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81. 发明申请

US20050006585A1 System and method for correction for angular spread in determining optical properties of materials 失效
标题翻译：用于在确定材料的光学性能时进行角度扩展的校正的系统和方法
公开(公告)号：US20050006585A1
公开(公告)日：2005-01-13
申请号：US10884348
申请日：2004-07-02
申请人： Hsueh-Mei Graham , Harris Carter
发明人： Hsueh-Mei Graham , Harris Carter
IPC分类号： G01B11/06 , G01N21/21 , G01N21/35 , G01N21/55 , G01N21/57 , G01N21/84 , G01J5/02
CPC分类号： G01N21/21 , G01B11/0625 , G01N21/3563 , G01N21/57 , G01N21/8422 , G01N2021/558 , G01N2021/8427 , G01N2201/0637
摘要： The present invention provides a method and system to correct for angular spread within an HDR used to determine IR optical constants. An algorithm simulates the transmission and polarized reflection actually observed. This is achieved by averaging power scattering over an angular spread corresponding to the size of the HDR mirror. Such an algorithm may incorporate corrections for angular spread that may be used to determine the thickness of a film (coating) as well as the optical constants of the film or coating on low loss ranges.
摘要翻译：本发明提供了一种校正用于确定IR光学常数的HDR内的角度扩展的方法和系统。一种算法模拟实际观察到的透射和偏振反射。这通过在对应于HDR反射镜的尺寸的角度扩展上平均功率散射来实现。这种算法可以包括用于确定膜（涂层）的厚度以及在低损耗范围上的膜或涂层的光学常数的角度扩展的校正。

82. 发明授权

US06697515B2 Method and apparatus for quantitatively evaluating scintillation, antiglare film and method of producing the same 有权
标题翻译：用于定量评估闪烁，防眩膜的方法和装置及其制备方法
公开(公告)号：US06697515B2
公开(公告)日：2004-02-24
申请号：US10397737
申请日：2003-03-27
申请人： Gen Furui
发明人： Gen Furui
IPC分类号： G06K900
CPC分类号： G01N21/59 , G01N21/4738 , G01N21/57 , G01N2021/558 , G01N2021/9513
摘要： A method capable of quantitatively evaluating the intensity of scintillation caused by surface unevenness. Light from a white light source is made incident on a surface of an object to be measured through a matrix filter. Reflected light or transmitted light from the object is photographed with a CCD camera and taken into a computer as data. Image processing for the luminance distribution of the captured light is performed to obtain a standard deviation of dispersion of the luminance distribution. The value of the standard deviation obtained is defined as a scintillation value of the surface of the object. The performance of the object is evaluated by judging whether or not the scintillation value is greater than a predetermined value.
摘要翻译：能够定量评价由表面不均匀引起的闪烁强度的方法。来自白光源的光通过矩阵滤光器入射到待测物体的表面上。用CCD相机拍摄来自物体的反射光或透射光，并作为数据作为计算机进行拍摄。执行拍摄光的亮度分布的图像处理，以获得亮度分布的色散的标准偏差。获得的标准偏差的值被定义为物体表面的闪烁值。通过判断闪烁值是否大于预定值来评估对象的性能。

83. 发明授权

US5519210A Apparatus and a process for recording photometric data that is positioned in succession or in adjacent fashion on a page-like or strip-like print 失效
标题翻译：用于记录在页面状或带状印刷品上相继或以相邻方式定位的测光数据的装置和方法
公开(公告)号：US5519210A
公开(公告)日：1996-05-21
申请号：US234381
申请日：1994-04-28
申请人： Markus Berner
发明人： Markus Berner
IPC分类号： G01N21/27 , G01N21/31 , G01N21/47 , G01N21/55 , G01N21/59 , G01N21/86 , G01J3/51
CPC分类号： G01N21/86 , G01N2021/3137 , G01N2021/558 , G01N2021/8654 , G01N21/474
摘要： An apparatus for recording photometric data that is positioned in succession or in adjacent fashion on a page-like or strip-like print is equipped with at least one reflectance measuring unit with a reflectance measuring lens for measuring opaque prints (for example, paper test strips for examining the paper developing baths or for control of the basic printer setting). Wavelength dispersion elements positioned in the light path of the reflected light permit the analysis of the measuring fields according to wavelengths and preferably in the three primary colors of red, green, and blue. The apparatus can be equipped with an automatic transport device for the page-like or strip-like prints; the transport device is positioned behind the measuring lens. The prints are inserted into the device through an intake slot which is designed to accommodate prints of different width. On at least one side of the intake slot there is at least one stop for the prints. Each stop is stationary relative to the intake slot for the prints. The reflectance measuring lens and the print seized by the transport device and transported in the longitudinal direction can be moved in the transverse direction, relative to one other. In this manner it is possible to measure adjacent measuring fields without having to reposition the print between individual measurements.
摘要翻译：用于记录在页面状或带状印刷品上相继或相邻地定位的测光数据的装置配备有至少一个具有用于测量不透明印刷品的反射测量透镜的反射测量单元（例如，纸张测试条用于检查纸张显影浴或用于控制基本打印机设置）。位于反射光的光路中的波长色散元件允许根据波长分析测量场，优选以红色，绿色和蓝色的三原色进行分析。该设备可以配备有用于页面或条状印刷品的自动传送装置; 运输装置位于测量透镜后面。印刷品通过进口槽插入设备中，该进气槽被设计成容纳不同宽度的印刷品。在进气口的至少一侧，至少有一个打印件停止。每个止动件相对于打印件的进气口静止。反射率测量透镜和由输送装置抓住并沿纵向输送的印刷品可以相对于彼此在横向方向上移动。以这种方式，可以测量相邻的测量场，而不必在各个测量之间重新定位打印。

84. 发明授权

US5311021A Spectroscopic sampling accessory having dual measuring and viewing systems 失效
标题翻译：具有双重测量和观察系统的光谱采样附件
公开(公告)号：US5311021A
公开(公告)日：1994-05-10
申请号：US848603
申请日：1992-03-09
申请人： Robert G. Messerschmidt
发明人： Robert G. Messerschmidt
IPC分类号： G01J3/453 , G01N21/25 , G01N21/35 , G01N21/55 , G01N21/65 , G02B21/04 , G01N21/62 , G01J3/443
CPC分类号： G02B21/04 , G01N21/255 , G01J3/453 , G01N2021/1738 , G01N2021/558 , G01N21/35 , G01N21/65
摘要： A microscope accessory uses symmetrical pairs of identical parabolic mirrors as an imaging optic to map a specimen plane with a remote focus. A mask at the remote focus defines at least one measuring area for making spectroscopic measurements while a separate viewing system simultaneously provides a wide field of view of the sample at higher magnification. The sample aperture, defines as 2 sterradians of solid angle surrounding each side of the specimen plane, is multiplexed between and among different functions--such as spectroscopic measurements and visual observations. The high numerical aperture possible using identical symmetrical aberration canceling (ISAC) optics facilitates the aperture multiplexing which has particular advantage in making reflectance measurements without any need for a significant loss of throughput efficiency.
摘要翻译：显微镜附件使用对称的相同的抛物面反射镜作为成像光学元件来将样品平面与远焦点对准。在远程焦点处的掩模限定了用于进行光谱测量的至少一个测量区域，而单独的观察系统同时在较高放大倍数下提供样品的宽视场。样品孔径定义为围绕样品平面两边的立体角的2个立体角，在不同的功能之间进行复用，例如光谱测量和视觉观察。使用相同的对称像差消除（ISAC）光学可能的高数值孔径有助于孔径复用，这在进行反射测量时具有特别的优点，而不需要显着的吞吐效率损失。

85. 发明授权

US5062714A Apparatus and method for pattern recognition 失效
标题翻译：用于模式识别的装置和方法
公开(公告)号：US5062714A
公开(公告)日：1991-11-05
申请号：US478475
申请日：1990-02-12
申请人： Steven H. Peterson , Timothy R. Friend
发明人： Steven H. Peterson , Timothy R. Friend
IPC分类号： G01J3/46 , G01N21/55 , G01N21/59 , G01N21/86
CPC分类号： G01N21/8483 , G01N21/5907 , G01J2003/466 , G01N2021/1742 , G01N2021/478 , G01N2021/558
摘要： A densitometer apparatus (210) is disclosed and is adapted to provide color density measurements of object samples. The densitometer apparatus (210) comprises a source light (578) for projecting light toward an object sample comprising a control strip (588, 620). A reflection optics assembly (576) is adapted to measure light density reflected from the object sample, when the object sample is in the form of a paper control strip. A transmission optics assembly (618) is adapted to measure transmission density of light rays projected through the object sample, when the object sample is in the form of a film control strip. A motor assembly (426) automatically moves the object sample (588,620) through the apparatus (210) adjacent the source light (578). Pattern definition data is prestored in memory of the apparatus (210). When control strips (588, 620) to be analyzed are "read" through the apparatus (210), a pattern recognition process is employed to compare strip color patches with the prestored data, so as to determine whether the control strip "matches" the pattern definition. The pattern definition data is stored so as to define "regions" where dimensional, positional and spectral color patch properties are within predetermined tolerances. An initial step of the pattern recognition process is to scan measured data representative of the control strip and assign regions. Comparisons of the pattern definition region data and measured control strip region data are then performed to determine whether an appropriate "match" has been obtained.
摘要翻译：公开了一种密度计装置（210），并且适于提供对象样品的色度密度测量。密度计装置（210）包括用于向包括控制条（588,620）的物体样品投射光的源光（578）。反射光学组件（576）适于测量从物体样品反射的光密度，当对象样品处于纸张控制条形式时。传输光学组件（618）适于测量投射到物体样品上的光线的透射密度，当对象样品呈胶片控制条的形式时。马达组件（426）自动地将物体样品（588,620）移动通过与源光（578）相邻的装置（210）。模式定义数据被预先存储在装置（210）的存储器中。当要分析的控制带（588,620）通过设备（210）“读取”时，采用模式识别处理来比较条带色块与预先存储的数据，以便确定控制条“是否匹配” 模式定义。存储图案定义数据以定义其中尺寸，位置和光谱色标属性在预定公差内的“区域”。模式识别过程的初始步骤是扫描表示控制条的测量数据并分配区域。然后执行模式定义区域数据和测量的控制条带区域数据的比较，以确定是否已经获得了适当的“匹配”。

86. 发明公开

US20240175813A1 SPECTRUM ANALYSIS SYSTEM AND SPECTRUM ANALYSIS METHOD 审中-公开
公开(公告)号：US20240175813A1
公开(公告)日：2024-05-30
申请号：US18518965
申请日：2023-11-25
申请人： SHIMADZU CORPORATION
发明人： Risa FUJI , Sachio MURAKAMI , Shoko IWASAKI
IPC分类号： G01N21/552
CPC分类号： G01N21/552 , G01N2021/558
摘要： This spectrum analysis system has a measurer, a display, and a controller that displays plurality of first anomaly items that indicate the type of anomaly in appearance of the measurement spectrum waveform. The controller displays the first reference spectrum waveform for reference to a mode of appearance of the anomaly corresponding to each of the plurality of first anomaly items in the display.

87. 发明公开

US20230143322A1 METHOD FOR DETECTING A SPECTRUM, AND SPECTROSCOPY ASSEMBLY 审中-公开
公开(公告)号：US20230143322A1
公开(公告)日：2023-05-11
申请号：US17919713
申请日：2021-04-21
申请人： ams-OSRAM International GmbH
发明人： Gerd PLECHINGER
IPC分类号： G01N21/359 , G01N21/55
CPC分类号： G01N21/359 , G01N21/55 , G01N2201/123 , G01N2021/558
摘要： A method for the time-differentiated detection of a spectrum of a test object comprises providing a first conversion dye, which is configured to convert light with a first spectral distribution in the visible range into light with a second spectral distribution in the infrared range. The first conversion dye is excited with a light pulse in the range of the first spectral distribution during a first time period, and a light fraction, reflected or transmitted by the test object, in the range of the first spectral distribution is registered during a first time interval. During a subsequent second time period, a fraction of converted light reflected or transmitted by the test object is registered. According to the invention, the first time interval is selected so that it lies substantially inside a luminescence lifetime for the first conversion dye in the first time period.

88. 发明授权

US09778207B2 Integrated multi-pass inspection 有权
公开(公告)号：US09778207B2
公开(公告)日：2017-10-03
申请号：US14890880
申请日：2014-05-14
申请人： KLA-Tencor Corporation
发明人： Weston L. Sousa , Yalin Xiong , Rui-Fang Shi
IPC分类号： G01N21/88 , G03F1/84 , G06T7/00 , G01N21/956
CPC分类号： G01N21/8851 , G01N21/94 , G01N21/956 , G01N21/95607 , G01N2021/558 , G01N2021/8867 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G06T7/0004 , G06T7/001 , G06T7/10 , G06T7/136 , G06T2207/30148
摘要： Methods and systems for integrated multi-pass reticle inspection are provided. One method for inspecting a reticle includes acquiring at least first, second, and third images for the reticle. The first image is a substantially high resolution image of light transmitted by the reticle. The second image is a substantially high resolution image of light reflected from the reticle. The third image is an image of light transmitted by the reticle that is acquired with a substantially low numerical aperture. The method also includes detecting defects on the reticle using at least the first, second, and third images for the reticle in combination.

89. 发明申请

US20170256043A9 INTEGRATED MULTI-PASS INSPECTION 有权
公开(公告)号：US20170256043A9
公开(公告)日：2017-09-07
申请号：US14890880
申请日：2014-05-14
申请人： KLA-TENCOR CORPORATION
发明人： Weston L. Sousa , Yalin Xiong , Rui-Fang Shi
IPC分类号： G06T7/00 , G01N21/88 , G03F1/84
CPC分类号： G01N21/8851 , G01N21/94 , G01N21/956 , G01N21/95607 , G01N2021/558 , G01N2021/8867 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G06T7/0004 , G06T7/001 , G06T7/10 , G06T7/136 , G06T2207/30148
摘要： Methods and systems for integrated multi-pass reticle inspection are provided. One method for inspecting a reticle includes acquiring at least first, second, and third images for the reticle. The first image is a substantially high resolution image of light transmitted by the reticle. The second image is a substantially high resolution image of light reflected from the reticle. The third image is an image of light transmitted by the reticle that is acquired with a substantially low numerical aperture. The method also includes detecting defects on the reticle using at least the first, second, and third images for the reticle in combination.

90. 发明授权

US09689805B2 Systems and methods eliminating false defect detections 有权
公开(公告)号：US09689805B2
公开(公告)日：2017-06-27
申请号：US14746961
申请日：2015-06-23
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Biow-Hiem Ong , Chih-Chiang Tu , Chien-Hung Lai , Jong-Yuh Chang , Kuang-Yu Liu
IPC分类号： G01N21/00 , G01N21/88 , G01N21/95 , G01N21/59 , G01N21/55 , G01N21/956 , H01L21/66
CPC分类号： G01N21/8806 , G01N21/55 , G01N21/59 , G01N21/9501 , G01N21/956 , G01N2021/558 , G01N2021/8809 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not identified in the second set of defect candidates.

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