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    • 2. 发明专利
    • Electron beam accelerator
    • 电子光束加速器
    • JP2010164582A
    • 2010-07-29
    • JP2010100751
    • 2010-04-26
    • Advanced Electron Beams Incアドバンスト・エレクトロン・ビームズ・インコーポレーテッド
    • AVNERY TZVI
    • G21K5/04H01J3/02H01J33/00H05H5/00
    • H01J33/02H01J3/027H01J33/00
    • PROBLEM TO BE SOLVED: To provide an electron accelerator performing maintenance of an electron beam device easily in a short time, and an electron acceleration method.
      SOLUTION: The electron accelerator includes: a vacuum chamber 46 having an electron beam exit window 24, which is a vacuum chamber 46 formed within an elongate element; an electron generator 31 arranged within the vacuum chamber 46, for generating electrons; a high voltage connector 12 arranged within the elongate element, for supplying power to the electron generator 31; and a high voltage insulator 28 for separating the vacuum chamber 46 from the high voltage connector 12. In the electron accelerator, the electron generator 31 is enclosed by a housing, and at least one opening is formed between the electron generator 31 and the electron beam exit window in the housing, and when a voltage is supplied between the housing and the electron beam exit window 24, electrons are accelerated from the electron generator 31 in the form of an electron beam to the outside of the electron beam exit window 24 sealed in the vacuum chamber 46.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供在短时间内容易地维持电子束装置的电子加速器和电子加速方法。 解决方案:电子加速器包括:具有电子束出射窗24的真空室46,其是形成在细长元件内的真空室46; 布置在真空室46内的用于产生电子的电子发生器31; 布置在细长元件内的用于向电子发生器31供电的高压连接器12; 以及用于将真空室46与高压连接器12分离的高压绝缘体28.在电子加速器中,电子发生器31被壳体包围,并且在电子发生器31和电子束之间形成至少一个开口 出口窗口,并且当在壳体和电子束出射窗24之间提供电压时,将电子从电子发生器31以电子束的形式加速到密封在电子束出射窗口24的外侧。 真空室46.版权所有(C)2010,JPO&INPIT
    • 3. 发明专利
    • Electron beam accelerator
    • 电子光束加速器
    • JP2008209410A
    • 2008-09-11
    • JP2008037208
    • 2008-02-19
    • Advanced Electron Beams Incアドバンスト・エレクトロン・ビームズ・インコーポレーテッド
    • AVNERY TZVI
    • G21K5/04G21K5/00H01J3/02H01J33/00H05H5/00
    • H01J33/02H01J3/027H01J33/00
    • PROBLEM TO BE SOLVED: To provide a small and simple electron accelerator for an electron beam device which facilitates maintenance of the electron beam device and dispenses with highly-trained personnel for vacuum technique and accelerator technique.
      SOLUTION: The electron accelerator includes a vacuum chamber 46 having an electron beam exit window 24, which is bonded airtightly to and sealed by the electron beam exit window 24 formed of a metal foil through intermetallic contact to thereby maintain vacuum continuously; an electron generator 31 positioned within the vacuum chamber 46 for generating electrons; and a housing 30 surrounding the electron generator. The housing 30 has a first series of openings, formed in the housing part between the electron generator 31 and the exit window 24 for allowing electrons to accelerate from the electron generator 31 out the exit window 24 as an electron beam, when a voltage is applied between the housing 30 and the exit window 24.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供电子束装置的小而简单的电子加速器,其有助于电子束装置的维护,并且免除了用于真空技术和加速器技术的训练有素的人员。 解决方案:电子加速器包括具有电子束出射窗24的真空室46,其通过金属间接触气密地粘合并由由金属箔形成的电子束出射窗24密封,从而连续保持真空; 位于真空室46内用于产生电子的电子发生器31; 以及围绕电子发生器的壳体30。 壳体30具有形成在电子发生器31和出射窗24之间的壳体部分中的第一系列开口,用于当施加电压时允许电子从电子发生器31以出射窗24作为电子束从出射窗24加速 在壳体30和出口窗口24之间。(C)2008年,JPO和INPIT
    • 4. 发明专利
    • Electron beam accelerator
    • 电子光束加速器
    • JP2010181415A
    • 2010-08-19
    • JP2010100538
    • 2010-04-26
    • Advanced Electron Beams Incアドバンスト・エレクトロン・ビームズ・インコーポレーテッド
    • AVNERY TZVI
    • G21K5/04B01J19/12H01J3/02H01J33/00H05H5/00
    • H01J33/02H01J3/027H01J33/00
    • PROBLEM TO BE SOLVED: To provide an electron beam accelerator and an electron accelerating method, which facilitate maintenance of an electron beam device in a short time.
      SOLUTION: The electron beam accelerator includes: a vacuum chamber 46 having an electron beam radiation window 24 and the vacuum chamber 46 is formed in a slender element; an electron generator 31 arranged in the vacuum chamber 46 for generating electrons; a high voltage connector 12 arranged inside the slender element for feeding electric power to the electron generator 31; and a high voltage insulator 28 for separating the high voltage connector 12 and the vacuum chamber 46. The electron generator 31 is surrounded by a housing. The housing is provided with at least one opening between the electron generator 31 and the electron beam radiating window in the housing. When a voltage is applied between the housing and the electron beam radiation window 24, electrons from the electron generator 31 are turned into an electron beam, and accelerated to the outside of the electron beam radiation window 24 sealed within the vacuum chamber 46.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种电子束加速器和电子加速方法,其有助于在短时间内维持电子束装置。 解决方案:电子束加速器包括:具有电子束辐射窗口24和真空室46的真空室46形成在细长元件中; 布置在真空室46中用于产生电子的电子发生器31; 布置在细长元件内的用于将电力馈送到电子发生器31的高压连接器12; 以及用于分离高压连接器12和真空室46的高压绝缘体28.电子发生器31被壳体包围。 壳体在电子发生器31和壳体中的电子束辐射窗口之间设置有至少一个开口。 当在壳体和电子束辐射窗24之间施加电压时,来自电子发生器31的电子转变为电子束,并被加速到密封在真空室46内的电子束辐射窗24的外部。

      版权所有(C)2010,JPO&INPIT

    • 5. 发明专利
    • Electron beam accelerator
    • 电子光束加速器
    • JP2009259848A
    • 2009-11-05
    • JP2009183768
    • 2009-08-06
    • Advanced Electron Beams Incアドバンスト・エレクトロン・ビームズ・インコーポレーテッド
    • AVNERY TZVI
    • G21K5/04H01J37/063B01J19/12G21K1/00G21K5/00H01J3/02H01J33/00H01J37/04H05H5/00
    • H01J33/02H01J3/027H01J33/00
    • PROBLEM TO BE SOLVED: To provide an electron acceleration method facilitating maintenance of an electron beam device, and increasing the degree of vacuum in a vacuum chamber without operating a vacuum pump for continuous exhaust.
      SOLUTION: This electron acceleration method is structured such that an electron beam emission window 24 is airtightly brazed to a vacuum chamber 46 in a place controlled into a clean air environment; the vacuum chamber 46 sustainably keeping vacuum without operating the vacuum pump for continuous exhaust is arranged by welding or bonding and connecting to be sealed; electrons are generated by an electron generator 31 positioned within the vacuum chamber; the electron generator is surrounded by a housing 30; the housing is formed with an opening between the electron generator and the electron beam emission window for allowing electrons to be accelerated from the electron generator 31 to the outside of the electron beam emission window 24 in an electron beam when a voltage is applied between the housing and the electron beam emission window 24; molecules in the vacuum chamber is ionized; and the ionized molecules in the vacuum chamber are captured to increase the degree of vacuum in the vacuum chamber.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种促进电子束装置的维护的电子加速方法,并且在不使用用于连续排气的真空泵的情况下提高真空室中的真空度。 解决方案:该电子加速方法被构造成使得电子束发射窗24在控制在清洁空气环境中的位置气密地钎焊到真空室46; 真空室46可持续地保持真空而无需操作用于连续排气的真空泵通过焊接或接合和连接来布置以进行密封; 电子由位于真空室内的电子发生器31产生; 电子发生器被壳体30包围; 壳体形成有电子发生器和电子束发射窗口之间的开口,用于当电压施加在壳体之间时允许电子以电子束从电子发生器31加速到电子束发射窗口24的外部 和电子束发射窗24; 真空室中的分子被离子化; 捕获真空室中的电离分子以增加真空室中的真空度。 版权所有(C)2010,JPO&INPIT
    • 6. 发明申请
    • OZONE AND PLASMA GENERATION USING ELECTRON BEAM TECHNOLOGY
    • 使用电子束技术的臭氧和等离子体生成
    • WO2012083184A1
    • 2012-06-21
    • PCT/US2011/065523
    • 2011-12-16
    • ADVANCED ELECTRON BEAMS, INC.BAKHTARI, Kaveh
    • BAKHTARI, Kaveh
    • H01L21/306
    • B01J19/085C01B13/10H01J3/02H01J33/00H01J37/3233H01J37/32357H01J37/32816
    • This invention proposes, among other things, systems and methods for providing ozone generators or plasma generators that generate an electric field in an electron generation chamber that is separate from a reaction chamber. An electron beam emitter in an electron generation chamber is configured to emit a beam of electrons and is separated from the reaction chamber by an electron permeable barrier that provides a window through which the beam of electrons passes. The electrons are accelerated to the required energy in the electron generation chamber and transmitted through the barrier to the reaction chamber, where an input gas source introduces an input gas into the reaction chamber. The input gas may react with the beam of electrons inside the reaction chamber to form an output gas comprising a plasma or a concentration of ozone, and the output gas passes from the reaction chamber to a wafer processing chamber.
    • 本发明尤其提出了用于提供在与反应室分离的电子发生室中产生电场的臭氧发生器或等离子体发生器的系统和方法。 电子发生室中的电子束发射器被配置为发射电子束,并且通过电子可透过的屏障与反应室分离,该屏障提供电子束通过的窗口。 电子被加速到电子发生室中所需的能量,并通过势垒传递到反应室,其中输入气体源将输入气体引入反应室。 输入气体可以与反应室内的电子束反应形成包含等离子体或浓度的臭氧的输出气体,并且输出气体从反应室通到晶片处理室。