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    • 6. 发明授权
    • Surface treatment composition and method for treating surface of substrate by using the same
    • 表面处理组合物及其使用方法
    • US06228179B1
    • 2001-05-08
    • US09523144
    • 2000-03-10
    • Hitoshi Morinaga
    • Hitoshi Morinaga
    • C23G114
    • H01L21/02052C11D3/33C11D3/3418C11D3/3472C11D3/349C11D3/364C11D3/365C23G1/14
    • A surface treatment composition containing a complexing agent as a metal deposition preventive in a liquid medium, in which the complexing agent is an ethylenediaminephenol derivative of the following general formula (1) or its salt: wherein X1 and X2 are hydroxyl groups; Y1 to Y8 are respectively independently a hydrogen atom, a hydroxyl group, a halogen atom, a carboxyl group, a phosphonic acid group, a sulfonic acid group, a carbonyl group, a nitro group, a nitroso group, an amino group, an imino group, a nitrilo group, a nitrile group, a thiocyanate group, a hydroxyamino group, a hydroxyimino group, or an alkyl or alkoxy group which may have a substituent, provided that at least one of Y1 to Y8 is not a hydrogen atom; Z1 to Z4 are respectively independently a hydrogen atom, a carboxyl group or a sulfonic acid group; and R1 to R4 are respectively independently a hydrogen atom or an alkyl group which may have a substituent.
    • 在液体介质中含有络合剂作为金属沉积防止剂的表面处理组合物,其中络合剂是下列通式(1)的乙二胺苯酚衍生物或其盐:其中X1和X2是羟基; Y 1〜Y 8分别独立地表示氢原子,羟基,卤素原子,羧基,膦酸基,磺酸基,羰基,硝基,亚硝基,氨基,亚氨基 基团,次氮基,腈基,硫氰酸酯基,羟基氨基,羟基亚氨基或可以具有取代基的烷基或烷氧基,条件是Y 1至Y 8中的至少一个不是氢原子; Z1至Z4分别独立地为氢原子,羧基或磺酸基; R 1〜R 4分别独立地为氢原子或可具有取代基的烷基。
    • 7. 发明授权
    • Surface treatment composition and method for treating surface of
substrate by using the same
    • 表面处理组合物及其使用方法
    • US6143706A
    • 2000-11-07
    • US13066
    • 1998-01-26
    • Hitoshi Morinaga
    • Hitoshi Morinaga
    • C11D3/33C11D3/34C11D3/36C23G1/14H01L21/304H01L21/306C11D3/30
    • H01L21/02052C11D3/33C11D3/349C11D3/364C11D3/365C23G1/14C11D3/3418C11D3/3472
    • A surface treatment composition containing a complexing agent as a metal deposition preventive in a liquid medium, in which the complexing agent is an ethylenediaminephenol derivative of the following general formula (1) or its salt: ##STR1## wherein X.sub.1 and X.sub.2 are hydroxyl groups; Y.sub.1 to Y.sub.8 are respectively independently a hydrogen atom, a hydroxyl group, a halogen atom, a carboxyl group, a phosphonic acid group, a sulfonic acid group, a carbonyl group, a nitro group, a nitroso group, an amino group, an imino group, a nitrilo group, a nitrile group, a thiocyanate group, a hydroxyamino group, a hydroxyimino group, or an alkyl or alkoxy group which may have a substituent, provided that at least one of Y.sub.1 to Y.sub.8 is not a hydrogen atom; Z.sub.1 to Z.sub.4 are respectively independently a hydrogen atom, a carboxyl group or a sulfonic acid group; and R.sub.1 to R.sub.4 are respectively independently a hydrogen atom or an alkyl group which may have a substituent.
    • 在液体介质中含有络合剂作为金属沉积防止剂的表面处理组合物,其中络合剂是下列通式(1)的乙二胺苯酚衍生物或其盐:其中X 1和X 2是羟基; Y 1〜Y 8分别独立地表示氢原子,羟基,卤素原子,羧基,膦酸基,磺酸基,羰基,硝基,亚硝基,氨基,亚氨基 基团,次氮基,腈基,硫氰酸酯基,羟基氨基,羟基亚氨基或可以具有取代基的烷基或烷氧基,条件是Y 1至Y 8中的至少一个不是氢原子; Z1至Z4分别独立地为氢原子,羧基或磺酸基; R 1〜R 4分别独立地为氢原子或可具有取代基的烷基。
    • 10. 发明授权
    • Polishing composition
    • 抛光组成
    • US09028574B2
    • 2015-05-12
    • US13878362
    • 2011-10-06
    • Keiji AshitakaHitoshi MorinagaAkihito Yasui
    • Keiji AshitakaHitoshi MorinagaAkihito Yasui
    • C09K3/14C09G1/02H01L21/3105
    • C09K3/1409C09G1/02C09K3/1463H01L21/31053
    • A polishing composition contains colloidal silica particles having protrusions on the surfaces thereof. The average of values respectively obtained by dividing the height of a protrusion on the surface of each particle belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles by the width of a base portion of the same protrusion is no less than 0.245. Preferably, the part of the colloidal silica particles that has larger particle diameter than the volume average particle diameter of the colloidal silica particles has an average aspect ratio of no less than 1.15. Preferably, the protrusions on the surfaces of particles belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles have an average height of no less than 3.5 nm.
    • 抛光组合物包含其表面上具有突起的胶体二氧化硅颗粒。 分别通过将属于粒径比胶体二氧化硅粒子的体积平均粒径大的胶体二氧化硅粒子的一部分的粒子的表面上的突起的高度除以碱的宽度而得到的值的平均值 相同突起的部分不小于0.245。 优选地,粒径比胶体二氧化硅粒子的体积平均粒径大的胶态二氧化硅粒子的平均长径比优选为1.15以上。 优选地,粒径比胶态二氧化硅粒子的体积平均粒径大的胶体二氧化硅粒子的粒子的表面上的突起的平均高度优选为3.5nm以上。