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    • 3. 发明授权
    • Method for manufacturing an electrical test probe
    • 电测试探头的制造方法
    • US07736690B2
    • 2010-06-15
    • US12017300
    • 2008-01-21
    • Hideki HirakawaYuko YamadaYosuke YoshizawaTakayuki HayashizakiAkira SomaShinji Kuniyoshi
    • Hideki HirakawaYuko YamadaYosuke YoshizawaTakayuki HayashizakiAkira SomaShinji Kuniyoshi
    • B05D5/12
    • G01R1/06755G01R1/06733Y10T29/49117Y10T29/49204
    • A probe tip section of an electrical test probe has a laminated structure consisting of a first deposition portion and a second deposition portion covering the first deposition portion, and by the laminated structure, a maximum cross-sectional area portion at which the cross-sectional area of the probe tip section is increased to a base portion is provided between a tip end of the probe tip section and the base portion in the probe tip section. At the maximum cross-sectional area portion, a dimension in the X direction as seen on a flat surface perpendicular to a protruding direction of the probe tip section is increased in a one-dimensional way, and in addition, a dimension in the Y direction perpendicular to the X direction is increased from the tip end toward the base portion, as a result of which the cross-sectional area of the probe tip section can be increased in a two-dimensional way. Thus, the cross-sectional area at the maximum cross-sectional area portion reaching the base portion of the probe tip section can be made to be larger than in the conventional case, and along with the increase of the cross-sectional area, the stress acting on the base portion can be lowered.
    • 电测试探针的探针尖端部分具有由第一沉积部分和覆盖第一沉积部分的第二沉积部分组成的层压结构,并且通过层压结构,包括最大横截面积部分,其截面积 在探针末端部的前端部与探针头部的基部之间,设置有探针头部的部分增加到基部。 在最大横截面积部分,在垂直于探针尖端部分的突出方向的平坦表面上看到的X方向上的尺寸以一维方式增加,另外,Y方向上的尺寸 与X方向垂直的方向从前端朝向基部增加,结果能够以二维方式增大探针末端部的截面积。 因此,能够使到达到探头前端部的基部的最大截面积部分的截面积大于常规情况,并且随着横截面积的增加,应力 可以降低作用于基部的部分。
    • 4. 发明授权
    • Method for manufacturing a probe
    • 探针制造方法
    • US07721429B2
    • 2010-05-25
    • US12017299
    • 2008-01-21
    • Akira SomaTakayuki HayashizakiYosuke YoshizawaHideki Hirakawa
    • Akira SomaTakayuki HayashizakiYosuke YoshizawaHideki Hirakawa
    • H01R43/16
    • H01R13/2407H01R43/16H01R2201/20Y10T29/49126Y10T29/49128Y10T29/4913Y10T29/49153Y10T29/49204Y10T29/49222
    • A probe formed on a base table is detached from the base table without giving damage on the probe. The present invention provides a probe manufacturing method comprising the steps of forming on a sacrificial layer on a base table a recess exposing the sacrificial layer with a resist, depositing a probe material in the recess to form a probe and then removing the resist, leaving part of the sacrificial layer and removing the rest by an etching process, and detaching from the base table the probe held on the base table by the remaining part of the sacrificial layer. In the recess of the resist are formed a main body part corresponding to a flat surface shape of the probe and an auxiliary part continuing into the main body part. The probe is formed by deposition of the material at the main body part, and a holding portion is formed by deposition of the material at the auxiliary part. The auxiliary part is formed in a flat surface shape sufficient for a sacrificial layer part under the holding portion to remain when a sacrificial layer part under the probe is removed by the etching process. The probe is separated from the holding portion after the sacrificial layer part under the probe is removed and while the sacrificial layer part under the holding portion remains.
    • 形成在基台上的探头与基座分离而不会损坏探头。 本发明提供了一种探针制造方法,包括以下步骤:在基台上的牺牲层上形成用抗蚀剂暴露牺牲层的凹部,将探针材料沉积在凹部中以形成探针,然后除去抗蚀剂,留下部分 的牺牲层,并通过蚀刻工艺去除其余部分,并且通过牺牲层的剩余部分从基台分离保持在基台上的探针。 在抗蚀剂的凹部中形成有对应于探针的平坦表面形状的主体部分和连续进入主体部分的辅助部件。 探针通过在主体部分沉积材料形成,并且通过在辅助部分沉积材料形成保持部分。 当通过蚀刻工艺去除探针下方的牺牲层部分时,辅助部件形成为足够用于保持部分下方的牺牲层部分的平坦表面形状。 在探针下方的牺牲层部分被去除之后,并且在保持部分下面的牺牲层部分保留下来,探针与保持部分分离。
    • 8. 发明申请
    • METHOD FOR MANUFACTURING A PROBE
    • 制造探针的方法
    • US20080184559A1
    • 2008-08-07
    • US12017299
    • 2008-01-21
    • Akira SOMATakayuki HAYASHIZAKIYosuke YOSHIZAWAHideki HIRAKAWA
    • Akira SOMATakayuki HAYASHIZAKIYosuke YOSHIZAWAHideki HIRAKAWA
    • H01R43/16
    • H01R13/2407H01R43/16H01R2201/20Y10T29/49126Y10T29/49128Y10T29/4913Y10T29/49153Y10T29/49204Y10T29/49222
    • A probe formed on a base table is detached from the base table without giving damage on the probe. The present invention provides a probe manufacturing method comprising the steps of forming on a sacrificial layer on a base table a recess exposing the sacrificial layer with a resist, depositing a probe material in the recess to form a probe and then removing the resist, leaving part of the sacrificial layer and removing the rest by an etching process, and detaching from the base table the probe held on the base table by the remaining part of the sacrificial layer. In the recess of the resist are formed a main body part corresponding to a flat surface shape of the probe and an auxiliary part continuing into the main body part. The probe is formed by deposition of the material at the main body part, and a holding portion is formed by deposition of the material at the auxiliary part. The auxiliary part is formed in a flat surface shape sufficient for a sacrificial layer part under the holding portion to remain when a sacrificial layer part under the probe is removed by the etching process. The probe is separated from the holding portion after the sacrificial layer part under the probe is removed and while the sacrificial layer part under the holding portion remains.
    • 形成在基台上的探头与基座分离而不会损坏探头。 本发明提供了一种探针制造方法,包括以下步骤:在基台上的牺牲层上形成用抗蚀剂暴露牺牲层的凹部,将探针材料沉积在凹部中以形成探针,然后除去抗蚀剂,留下部分 的牺牲层,并通过蚀刻工艺去除其余部分,并且通过牺牲层的剩余部分从基台分离保持在基台上的探针。 在抗蚀剂的凹部中形成有对应于探针的平坦表面形状的主体部分和连续进入主体部分的辅助部件。 探针通过在主体部分沉积材料形成,并且通过在辅助部分沉积材料形成保持部分。 当通过蚀刻工艺去除探针下方的牺牲层部分时,辅助部件形成为足够用于保持部分下方的牺牲层部分的平坦表面形状。 在探针下方的牺牲层部分被去除之后,并且在保持部分下面的牺牲层部分保留下来,探针与保持部分分离。