위한 냉각장치 失效
标题翻译：提高光纤生产预制件沉积效率的冷却装置
公开(公告)号：KR2019980052839U
公开(公告)日：1998-10-07
申请号：KR2019960066019
申请日：1996-12-31
申请人： 대우통신 주식회사
发明人： 이병욱
IPC分类号： G02B6/42
CPC分类号： C03B37/01446 , C03B19/1446
摘要： 본고안은광섬유를제작하기위해프리폼(Preform)을제작하는과정에프리폼상에코어층및 클래드층이보다효과적으로증착시킬수 있는광섬유제작용프리폼의증착효율향상을위한냉각장치에관한것이다. 본고안은열영동현상(Thermophoresis)에의해입자의증착속도가향상되는것을이용하여열영동현상을증가시켜줌으로써프리폼(모재)의증착효율을향상시킬수 있는냉각장치를제공하기위한것이다. 본고안에서는버너의이동경로의앞쪽에냉기를토출하는노즐(20)을설치하여입자가타켓로드(1)로이동하는속도즉, 열영동현상을증가시켜입자의증착속도가증가되도록한 것을특징으로한다.
摘要翻译：纸提案涉及一种用于预成型件的用于sikilsu预型件（预成型件）制造的光纤的沉积效率的冷却装置处理除了沉积在预成形件上的包层，芯层，并有效地产生，以产生纤维。本发明的目的在于提供一种冷却装置，该冷却装置能够通过利用热泳动来提高粒子的析出速度，提高预成型体的析出效率，从而提高热泳动现象。在本发明中，用于排出冷空气的喷嘴20设置在燃烧器的移动路径的前方以增加粒子移动到靶杆1的速率，即，热泳现象，的。

69. 发明授权

KR101231479B1 다공질 석영 유리 모재의 제조 방법 및 장치 失效
标题翻译：用于生产多孔石英玻璃基底的方法和装置
公开(公告)号：KR101231479B1
公开(公告)日：2013-02-07
申请号：KR1020077018212
申请日：2006-02-08
申请人： 아사히 가라스 가부시키가이샤
发明人： 이와따,게이 , 우또,다까오 , 사꾸마,다꾸야
IPC分类号： C03B37/018 , C03B19/14 , C03B37/014
CPC分类号： C03B19/1446 , C03B37/0144 , Y02P40/57
摘要： 본 발명은 반응로 내의 산수소염 중에서 규소 화합물을 가수분해하여 생성한 실리카 미립자를 출발 부재 상에 증착시켜 다공질 석영 유리 모재를 형성하는 것을 포함하며, 상기 반응로로부터 불필요한 가스를 배출하기 위한 배기관을 가온하는 것을 특징으로 하는 다공질 석영 유리 모재의 제조 방법을 제공한다. 본 발명에 따르면, 다공성 석영 유리 모재의 제조시에 발생하는 불필요한 염화수소 가스를 배출하기 위한 배기관에 실리카 미립자가 부착되는 것을 방지할 수 있다.
다공질 석영 유리 모재, 실리카 미립자, 염화수소 가스

70. 发明公开

KR1020120039026A 롤-투-롤 유리: 터치 프리 및 다층 증착 공정 审中-实审
标题翻译：滚动滚筒玻璃：无触摸屏和多层沉积工艺
公开(公告)号：KR1020120039026A
公开(公告)日：2012-04-24
申请号：KR1020127004160
申请日：2010-07-15
申请人： 코닝 인코포레이티드
发明人： 하우토프,대니얼,더블유
IPC分类号： C03B19/14 , C03B37/014 , C03B37/018
CPC分类号： C03B19/14 , C03B19/1492 , Y10T428/315 , C03B19/1446 , C03B37/01413 , C03B37/0142 , C03B37/01807
摘要： 유리 시트는 롤-투-롤 유리 수트 증착 및 소결 방법을 사용해서 형성한다. 상기 유리 시트 형성 방법은 수트-수신 장치(120)의 증착면(122)에서 제 1 유리 수트층(152)을 형성하는 단계; 상기 증착면(122)으로부터 제 1 유리 수트층(152)을 제거하는 단계; 및 상기 지지되지 않는 제 1 유리 수트층에서 제 2 유리 수트층(162)을 형성하는 단계를 포함한다. 얻어진 복합 유리 수트 시트를 가열하여 소결된 유리 시트(156)를 형성한다. 상기 유리 시트는 실질적으로 균일한 유리 시트 또는 층-특이적 특성을 갖는 복합 유리 시트일 수 있다.

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