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    • 86. 发明授权
    • 크라이오펌프
    • KR100360357B1
    • 2003-02-05
    • KR1019950010233
    • 1995-04-28
    • 가부시키가이샤 에바라 세이사꾸쇼
    • 노지노부하루하야까와주니찌사또우모또야수아오노히로시고마이데쯔오
    • F04B37/08
    • F04B37/08F04B37/085F04B49/065F04B2205/01F04B2205/10Y10S417/901
    • A cryopump is provided with a detecting means (35) for detecting an operation parameter at an elapsed operation time in a current operation cycle of the cryopump, a storing means (53) for storing a value of another operation parameter in a past operation cycle of the cryopump as a management parameter, an arithmetic controlling means (51) for calculating a succeeding rotational speed of the expander motor (40) based on the current operational parameter and the management parameter stored in the storing means and outputting the same as a driving instruction signal, with which the succeeding rotational speed of the expander motor (40) is controlled so as to maintain a temperature of a cryopanel (12) or a pressure in a vacuum chamber (100) to which the cryopump is attached at a predetermined value by using the operation parameter at the elapsed operation time in the current operation cycle of the cryopump detected by the detecting means and the operation parameter at the corresponding elapsed operation time in the past operation cycle of the cryopump stored in the storing means (53) as the management parameter, and an expander motor (40) driving means for driving the expander motor (40) according to the driving instruction signal output from the arithmetic controlling means (51), whereby the cryopump may be operated stably even if a temporal load change has occurred.
    • 本发明提供一种低温泵,该低温泵具备:检测单元,该检测单元检测低温泵当前的运转周期中的经过运转时的运转参数;存储单元,其存储过去的运转周期中的其他运转参数的值; 低温泵作为管理参数;运算控制装置(51),用于根据存储在存储装置中的当前运行参数和管理参数计算膨胀机马达(40)的后续转速,并将其作为驱动指令输出 信号,控制膨胀机马达(40)的后续旋转速度,以便将低温泵(12)的温度或低温泵所附着的真空室(100)中的压力保持在预定值 使用在由检测装置检测到的低温泵的当前操作周期中的经过的操作时间处的操作参数和相应的ela的操作参数 (53)中存储的低温泵在过去的运转周期中的运转时间作为管理参数,以及膨胀机马达(40)驱动装置,用于根据从所述存储装置(53)输出的驱动指令信号来驱动所述膨胀机马达 算术控制装置(51),从而即使发生暂时的负载变化,低温泵也可以稳定地运行。